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Click below for detailed party information:

Inventor

STEPHEN E. SAVAS

Assignee

MATTSON TECHNOLOGY, INC.

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APPLIED MATERIALS, INC., Assignor SAVAS, STEVE, Assignor

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LOW FREQUENCY INDUCTIVE RF PLASMA REACTOR

07/460,707 | U.S. Patent Application

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Location FORMER GROUP 2200

Filed Jan. 4, 1990

Examiner JOHN W ELDRED

Class 422

Art Group 2201

Case Type Utility - 422/186000

Status Abandoned -- File-Wrapper-Continuation Parent Application

Child 08/374,404 Patented

Last Updated: 5 years, 1 month ago

Date	#	Transaction
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LOW FREQUENCY INDUCTIVE RF PLASMA REACTOR

07/460,707 | U.S. Patent Application

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