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SILICON SCAVENGER IN AN INDUCTIVELY COUPLED RF PLASMA REACTOR

08/41,796 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed April 1, 1993
Examiner NAM X NGUYEN
Class 156
Art Group 1109
Patent No. 5,556,501
Case Type Utility - 156/345000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 07/722,340 Abandoned
Parent 07/626,050 Abandoned
Parent 07/624,670 Patented
Parent 07/559,947 Abandoned
Child 08/468,573 Patented
Child 08/580,026 Abandoned
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Last Updated: 5 years ago
Date # Transaction