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Plasma Reactor Using Electromagnetic RF Coupling Processes

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PLASMA REACTOR USING ELECTROMAGNETIC RF COUPLING AND PROCESSES

07/824,856 | U.S. Patent Application

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Filed Jan. 24, 1992

Case Type Utility - 204/200000

Status Abandoned -- Failure to Respond to an Office Action

Last Updated: 5 years ago

Date	#	Transaction
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PLASMA REACTOR USING ELECTROMAGNETIC RF COUPLING AND PROCESSES

07/824,856 | U.S. Patent Application

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