Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 1 of 30
`
`Spikes — plastic, handling
`
`Scratches - handling
`
`Pits — arcing, possible metal
`ontamination of plastic
`
`Barrier Cracking — local adhesion
`ssues (pre contamination)
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002745
`
`
`
`Spikes — plastic, handling
`
`Scratches - handling
`
`Pits — arcing, possible metal
`ontamination of plastic
`
`Barrier Cracking — local adhesion
`ssues (pre contamination)
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002745
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 2 of 30
`
`Most of today's displays (TFT-LCDs) and semiconductor ICs (CMOS on
`Si) use substrates that are inflexible, heavy, brittle and expensive
`Cheap displays and electronics require cheap flexible substrates
`(plastics)
`Requires low-temperature barrier
`semiconductor and gate dielectric film
`
`OLED DISPLAY STRUCTURE
`
`te;$0Kg=
`
`esuomP,1§
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002746
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 3 of 30
`
`Single Layer Barrier • n Plastic WVTR
`Performance Improvement History
`
`PEN + Pretreatme
`Barrier Process ,
`Optimization
`
`Consistent Improvement in Barrier Performance with < 2000A Single
`Layer Barrier
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002747
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 4 of 30
`
`% transmission of barrier film on PEN equivalent to bare PEN
`
`Transmission change minimal post boiling water test (4 hours)
`
`•••••
`
`4(X)
`WAVE( INGTH
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002748
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 5 of 30
`
`Transmission of November Samples vs. Al
`
`gagLai,///10/arMAVI
`
`rier may be useful for encapsulation or barrier lid for bottom emitting device
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002749
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 6 of 30
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002750
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 7 of 30
`
`amer oa e
`
`Calcium Test OD Measurements
`
`......„.vi,
`
`y = -0.0002x ± 0.92
`
`4 -
`
`.. ----- .."
`
`-------
`
`---4-
`
`. Sample1
`. Sample2
`Glass Control
`Linear (Samplel )
`Linear(Sample2)
`— Linear (Glass Control)
`
`y = -0.0004x + 0.9475
`
`•
`
`1
`0.9
`0.8
`0.7
`0.6
`0.5
`0.4
`0.3
`0.2
`0.1
`0
`
`Normalized Ca OD
`
`0
`
`200
`
`400
`
`600
`
`800
`
`1000
`
`1200
`
`# of Hours in 60c/90% R.H
`
`>1000 hours on accelerated testing (500C, 95% RH
`As-received substrate sample based on empirical calculation
`WVTR —1.2 E-3 g/m2/day
`Cleaned substrate reduces pinholes and has a a• .4E- /m2/day
`
`LIDE 6
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002751
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 8 of 30
`
`Glass on
`Glass Control
`
`Improved Barrier
`Process D
`
`Improved Barrier
`Process B
`
`Improvement in C
`
`formance with DOE Parameter Tunin
`
`121113 L3.ch1.
`
`1207 Process C —0-1208 Process D —1-1210 Process E
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002752
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 9 of 30
`
`Test Name
`
`Test Met
`
`Ambient moisture uptake 4 10 mbar
`for 18 hours - Inspect
`Submerge for 1 hr. 4 „Air cky
`Inspect 50x
`
`Submerge for 1 hr
`5
`
`Air d
`
`Submerge for 1 hr 4Air d
`Inspect SU ,
`
`!vent Test: Toluene Submerge for 4 Air d
`Inspect 50x
`
`Solvent Test: THF
`
`Submerge for 1 hr --> Air dry
`Inspect 50x
`
`No visible damage
`160/0 Curl which remained after cooling
`
`No damage to the film
`
`Film unaffected
`
`Film unaffected
`
`Film unaffected
`
`Minor damage; no concern
`
`Material is suitable for conformal or flexible displays and electronics
`
`DEFTS-PA_0002753
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 10 of 30
`
`Pixelated OLEDs from Dupont encapsulated successfully
`lasting 1600 hours in ambience.
`Accelerated testing is next, substrates shipped to Dupont SB
`Equipment Setup for LIV measurements on backlights and
`pixelated OLEDs is complete and working inside glove
`box
`Preliminary Process DOE to find the process window of
`barrier deposition process complete.
`Detailed DOE to close in on the optimized proces
`underway.
`Samples rea y or accelerated lifetime testing o be don
`at Dupont.
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002754
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 11 of 30
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002755
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 12 of 30
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002756
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 13 of 30
`
`showing a metal "breath" treatment
`
`6.2 nm of Niobium Oxide at atomic
`resolution (,.-, 25 atomic lavers thick)
`
`•shows the dense defect free
`amorphous dielectric layer
`
`•deposited on a similar defect free
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002757
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 14 of 30
`
`Develop equipment and process for production of high-quality glas
`ceramic films using physical vapor deposition
`PVD) technology
`
`Develop products based on high-quality amorphous dielectric films for
`Barriers and protective films in OLEDs, touch sensors and flexible
`
`High-capacitance dielectrics for capacitors and energy storage
`Polymer substrates and polymer electronics
`Planar integrated optical devices with gain
`
`Business model
`In large-volume applications, license technology
`In high-value (low volume) applications, develop and market
`rod ucts
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002758
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 15 of 30
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002759
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 16 of 30
`
`2k4S3,1 'Kalman "i i
`• SelNowig51.63P
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002760
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 17 of 30
`
`Almroji • LAMM &INT Mart limiseimm LAMM linsimin
`I 155.38
`Pvet#46:02114111) 1016 a
`1,.• J'44/2
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002761
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 18 of 30
`
`Avinr. • MU ilit.Orr • Mad Ifin=ricm..1110$11
`11,6101
`iUIS
`Midi* .1110111 Q. Rethigi
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002762
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 19 of 30
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002763
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 20 of 30
`
`All1141 tiros* el r irspirstur4
`
`441.4.4t
`•
`*."
`
`rinvirEin
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002764
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 21 of 30
`
`Er+3 active waveguide over passive waveguid
`mode size converter
`SEM of fracture cross section
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002765
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 22 of 30
`
`Differential Scanning Calorimetry of an Aluminosilicate Film
`ote: exothermal stable annealing to —1000 C where spinodal composition (opaque)
`phases are formed.
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002766
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 23 of 30
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002767
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 24 of 30
`
`Data: L048614_C,L048630_C,L048640_C,L048650_C,L048670_C,L0486100_C,L0486200_C
`Model: Up-Conv
`
`= 3.9953E-9
`ChN2/DoF
`FV2 = 0.99961
`
`naii—O>%0D12016>
`NO
`0.14894
`Cup
`4.82E-18
`tau
`0.00345
`x0
`0
`±0
`N_total 2.3E20 ±0
`N0_2 0.33768
`N0_3 0.41998
`N0_4 0.44033
`N0_5 0.56495
`N0_6 0.56633
`N0_7 0.58579
`
`±0.00035
`±0.00044
`±0.00047
`±0.00061
`±0.00062
`±0.00064
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002768
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 25 of 30
`
`aussian (low bire nngence amplified C sans sing e
`mommik mode output
`
`y (counts)
`
`ae.r Gauss wa.dth(um)
`
`136.23.125.25
`
`190. CC 139.00
`
`w nergy(counts)
`
`cur.orl cursoc2 C91-29.,
`intensity 192.09 100.66
`3.4:
`197.26 100.22
`9...
`
`length -56.00
`Wel
`-.56.00
`
`60.00 116.01
`60.00 116.01.
`
`CUtS09.1 cursotO C21-229
`intensity 109.41. 193.44
`-4.0:
`194.23 213.4, -19.2..
`leountel
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002769
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 26 of 30
`
`Deposited intrinsic amorphous silicon film
`
`PPm
`
`5.0
`0.3
`3.3
`0.0
`0.0
`0.0
`0.0
`0.0
`0.0
`0.0
`
`As-dep Si
`<0.1%
`<0.1%
`3.E+18
`2.E+17
`2.E+18
`2.E+16
`2.E+15
`1.E+15
`1.E+16
`
`2.E+13
`
`ND <3E+15
`ND <2E+15
`atoms/cm3
`
`Ar
`0
`
`Na
`
`In
`Al
`Ni
`Cu
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002770
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 27 of 30
`
`n(2) = no + `di (2 —1500.74), 1500nm < A <1649nm
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002771
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 28 of 30
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002772
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 29 of 30
`
`1
`
`Refractive Index as a function of AI% in Aluminosilicates
`
`A-n choices:
`
`AI%
`1Oook-to-0% 9%
`6%
`35%-to-8%
`17%-to-8% 1%
`
`y = -7E-08x' J- 1E-05x + 0 0006x + 1 4625
`F1' = 06969
`
`.—.W111111
`
`• R.I (As Dep)
`
`• R.I Post Anneal
`
`— (R.I (As Del')
`
`13%-th-8% °.5:—/c)
`
`Fine Tuning
`
`• E.
`
`.2 1.55
`a
`
`5
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002773
`
`
`
`Case 6:20-cv-00636-ADA Document 77-6 Filed 03/10/21 Page 30 of 30
`
`Dielectrics ( ass
`Ai203{B}{D}
`Si021 Si3N12{B}
`Aluminosilicate B}
`10„Nm
`
`i a2g5
`ZrO2
`Various titanates {
`
`onductors
`— {E}
`/ TiN / TiS2 {
`Ta / TaN {E}
`Mo / MoSi2
`Cr
`
`ITO
`
`nderlined = Have fabricated
`{B} = Barrier layer candidate
`{D} = Dielectric layer candidate
`{E} = Electrode layer candidate
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002774
`
`
Accessing this document will incur an additional charge of $.
After purchase, you can access this document again without charge.
Accept $ Charge
Still Working On It
This document is taking longer than usual to download. This can happen if we need to contact the court directly to obtain the document and their servers are running slowly.
Give it another minute or two to complete, and then try the refresh button.
A few More Minutes ... Still Working
It can take up to 5 minutes for us to download a document if the court servers are running slowly.
Thank you for your continued patience.
This document could not be displayed.
We could not find this document within its docket. Please go back to the docket page and check the link. If that does not work, go back to the docket and refresh it to pull the newest information.
Your account does not support viewing this document.
You need a Paid Account to view this document. Click here to change your account type.
Your account does not support viewing this document.
Set your membership
status to view this document.
With a Docket Alarm membership, you'll
get a whole lot more, including:
- Up-to-date information for this case.
- Email alerts whenever there is an update.
- Full text search for other cases.
- Get email alerts whenever a new case matches your search.
One Moment Please
The filing “” is large (MB) and is being downloaded.
Please refresh this page in a few minutes to see if the filing has been downloaded. The filing will also be emailed to you when the download completes.
Your document is on its way!
If you do not receive the document in five minutes, contact support at support@docketalarm.com.
Sealed Document
We are unable to display this document, it may be under a court ordered seal.
If you have proper credentials to access the file, you may proceed directly to the court's system using your government issued username and password.
Access Government Site
