Download Docs
Export

SCAVENGING FLUORINE IN A PLANAR INDUCTIVELY COUPLED PLASMA REACTOR

08/762,464 | U.S. Patent Application

Interested in this case?

Request a Demo Track this case, and find millions of cases like it, let us show you how.
Location FILE REPOSITORY (FRANCONIA)
Filed Dec. 9, 1996
Examiner JEFFRIE ROBERT LUND
Class 216
Art Group 1763
Patent No. 6,217,785
Case Type Utility - 216/068000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/289,336 Abandoned
Parent 07/984,045 Abandoned
Child 08/835,091 Patented
Child 09/708,198 Abandoned
Last Updated: 4 years, 9 months ago
Date # Transaction