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PLASMA REACTOR AND PROCESSES USING RF INDUCTIVE COUPLING AND SCAVENGER TEMPERATURE CONTROL

08/453,136 | U.S. Patent Application

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Location TECH CENTER 1700 - TEAM 5
Filed May 24, 1995
Examiner NAM X NGUYEN
Class 156
Art Group 1753
Case Type Utility - 156/999999
Status Abandoned -- File-Wrapper-Continuation Parent Application
Parent 07/941,507 Abandoned
Parent 07/824,856 Abandoned
Parent 07/722,340 Abandoned
Parent 07/644,004 Abandoned
Parent 07/626,050 Abandoned
Parent 07/559,947 Abandoned
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Last Updated: 4 years, 10 months ago
Date # Transaction