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PROCESS FOR ETCHING OXIDES IN AN ELECTROMAGNETICALLY COUPLED PLANAR PLASMA APPARATUS

08/835,091 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed April 4, 1997
Examiner WILLIAM A POWELL
Class 156
Art Group 1763
Patent No. 5,772,832
Case Type Utility - 156/345000
Status Patented Case
Parent 08/762,464 Patented
Last Updated: 4 years, 6 months ago
Date # Transaction