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PLASMA REACTOR USING INDUCTIVE RF COUPLING, AND PROCESSES

08/468,573 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed June 6, 1995
Examiner MICHAEL B SHINGLETON
Class 315
Art Group 2817
Patent No. 6,545,420
Case Type Utility - 315/111510
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/41,796 Patented
Parent 07/722,340 Abandoned
Parent 07/626,050 Abandoned
Parent 07/624,740 Abandoned
Parent 07/559,947 Abandoned
Last Updated: 4 years, 5 months ago
Date # Transaction