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MICHAEL RICE DAVID W. GROECHEL JAMES CRUSE KENNETH S. COLLINS

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APPLIED MATERIALS INC.

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APPARATUS AND METHOD FOR ATTAINING REPEATABLE TEMPERATURE VERSUS TIME PROFILES FOR PLASMA HEATED INTERACTIVE PARTS USED IN MASS PRODUCTION PLASMA PROCESSING

08/524,135 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Sept. 5, 1995

Examiner VERLENE J RYAN

Class 156

Art Group 1641

Patent No. 5,925,212

Case Type Utility - 156/345000

Status Patented Case

Last Updated: 4 years, 6 months ago

Date	#	Transaction
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APPARATUS AND METHOD FOR ATTAINING REPEATABLE TEMPERATURE VERSUS TIME PROFILES FOR PLASMA HEATED INTERACTIVE PARTS USED IN MASS PRODUCTION PLASMA PROCESSING

08/524,135 | U.S. Patent Application

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