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PLASMA REACTOR USING INDUCTIVE RF COUPLING, AND PROCESSES

07/722,340 | U.S. Patent Application

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Location
Filed June 27, 1991
Examiner NAM X NGUYEN
Class 204
Art Group 1109
Case Type Utility - 204/200000
Status Abandoned -- File-Wrapper-Continuation Parent Application
Parent 07/626,050 Abandoned
Parent 07/624,670 Patented
Parent 07/559,947 Abandoned
Child 07/824,856 Abandoned
Child 07/826,310 Patented
Child 08/41,118 Patented
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Last Updated: 5 years ago
Date # Transaction