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Inventors

KENNETH S. COLLINS MICHAEL RICE JOHN TROW DOUGLAS BUCHBERGER ERIC ASKARINAM JOSHUA CHIU-WANG TSUI DAVID W. GROECHEL RAYMOND HUNG

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APPLIED MATERIALS, INC.

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PLASMA REACTOR HAVING AN INDUCTIVE ANTENNA COUPLING POWER THROUGH A PARALLEL PLATE ELECTRODE

08/597,577 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Feb. 2, 1996

Examiner THI D DANG

Class 118

Art Group 1763

Patent No. 6,077,384

Case Type Utility - 118/723000

Status Patented Case

Parent 08/521,668 Abandoned

Parent 08/289,336 Abandoned

Child 08/740,124 Patented

Child 09/523,824 Patented

Child 08/679,867 Abandoned

Child 09/23,365 Patented

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Last Updated: 4 years, 5 months ago

Date	#	Transaction
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PLASMA REACTOR HAVING AN INDUCTIVE ANTENNA COUPLING POWER THROUGH A PARALLEL PLATE ELECTRODE

08/597,577 | U.S. Patent Application

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