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MICHAEL RICE JEFFREY MARKS DAVID W. GROECHEL NICOLAS J. BRIGHT

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PLASMA ETCH APPARATUS WITH HEATED SCAVENGING SURFACES

08/503,467 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed July 18, 1995

Examiner THI D DANG

Class 216

Art Group 1763

Patent No. 5,770,099

Case Type Utility - 216/068000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Parent 08/138,060 Patented

Child 09/3,867 Patented

Child 08/648,254 Patented

Child 08/648,256 Patented

Child 08/733,554 Patented

Child 08/733,555 Patented

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Last Updated: 4 years, 11 months ago

Date	#	Transaction
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PLASMA ETCH APPARATUS WITH HEATED SCAVENGING SURFACES

08/503,467 | U.S. Patent Application

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