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DEAN R. DENISON JAMES LAM

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LAM RESEARCH CORPORATION

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METHOD FOR DEPOSITING FLUORINE DOPED SILICON DIOXIDE FILMS

08/604,018 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Feb. 20, 1996

Examiner MARIANNE L PADGETT

Class 427

Art Group 1762

Patent No. 6,042,901

Case Type Utility - 427/579000

Status Patented Case

Child PCT/US97/02556 Published

Last Updated: 4 years, 7 months ago

Date	#	Transaction
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METHOD FOR DEPOSITING FLUORINE DOPED SILICON DIOXIDE FILMS

08/604,018 | U.S. Patent Application

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