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METHOD AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING

08/939,689 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Sept. 29, 1997

Examiner EILEEN P MORGAN

Class 451

Art Group 3723

Patent No. 5,888,120

Case Type Utility - 451/041000

Status Patented Case

Child 09/216,395 Abandoned

Last Updated: 1 year, 3 months ago

Date	#	Transaction
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METHOD AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING

08/939,689 | U.S. Patent Application

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