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High Density Plasma Formation Using Whistler Mode Excitation in a Reduced Cross-Sectional Area Formation Tube

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HIGH DENSITY PLASMA FORMATION USING WHISTLER MODE EXCITATION IN A REDUCED CROSS-SECTIONAL AREA FORMATION TUBE

08/10,553 | U.S. Patent Application

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Filed Jan. 28, 1993

Case Type Utility - 315/111410

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Last Updated: 5 years ago

Date	#	Transaction
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HIGH DENSITY PLASMA FORMATION USING WHISTLER MODE EXCITATION IN A REDUCED CROSS-SECTIONAL AREA FORMATION TUBE

08/10,553 | U.S. Patent Application

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