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PROCESSES USED IN AN RF COUPLED PLASMA REACTOR

08/41,118 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed April 1, 1993
Examiner GEORGE A GOUDREAU
Class 216
Art Group 1765
Patent No. 6,068,784
Case Type Utility - 216/068000
Status Application Undergoing Preexam Processing
Parent 07/722,340 Abandoned
Parent 07/626,050 Abandoned
Parent 07/624,670 Patented
Parent 07/559,947 Abandoned
Parent 07/416,750 Abandoned
Child 09/328,914 Abandoned
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Last Updated: 5 years ago
Date # Transaction