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Inventors

MICHAEL RICE JEFFREY MARKS DAVID W. GROECHEL NICOLAS J. BRIGHT

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APPLIED MATERIALS, INC.

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PLASMA ETCH APPARATUS WITH HEATED SCAVENGING SURFACES

08/138,060 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Oct. 15, 1993

Examiner THI D DANG

Class 216

Art Group 1109

Patent No. 5,477,975

Case Type Utility - 216/068000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child 08/503,467 Patented

Child 08/648,254 Patented

Child 08/648,256 Patented

Child 08/733,554 Patented

Child 08/733,555 Patented

Child 08/734,797 Patented

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Last Updated: 5 years ago

Date	#	Transaction
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PLASMA ETCH APPARATUS WITH HEATED SCAVENGING SURFACES

08/138,060 | U.S. Patent Application

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