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Inventors

KENNETH S. COLLINS CHAN-LON YANG JOHN M. WHITE

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APPLIED MATERIALS INC., A CORP. OF DE

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METHOD FOR PLASMA PROCESSING USING MAGNETICALLY ENHANCED PLASMA CHEMICAL VAPOR DEPOSITION

07/618,142 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Nov. 23, 1990

Examiner BYRON S EVERHART

Class 999

Art Group 1104

Patent No. 5,312,778

Case Type Utility - 999/225000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Parent 07/559,947 Abandoned

Parent 07/560,530 Abandoned

Parent 07/416,750 Abandoned

Last Updated: 5 years, 1 month ago

Date	#	Transaction
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METHOD FOR PLASMA PROCESSING USING MAGNETICALLY ENHANCED PLASMA CHEMICAL VAPOR DEPOSITION

07/618,142 | U.S. Patent Application

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