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METHOD FOR PROCESSING SUBSTRATES USING GASEOUS SILICON SCAVENGER

08/673,972 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed July 1, 1996
Examiner RODNEY GLENN MCDONALD
Class 216
Art Group 1753
Patent No. 6,444,137
Case Type Utility - 216/079000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/453,136 Abandoned
Parent 07/941,507 Abandoned
Parent 07/824,856 Abandoned
Parent 07/722,340 Abandoned
Parent 07/626,050 Abandoned
Parent 07/624,740 Abandoned
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Last Updated: 4 years, 4 months ago
Date # Transaction