Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 1 of 28
`Case 6:20-cv-00636—ADA Document 77-4 Filed 03/10/21 Page 1 of 28
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`EXHIBIT 14
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`EXHIBIT 14
`
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`Case 6:20-cv-00636—ADA Document 77-4 Filed 03/10/21 Page 1 of 28
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`EXHIBIT 14
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`EXHIBIT 14
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`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 2 of 28
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`Ernest Demaray, Ph.D.
`President
`Antropy Inc.
`DemarayLLC
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002691
`
`
`
`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 3 of 28
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`High thermal conductivity
`Poly-AIN dielectric coating
`on pyro-graphite heat sin
`Mor an AMG
`
`AdiabatTi av
`with transformer phosp
`Low NA Demara LLC)
`
`> Small cone angle free space
`ission„
`EQE
`
`<Presentation Name>
`
`1/15/2021
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`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002692
`
`
`
`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 4 of 28
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`<Presentation Name>
`
`1/15/2021
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`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002693
`
`
`
`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 5 of 28
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`<Presentation Name>
`
`1/15/2021
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`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002694
`
`
`
`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 6 of 28
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`'.04#444000A,4,
`
`<Presentation Name>
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`1/15/2021
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`C OMPANY CONFIDENTIAL
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`DEFTS-PA_0002695
`
`
`
`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 7 of 28
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`<Presentation Name>
`
`1/15/2021
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`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002696
`
`
`
`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 8 of 28
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`Wid6-area
`AmpuryingPh
`Integrated Componen
`
`• Erbium-doped planar
`Rwave-guideampIifiers
`tfigh index planar pass—IV-6
`: devices:
`• planar optical mode size
`converter
`•Efficient fiber coupling
`!Integrated electro-optic
`
`-:"‘"AdVanded: beriier: lavers
`OLEDS, other electro-optics
`
`• Metals
`• Amorphous silicon TFTs
`• 600x720 mm substrates
`• 20 production systems
`
`on display 1as-
`• ELA for
`Pplysi I i co n TFTs
`UAL/ NMtiSSID:
`pgiper;-
`
`AKT/Applied Materials
`
`I
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002697
`
`
`
`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 9 of 28
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`<Presentation Name>
`
`1/15/2021
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`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002698
`
`
`
`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 10 of 28
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`DemarayLLC Core Technology - Dense and Amorphous dielectric
`films via patented RF biased (ion assisted) pulsed DC reactive
`sputtering (BPDC)
`
`c.5*
`
`DemarayLL ' Dense Amor hous Oxid
`
`DemarayLLC films are dense, transparent and defect free
`• •
`Comparison of
`b different PV
`•
`Techniques
`Dense, Amorphous films achieve theoretical barrier properties,
`electrical strength, optical transparency and surface smoothness
`
`DEFTS-PA_0002699
`
`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 11 of 28
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`001008ittc::,c0000IrOetOnCe,':'
`'defeettre:e.ainotphous:,,dielOctrk:filins,
`
`e ect free con orma
`Ceramic electrolyte foridak,
`Li+ ion batteries
`Capacitor ieleCtric
`Gate Dielectric am,
`For Memory
`'-
`For Transistors
`Low-Temperature
`k plane Embedded Gate for Plastic
`Passive
`
`O ptical Mode
`Management
`
`High-Index
`ssive and couplersr
`‘1)h Cal
`
`a-Solar Cell
`Band gap layers
`OLED
`kncapsulation and
`Barrier
`• C,1"
`
`'404?
`
`Dense
`Uniform
`Conforrna
`Defect Free
`M uR1 Layet
`Large Area
`Low Temperature
`Low Contamination
`Wide Compositional Range
`
`eposition
`High-Quality amorphous dielectric films
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`Sensor
`
`DEFTS-PA_0002700
`
`
`
`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 12 of 28
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`Multi-chamber depositio
`system
`
`Stacked multi-film structur
`
`Material versatility
`
`Different targets per PM
`
`Large selection of target materials
`
`DEFTS-PA_0002701
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`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 13 of 28
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`Temperature rang
`Low end: room temperature ••••5°C
`High end: 450°C
`In process, non-contact
`thermocouple for process
`assurance
`
`Substrate size range
`— Smallest: no limit
`Largest: 600 x 720 mm
`
`<Presentation Name>
`
`1/15/2021
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`C OMPANY CONFIDENTIAL
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`DEFTS-PA_0002702
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`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 14 of 28
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`Conformal coating top and sides, no `bird's beak at lower ste
`
`no 'bread loaf' at upper corner
`
`Gap (trench) fill at low temperature
`
`Self-planarizing for films ,-. 3X thicker than step height
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002703
`
`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 15 of 28
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`Biased Pulsed D t. is a Planarization Process
`progression of film states
`
`W width of waveguide
`
`H — height of waveguid
`
`aflat = accumulation rate on the
`flat surface
`
`am,,= accumulation rate on the
`minimum
`surface
`
`= surface angle of the
`minimum accumulation
`slope
`
`— coating thickness on top
`f the waveguide
`
`Og.
`
`';',40MST MVO'
`
`ttfintANRitg,100nigar.
`4,6amtouvaomankam;
`
`<Presentation Name>
`
`1/15/2021
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`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002704
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`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 16 of 28
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`NelditIAMegiARAROINICV,
`
`onformal coverage or fill of electronic device topology
`racture cross facet demonstrates high strength cleavag
`ow temperature process, no high-temperature re-flow
`Can C.T.E. match with heat treat for low stress and low
`irefringence ammume
`lectrical gate/optical- quality dielectric morphology
`
`<Presentation Name>
`
`1/15/2021
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`C OMPANY CONFIDENTIAL
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`DEFTS-PA_0002705
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`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 17 of 28
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`Metrology Capability see A endix A
`
`<Presentation Name>
`
`1/15/2021
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`C OMPANY CONFIDENTIAL
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`DEFTS-PA_0002706
`
`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 18 of 28
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`:Gate Dielectri
`For Transistor
`
`Low-Temperature
`Backplane Embedded Gate for Plastic
`Passive
`
`igh-Index
`1.1 cal Conformal
` Passive Op I. •
`
`Dense
`Uniform
`
`Defect Free
`Ivieffi Layer
`Large Area
`Low Temperature
`Low Contamination
`Wide Compositional Range
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002707
`
`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 19 of 28
`
`APDX
`Reference
`1.445540
`
`0.000093
`0.006%
`n/a
`
`200-1 *
`"92-8"
`Claddin
`1.459371
`
`0.000072
`0,005%
`n/a
`
`200-2
`"92-8"
`Claddin
`1.459667
`
`0.000266
`0.018%
`n/a
`
`-1.18792E-5
`
`-1.22148E-5
`
`-1.22819E-5
`
`201-1
`"83-17"
`Core
`1.474036
`
`201-2
`"83-17"
`Core
`1.473790
`
`202-1
`"35-65"
`Core
`1.560464
`
`202-2
`"35-65"
`Core
`1.562811
`
`0.000226
`0.015%
`0.014665
`0.995%
`-1.34899E-5
`
`0.000150
`0.01%
`0.014419
`0.978%
`-1.34228E-5
`
`0.000525
`0.03%
`0.101093
`6.478%
`-1.56376E-5
`
`0.000910
`0.06%
`0.103440
`6.619%
`-1.56376E-5
`
`-0.000814
`
`-0.001012
`
`-0.001027
`
`-0.000894
`
`-0.000884
`
`-0.000508
`
`-0.000415
`
`0.000028
`
`0.000026
`
`0.000021
`
`0.000032
`
`0.000033
`
`0.000072
`
`0.000124
`
`9187.65
`
`16188.55
`
`15693.57
`
`6251.37
`
`6387.49
`
`3042.96
`
`2929.48
`
`ndex (TE)
`Avera e
`Index (TE)
`Uniformi
`Index Delta
`Relative to *
`dn/c1X.
`
`Birefringence
`Avera e
`Birefringence
`Uniformi
`Thickness
`Avera e
`Thickness
`Uniform!
`
`90.58
`1.0%
`2.450
`
`257.37
`1.6%
`
`339.75
`2.2%
`
`Uniformity is 1 standard deviation
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
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`69.03
`1.1%
`
`20.71
`0.7%
`1.057
`
`49.12
`1.7%
`1.029
`
`84.08
`1.3%
`
`MP
`
`PI PIRI
`
`DEFTS-PA_0002708
`
`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 20 of 28
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`fficient mode size coupling of pump
`More size conversion & vertical couplin
`
`<Presentation Name>
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`1/15/2021
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`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002709
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`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 21 of 28
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`emonstrated mode size conversion:
`Efficient mode matching and coupling from fiber
`to the passive waveguide
`MSC provides loss less mode size compression
`to small mode waveguide for higher pump intensity
`higher inversion and higher signal gain.
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_000271 0
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`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 22 of 28
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`Upper Clad
`
`High-Index Co
`Passive Core
`Lower Clad
`Silicon Wafer
`
`o High-Index core
`- 3 p,m mode field diameter
`- High optical confinement
`
`o Passive core to fiber (signal)
`- 8.5 p.m mode field diameter
`(matches fiber)
`<0.3 dB/facet coupling loss
`(minimizes OSNR degradation
`
`o Passive core to pump die
`- Match pump's mode field
`- Match pump's NA
`- Improve pump
`coupling efficiency
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0002711
`
`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 23 of 28
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`54700 5.0kV 10.9mm x4.50k SE(U) 1/11/02 14:35
`
`Demonstrated narrow gap mux region deep fill
`
`<Presentation Name>
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`1/15/2021
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`C OMPANY CONFIDENTIAL
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`DEFTS-PA_000271 2
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`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 24 of 28
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`Coupling efficiency
`Signal: 92%
`Pump: 96%
`
`<Presentation Name>
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`1/15/2021
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`C OMPANY CONFIDENTIAL
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`DEFTS-PA_000271 3
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`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 25 of 28
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`1535
`
`1540
`1545
`1550
`Signal Wavelength (nm)
`
`1555
`
`1.5",2% integrated tap demonstrated
`Flat transmission profile across C band
`• Low PDL (0.1dB)
`• Performance independent of signal pow
`
`<Presentation Name>
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`1/15/2021
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`C OMPANY CONFIDENTIAL
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`DEFTS-PA_000271 4
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`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 26 of 28
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`<Presentation Name>
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`1/15/2021
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`C OMPANY CONFIDENTIAL
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`DEFTS-PA_000271 5
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`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 27 of 28
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`Gain
`Pump / pa
`Noise Figure
`Ful l C-Bandwid
`Output power
`4 channel 20 cm long single mode arra
`
`2) Embed amplet arrays with mux/demux, switches, etc.
`
`<Presentation Name>
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`1/15/2021
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`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_000271 6
`
`
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`Case 6:20-cv-00636-ADA Document 77-4 Filed 03/10/21 Page 28 of 28
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`emaray LLC Aluminosilicate
`85% humidity/85 deg. C Telcordia test of Er+3 doped planar
`waveguide amplifier
`
`10 cm long, 1% contrast single mode
`wave guide passive
`Active aligned and Pigtailed with Hi
`1060 Fiber using thermal cured
`epoxy
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_000271 7
`
`
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