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HIGH DENSITY PLASMA PROCESS CHAMBER

08/893,599 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed July 14, 1997
Examiner RUDY ZERVIGON
Class 118
Art Group 1763
Patent No. 6,095,084
Case Type Utility - 118/723000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/832,743 Abandoned
Parent 08/743,059 Patented
Parent 08/597,577 Patented
Parent 08/648,254 Patented
Child 09/595,934 Abandoned
Last Updated: 4 years, 5 months ago
Date # Transaction