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KENNETH S. COLLINS CRAIG RODERICK DOUGLAS BUCHBERGER JOHN TROW VIKTOR SHEL

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APPLIED MATERIALS, INC.

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RF TUNING METHOD FOR AN RF PLASMA REACTOR USING FREQUENCY SERVOING AND POWER, VOLTAGE, CURRENT OR DI/DT CONTROL

08/743,059 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Nov. 4, 1996

Examiner JUSTIN P BETTENDORF

Class 315

Art Group 2817

Patent No. 6,252,354

Case Type Utility - 315/111510

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child 08/893,599 Patented

Child 09/595,934 Abandoned

Last Updated: 4 years, 1 month ago

Date	#	Transaction
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RF TUNING METHOD FOR AN RF PLASMA REACTOR USING FREQUENCY SERVOING AND POWER, VOLTAGE, CURRENT OR DI/DT CONTROL

08/743,059 | U.S. Patent Application

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