Download Docs
Export

PROCESS FOR ETCHING OXIDES IN AN ELECTROMAGNETICALLY COUPLED PLANAR PLASMA APPARATUS

08/761,045 | U.S. Patent Application

Interested in this case?

Request a Demo Track this case, and find millions of cases like it, let us show you how.
Location FILE REPOSITORY (FRANCONIA)
Filed Dec. 5, 1996
Examiner THI D DANG
Class 216
Art Group 1763
Patent No. 6,090,303
Case Type Utility - 216/068000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/289,336 Abandoned
Parent 07/984,045 Abandoned
Parent 07/722,340 Abandoned
Last Updated: 4 years, 4 months ago
Date # Transaction