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Inventors

KENNETH S. COLLINS CRAIG A. RODERICK CHAN-LON YANG DAVID N.K. WANG DAN MAYDAN

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APPLIED MATERIALS, INC.

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VHF/UHF PLASMA PROCESS FOR USE IN FORMING INTEGRATED CIRCUIT STRUCTURES ON SEMICONDUCTOR WAFERS

07/560,530 | U.S. Patent Application

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Location

Filed July 31, 1990

Examiner BYRON S EVERHART

Class 999

Art Group 1104

Case Type Utility - 999/225000

Status Abandoned -- File-Wrapper-Continuation Parent Application

Parent 07/416,750 Abandoned

Child 07/902,757 Abandoned

Child 07/618,142 Patented

Child 07/973,199 Abandoned

Child 08/32,744 Patented

Last Updated: 5 years, 1 month ago

Date	#	Transaction
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VHF/UHF PLASMA PROCESS FOR USE IN FORMING INTEGRATED CIRCUIT STRUCTURES ON SEMICONDUCTOR WAFERS

07/560,530 | U.S. Patent Application

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