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Uhf/VHF Plasma for Use in Forming Integrated Circuit Structures on Semiconductor Wafers

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UHF/VHF PLASMA FOR USE IN FORMING INTEGRATED CIRCUIT STRUCTURES ON SEMICONDUCTOR WAFERS

07/973,199 | U.S. Patent Application

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Filed Nov. 6, 1992

Case Type Utility - 999/225000

Status Abandoned -- File-Wrapper-Continuation Parent Application

Last Updated: 5 years ago

Date	#	Transaction
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UHF/VHF PLASMA FOR USE IN FORMING INTEGRATED CIRCUIT STRUCTURES ON SEMICONDUCTOR WAFERS

07/973,199 | U.S. Patent Application

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