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PLASMA REACTOR AND PROCESSES USING RF INDUCTIVE COUPLING AND SCAVENGER TEMPERATURE CONTROL

08/936,777 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Sept. 24, 1997
Examiner RODNEY GLENN MCDONALD
Class 216
Art Group 1753
Patent No. 5,888,414
Case Type Re-Issue - 216/068000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/453,136 Abandoned
Parent 07/941,507 Abandoned
Parent 07/722,340 Abandoned
Parent 08/41,796 Patented
Last Updated: 2 years, 7 months ago
Date # Transaction