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PLASMA REACTOR USING INDUCTIVE RF COUPLING, AND PROCESSES

08/580,026 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Dec. 20, 1995
Examiner RODNEY GLENN MCDONALD
Class 156
Art Group 1753
Case Type Utility - 156/345000
Status Abandoned -- Failure to Respond to an Office Action
Parent 08/41,796 Patented
Parent 07/722,340 Abandoned
Parent 07/626,050 Abandoned
Parent 07/624,670 Patented
Parent 07/559,947 Abandoned
Child 08/648,254 Patented
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Last Updated: 4 years, 11 months ago
Date # Transaction