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PLASMA REACTOR USING INDUCTIVE RF COUPLING, AND PROCESSES

08/948,560 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Oct. 10, 1997
Examiner THI D DANG
Class 118
Art Group 1763
Patent No. 6,251,792
Case Type Utility - 118/724000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 07/626,050 Abandoned
Parent 07/624,740 Abandoned
Parent 07/559,947 Abandoned
Child 09/504,312 Patented
Last Updated: 2 years, 5 months ago
Date # Transaction