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Plasma Reactor Using Uhf/VHF RF Triode Source,Process

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PLASMA REACTOR USING UHF/VHF AND RF TRIODE SOURCE, AND PROCESS

08/128,033 | U.S. Patent Application

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Filed Sept. 28, 1993

Case Type Utility - 204/298210

Status Abandoned -- File-Wrapper-Continuation Parent Application

Last Updated: 5 years ago

Date	#	Transaction
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PLASMA REACTOR USING UHF/VHF AND RF TRIODE SOURCE, AND PROCESS

08/128,033 | U.S. Patent Application

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