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Inventors

TSUNEHIKO TSUBONE NAOYUKI TAMURA SHIGEKAZU KATO KOUJI NISHIHATA ATSUSHI ITOU

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HITACHI, LTD.

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VACUUM PROCESSING METHOD AND APPARATUS

08/460,600 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed June 2, 1995

Examiner JOHN K FORD

Class 165

Art Group 3407

Patent No. 5,673,750

Case Type Utility - 165/047000

Status Patented Case

Parent 08/246,300 Patented

Parent 07/724,801 Patented

Child 02-172757

Child 02-116965

Last Updated: 4 years, 6 months ago

Date	#	Transaction
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VACUUM PROCESSING METHOD AND APPARATUS

08/460,600 | U.S. Patent Application

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