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Inventors

KENNETH S. COLLINS MICHAEL RICE JOHN TROW DOUGLAS BUCHBERGER ERIC ASKARINAM JOSHUA TSUI DAVID GROECHEL RAYMOND HUNG

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APPLIED MATERIALS, INC.

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PARALLEL PLATE ELECTRODE PLASMA REACTOR HAVING AN INDUCTIVE ANTENNA AND ADJUSTABLE RADIAL DISTRIBUTION OF PLASMA ION DENSITY

08/740,124 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Oct. 24, 1996

Examiner THI D DANG

Class 156

Art Group 1763

Patent No. 6,054,013

Case Type Utility - 156/345000

Status Patented Case

Parent 08/597,577 Patented

Parent 08/648,254 Patented

Child 09/23,365 Patented

Child 09/539,814 Patented

Child 09/480,007 Patented

Child 09/539,814 Patented

Last Updated: 4 years, 9 months ago

Date	#	Transaction
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PARALLEL PLATE ELECTRODE PLASMA REACTOR HAVING AN INDUCTIVE ANTENNA AND ADJUSTABLE RADIAL DISTRIBUTION OF PLASMA ION DENSITY

08/740,124 | U.S. Patent Application

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