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INDUCTIVELY COUPLED RF PLASMA REACTOR HAVING AN OVERHEAD SOLENOIDAL ANTENNA AND MODULAR CONFINEMENT MAGNET LINERS

08/893,393 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed July 15, 1997
Examiner RODNEY GLENN MCDONALD
Class 156
Art Group 1753
Patent No. 6,074,512
Case Type Utility - 156/345000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/733,555 Patented
Parent 08/648,254 Patented
Child 09/82,430 Patented
Child 09/517,598 Abandoned
Last Updated: 4 years, 11 months ago
Date # Transaction