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PLASMA REACTOR USING UHF/VHF AND RF TRIODE SOURCE, AND PROCESS

08/367,912 | U.S. Patent Application

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Location
Filed Jan. 3, 1995
Examiner NAM X NGUYEN
Class 204
Art Group 1109
Case Type Utility - 204/298210
Status Abandoned -- File-Wrapper-Continuation Parent Application
Parent 08/128,033 Abandoned
Parent 07/644,004 Abandoned
Parent 07/626,050 Abandoned
Parent 07/624,740 Abandoned
Parent 07/559,947 Abandoned
Child 08/683,125 Patented
Last Updated: 5 years ago
Date # Transaction