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KENNETH S. COLLINS

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APPLIED MATERIALS, INC.

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PARALLEL-PLATE ELECTRODE PLASMA REACTOR HAVING AN INDUCTIVE ANTENNA COUPLING POWER THROUGH A PARALLEL PLATE ELECTRODE

08/521,668 | U.S. Patent Application

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Location TECH CENTER 1700 - LIE TEAM 6, REM 6B84

Filed Aug. 31, 1995

Examiner THI D DANG

Class 156

Art Group 1763

Case Type Utility - 156/345000

Status Abandoned -- File-Wrapper-Continuation Parent Application

Child 08/597,577 Patented

Child 08/936,028 Patented

Child 10/2,940 Patented

Child PCT/US96/14157 Published

Child 08/648,254 Patented

Child 08/648,256 Patented

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Last Updated: 4 years, 10 months ago

Date	#	Transaction
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PARALLEL-PLATE ELECTRODE PLASMA REACTOR HAVING AN INDUCTIVE ANTENNA COUPLING POWER THROUGH A PARALLEL PLATE ELECTRODE

08/521,668 | U.S. Patent Application

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