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PLASMA REACTOR USING UHF/VHF AND RF THIODE SOURCE, AND PROCESSES

07/644,004 | U.S. Patent Application

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Location
Filed Jan. 18, 1991
Examiner NAM X NGUYEN
Class 204
Art Group 1109
Case Type Utility - 204/200000
Status Abandoned -- File-Wrapper-Continuation Parent Application
Parent 07/626,050 Abandoned
Parent 07/624,740 Abandoned
Parent 07/559,947 Abandoned
Child 08/128,033 Abandoned
Child 08/367,912 Abandoned
Child 08/683,125 Patented
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Last Updated: 5 years ago
Date # Transaction