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SCAVENGING FLUORINE IN A PLANAR INDUCTIVELY COUPLED PLASMA REACTOR

08/289,336 | U.S. Patent Application

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Location
Filed Aug. 11, 1994
Examiner THI D DANG
Class 156
Art Group 1109
Case Type Utility - 156/643000
Status Abandoned -- Failure to Respond to an Office Action
Parent 07/984,045 Abandoned
Child 08/761,045 Patented
Child 08/762,464 Patented
Child 08/597,577 Patented
Child 09/523,824 Patented
Child 09/708,198 Abandoned
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Last Updated: 4 years, 3 months ago
Date # Transaction