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Inventors

MASAYUKI KOJIMA YOSHIKAZU ITO KAZUSHI TOMITA SHIGEKI TOZAWA SHUNICHI IIMURO MASASHI ARASAWA EIICHI NISHIMURA

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TOKYO ELECTRON LIMITED

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ANISOTROPIC ETCHING METHOD AND APPARATUS

08/623,737 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed March 29, 1996

Examiner GEORGE A GOUDREAU

Class 216

Art Group 1763

Patent No. 5,766,498

Case Type Utility - 216/071000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Parent 08/473,777 Abandoned

Parent 08/154,566 Patented

Child 4-310279

Last Updated: 4 years, 5 months ago

Date	#	Transaction
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ANISOTROPIC ETCHING METHOD AND APPARATUS

08/623,737 | U.S. Patent Application

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