`Case 6:20-cv-00636—ADA Document 77-9 Filed 03/10/21 Page 1 of 48
`
`EXHIBIT 22
`
`EXHIBIT 22
`
`
`
`Case 6:20-cv-00636-ADA Document 77-9 Filed 03/10/21 Page 2 of 48
`I lllll llllllll Ill lllll lllll lllll lllll lllll 111111111111111111111111111111111
`US007378356B2
`
`c12) United States Patent
`Zhang et al.
`
`(IO) Patent No.:
`(45) Date of Patent:
`
`US 7,378,356 B2
`May 27, 2008
`
`(54) BIASED PULSE DC REACTIVE
`SPUTTERING OF OXIDE FILMS
`
`(75)
`
`Inventors: Hongmei Zhang, San Jose, CA (US);
`Mukundan Narasimhan, San Jose, CA
`(US); Ravi B. Mullapudi, San Jose,
`CA (US); Richard E. Demaray,
`Portola Valley, CA (US)
`
`(73) Assignee: SpringWorks, LLC, Minnetonka, MN
`(US)
`
`( *) Notice:
`
`Subject to any disclaimer, the term of this
`patent is extended or adjusted under 35
`U.S.C. 154(b) by 0 days.
`
`(21) Appl. No.: 10/101,863
`
`(22) Filed:
`
`Mar. 16, 2002
`
`(65)
`
`(51)
`
`(52)
`
`(58)
`
`Prior Publication Data
`
`US 2003/0173207 Al
`
`Sep. 18, 2003
`
`Int. Cl.
`HOJL 21131
`(2006.01)
`HOJL 211469
`(2006.01)
`U.S. Cl. ...................... 4381778; 438/787; 438/788;
`427/533; 204/192.12; 204/192.15
`Field of Classification Search ................ 438/769,
`438/770, 771, 787, 788; 427/533; 204/192.12,
`204/192.15; 257/E21.273, E21.278, E21.462
`See application file for complete search history.
`
`(56)
`
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`
`(Continued)
`
`Primary Examiner-Michelle Estrada
`(74) Attorney, Agent, or Firm-Finnegan, Henderson,
`Farabow, Garrett & Dunner, L.L.P.
`
`(57)
`
`ABSTRACT
`
`A biased pulse DC reactor for sputtering of oxide films is
`presented. The biased pulse DC reactor couples pulsed DC
`at a particular frequency to the target through a filter which
`filters out the effects of a bias power applied to the substrate,
`protecting the pulsed DC power supply. Films deposited
`utilizing the reactor have controllable material properties
`such as the index of refraction. Optical components such as
`waveguide amplifiers and multiplexers can be fabricated
`processes performed on a reactor according to the present
`inention.
`
`35 Claims, 27 Drawing Sheets
`
`1__.
`
`c20
`..._... 1
`
`12-,r--------tl---ll FILTER H PDC POWER I
`
`r:15
`
`c14
`
`53
`
`d
`
`54
`
`i==============~16
`l=::============::::::t-~17
`
`18
`
`
`
`Case 6:20-cv-00636-ADA Document 77-9 Filed 03/10/21 Page 3 of 48
`
`US 7,378,356 B2
`Page 2
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`Case 6:20-cv-00636-ADA Document 77-9 Filed 03/10/21 Page 4 of 48
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