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PAUL F. GROSSHART

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LAM RESEARCH CORPORATION

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METHOD AND APPARATUS FOR ENHANCING OUTCOME UNIFORMITY OF DIRECT-PLASMA PROCESSES

08/671,767 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed June 28, 1996

Examiner JEFFREY E RUSSEL

Class 118

Art Group 1654

Patent No. 5,948,283

Case Type Utility - 118/723000

Status Patented Case

Last Updated: 4 years, 8 months ago

Date	#	Transaction
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METHOD AND APPARATUS FOR ENHANCING OUTCOME UNIFORMITY OF DIRECT-PLASMA PROCESSES

08/671,767 | U.S. Patent Application

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