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THOMAS E. WICKER JOEL M. COOK ROBERT A. MARASCHIN WILLIAM S. KENNEDY NEIL BENJAMIN

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LAM RESEARCH CORPORATION

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TEMPERATURE CONTROLLING METHOD AND APPARATUS FOR A PLASMA PROCESSING CHAMBER

08/658,259 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed June 5, 1996

Examiner THI D DANG

Class 156

Art Group 1763

Patent No. 5,863,376

Case Type Utility - 156/345000

Status Patented Case

Child PCT/US97/09031 Published

Last Updated: 4 years, 4 months ago

Date	#	Transaction
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TEMPERATURE CONTROLLING METHOD AND APPARATUS FOR A PLASMA PROCESSING CHAMBER

08/658,259 | U.S. Patent Application

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