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PLASMA REACTOR USING UHF/VHF AND RF TRIODE SOURCE, AND PROCESS

08/683,125 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed July 16, 1996
Examiner NAM X NGUYEN
Class 156
Art Group 1753
Patent No. 5,707,486
Case Type Utility - 156/999999
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/367,912 Abandoned
Parent 08/128,033 Abandoned
Parent 07/644,004 Abandoned
Parent 07/626,050 Abandoned
Parent 07/624,740 Abandoned
Parent 07/559,947 Abandoned
Last Updated: 4 years, 8 months ago
Date # Transaction