MOTOROLA
`SEMICONDUCTOR TECHNICAL DATA
`
`Order this document
`byMMA6260Q
`
`+1.5g Dual Axis
`Micromachined Accelerometer
`
`The MMA6200 series of low cost capacitive micromachined accelerometers
`feature signal conditioning, a 1-pole low pass filter and temperature compen(cid:173)
`sation. Zero-g offset full scale span and filter cut-off are factory set and require
`no external devices. A full system self-test capability verifies system function(cid:173)
`ality.
`
`MMA6260Q
`MMA6261Q
`MMA6262Q
`MMA6263Q
`
`MMA6260Q Series: X-Y AXIS SENSITIVITY
`MICROMACHINED ACCELEROMETER
`±1.5 g
`
`Bottom View
`
`16 LEAD QFN
`CASE 1477-01
`
`Pin Assignment
`
`Features
`• High Sensitivity
`• Low Noise
`• Low Power
`• 2.7 V to 3.6 V Operation
`• 6mm x 6mm x 1.98 mm QFN
`Integral Signal Conditioning with Low Pass Filter
`•
`• Linear Output
`• Ratiometric Performance
`• Self-Test
`• Robust Design, High Shocks Survivability
`
`Typical Applications
`• Tilt Monitoring
`• Position & Motion Sensing
`• Freefall Detection
`•
`Impact Monitoring
`• Appliance Control
`• Vibration Monitoring and Recording
`• Smart Portable Electronics
`
`ORDERING INFORMATION
`
`Device Name
`
`MMA6260Q
`
`MMA6260QR2
`
`MMA6261Q
`MMA6261QR2
`
`MMA6262Q
`
`MMA6262QR2
`
`MMA6263Q
`
`MMA6263QR2
`
`Bandw idth
`Response
`
`loo
`
`Case No.
`
`Package
`
`50 Hz
`
`50 Hz
`
`300 Hz
`
`300 Hz
`
`150 Hz
`
`150 Hz
`
`900 Hz
`
`900 Hz
`
`1.2mA
`
`1.2mA
`
`1.2mA
`
`1.2mA
`
`2.2mA
`
`2.2mA
`
`2.2mA
`
`2.2mA
`
`1477-01
`
`QFN-16, Tube
`
`1477-01
`
`QFN-16,Tape & Reel
`
`QFN-16, Tube
`1477-01
`1477-01 QFN-16,Tape & Reel
`1477-01
`QFN-16,Tube
`1477-01 QFN-16,Tape & Reel
`1477-01
`QFN-16, Tube
`1477-01 QFN-16,Tape & Reel
`
`Top View
`
`..
`
`..
`
`::::,
`::::,
`U
`O
`O
`U
`,!! ) (> ,!!
`
`REV1
`
`© Motorola, Inc. 2004
`
`G MOTOROLA
`
`lnte/1/gence everyw here·
`
`digital dna·
`
`*
`
`Petitioner Samsung Ex-1045, 0001
`
`

`

`G-CELL
`SENSOR
`
`X-INTEGRATOR
`
`X-GAIN
`
`X-FILTER
`
`X-TEMP
`COMP
`
`ST
`
`SELF-TEST
`
`CONTROL LOGIC &
`EEPROM TRIM CIRCUITS
`
`OSCILLATOR
`
`CLOCK GEN
`
`Y-INTEGRATOR
`
`Y-GAIN
`
`Y-FILTER
`
`Y-TEMP
`COMP
`
`Figure 1. Simplified Accelerometer Functional Block Diagram
`
`VDD
`XOUT
`
`YOUT
`
`VSS
`
`MAXIMUM RATINGS (Maximum ratings are the limits to which the device can be exposed without causing permanent damage.)
`Rating
`Symbol
`Value
`Unit
`±2000
`Maximum Acceleration (all axis)
`gmax
`g
`-0.3 to +3.6
`
`VDD
`Ddrop
`Tstg
`
`V
`
`1.2
`
`-40 to +125
`
`m
`°C
`
`Supply Voltage
`
`Drop Test1
`Storage Temperature Range
`
`Note:
`1. Dropped onto concrete surface from any axis.
`
`ELECTRO STATIC DISCHARGE (ESD)
`WARNING: This device is sensitive to electrostatic
`discharge.
`
`Although the Motorola accelerometers contain internal
`2000 V ESD protection circuitry, extra precaution must be
`taken by the user to protect the chip from ESD. A charge
`of over 2000 volts can accumulate on the human body or
`associated test equipment. A charge of this magnitude
`
`can alter the performance or cause failure of the chip.
`When handling the accelerometer, proper ESD precau-
`tions should be followed to avoid exposing the device to
`discharges which may be detrimental to its performance.
`
`MMA6200 Series
`2
`
`Motorola Sensor Device Data
`
`Petitioner Samsung Ex-1045, 0002
`
`

`

`Operating Characteristics
`Unless otherwise noted: -20°C < TA < 85°C, 3.0 V < VDD < 3.6 V, Acceleration = 0g, Loaded output1
`Characteristic
`Symbol
`Min
`
`Typ
`
`Max
`
`Unit
`
`VDD
`
`IDD
`IDD
`TA
`gFS
`
`VOFF
`VOFF, TA
`S
`S, TA
`
`f_3dB
`f_3dB
`f_3dB
`f_3dB
`NLOUT
`
`nRMS
`nRMS
`nRMS
`nRMS
`
`nPSD
`nPSD
`
`VST
`VIL
`VIH
`RPO
`tST
`
`VFSO
`CL
`ZO
`
`2.7
`
`—
`—
`-20
`—
`
`1.485
`—
`740
`—
`
`—
`—
`—
`—
`-1.0
`
`—
`—
`—
`—
`
`—
`—
`
`0.9 VDD
`—
`0.7 VDD
`43
`—
`
`VSS +0.25
`—
`—
`
`tRESPONSE
`tRESPONSE
`tRESPONSE
`tRESPONSE
`
`—
`—
`—
`—
`
`VZX, YX, ZY
`
`-5.0
`
`Operating Range2
` Supply Voltage3
`Supply Current
` MMA6260Q, MMA6261Q
` MMA6262Q, MMA6263Q
` Operating Temperature Range
` Acceleration Range
`Output Signal
` Zero g (TA = 25°C, VDD = 3.3 V)4
` Zero g
` Sensitivity (TA = 25°C, VDD = 3.3 V)
` Sensitivity
` Bandwidth Response
` MMA6260Q
` MMA6261Q
` MMA6262Q
` MMA6263Q
` Nonlinearity
`Noise
` MMA6260Q RMS (0.1 Hz – 1 kHz)
` MMA6261Q RMS (0.1 Hz – 1 kHz)
` MMA6262Q RMS (0.1 Hz – 1 kHz)
` MMA6263Q RMS (0.1 Hz – 1 kHz)
`Power Spectral Density RMS (0.1 Hz – 1 kHz)
` MMA6260Q, MMA6261Q
` MMA6262Q, MMA6263Q
`Self-Test
` Output Response
` Input Low
` Input High
` Pull-Down Resistance5
` Response Time6
`Output Stage Performance
` Full-Scale Output Range (IOUT = 200 µA)
` Capacitive Load Drive7
` Output Impedance
`Power-Up Response Time
` MMA6260Q
` MMA6261Q
` MMA6262Q
` MMA6263Q
`Mechanical Characteristics
` Transverse Sensitivity8
`Notes:
`1. For a loaded output, the measurements are observed after an RC filter consisting of a 1.0 kΩ resistor and a 0.1 µF capacitor to ground.
`2. These limits define the range of operation for which the part will meet specification.
`3. Within the supply range of 2.7 and 3.6 V, the device operates as a fully calibrated linear accelerometer. Beyond these supply limits the device
` may operate as a linear device but is not guaranteed to be in calibration.
`4. The device can measure both + and - acceleration. With no input acceleration the output is at midsupply. For positive acceleration the output
` will increase above VDD/2. For negative acceleration, the output will decrease below VDD/2.
`5. The digital input pin has an internal pull-down resistance to prevent inadvertent self-test initiation due to external board level leakages.
`6. Time for the output to reach 90% of its final value after a self-test is initiate.
`7. Preserves phase margin (60°) to guarantee output amplifier stability.
`8. A measure of the device’s ability to reject an acceleration applied 90° from the true axis of sensitivity.
`
`3.3
`
`1.2
`2.2
`—
`1.5
`
`1.65
`2.0
`800
`0.015
`
`50
`300
`150
`900
`—
`
`1.8
`3.5
`1.3
`2.5
`
`300
`200
`
`—
`—
`—
`57
`2.0
`
`—
`—
`50
`
`14
`2.0
`4.0
`0.7
`
`—
`
`3.6
`
`1.5
`3.0
`+85
`—
`
`1.815
`—
`860
`—
`
`—
`—
`—
`—
`+1.0
`
`—
`—
`—
`—
`
`—
`—
`
`VDD
`0.3 VDD
`VDD
`71
`—
`
`VDD -0.25
`100
`300
`
`—
`—
`—
`—
`
`V
`
`mA
`mA
`°C
`g
`
`V
`mg/°C
`mV/g
`%/°C
`
`Hz
`Hz
`Hz
`Hz
`% FSO
`
`mVrms
`
`ug/√Hz
`
`V
`V
`V
`kΩ
`ms
`
`V
`pF
`Ω
`
`ms
`ms
`ms
`ms
`
`+5.0
`
`% FSO
`
`Motorola Sensor Device Data
`
`MMA6200 Series
`3
`
`Petitioner Samsung Ex-1045, 0003
`
`

`

`PRINCIPLE OF OPERATION
`
`SPECIAL FEATURES
`
`The Motorola accelerometer is a surface-micromachined in(cid:173)
`tegrated-circuit accelerometer.
`The device consists of a surface micromachined capacitive
`sensing cell (g-cell) and a signal conditioning ASIC contained in
`a single integrated circuit package. The sensing element is
`sealed hermetically at the wafer level using a bulk microma(cid:173)
`chined cap wafer.
`The g-cell is a mechanical structure formed from semicon(cid:173)
`ductor materials (polysilicon) using semiconductor processes
`(masking and etching). It can be modeled as a set of beams at(cid:173)
`tached to a movable central mass that move between fixed
`beams. The movable beams can be deflected from their rest
`position by subjecting the system to an acceleration (Figure 2).
`As the beams attached to the central mass move, the dis(cid:173)
`tance from them to the fixed beams on one side will increase by
`the same amount that the distance to the fixed beams on the
`other side decreases. The change in distance is a measure of
`acceleration.
`The g-cell plates form two back-to-back capacitors
`(Figure 2). As the center plate moves with acceleration, the dis(cid:173)
`tance between the plates changes and each capacitor's value
`will change, (C = A£/D). Where A is the area of the plate,
`£ is the dielectric constant, and D is the distance between
`the plates.
`The ASIC uses switched capacitor techniques to measure
`the g-cell capacitors and extract the acceleration data from the
`difference between the two capacitors. The ASIC also signal
`conditions and filters (switched capacitor) the signal, providing
`a high level output voltage that is ratiometric and proportional to
`acceleration.
`
`Acceleration ~
`
`⇒
`
`Figure 2. Simplified Transducer Physical Model
`
`Filtering
`
`These Motorola accelerometers contain an onboard single(cid:173)
`pole switched capacitor filter. Because the filter is realized using
`switched capacitor techniques, there is no requirement for ex(cid:173)
`ternal passive components (resistors and capacitors) to set the
`cut-off frequency.
`
`Self-Test
`
`The sensor provides a self-test feature allowing the verifica(cid:173)
`tion of the mechanical and electrical integrity of the accelerom(cid:173)
`eter at any time before or after installation. A fourth plate is used
`in the g-cell as a self-test plate. When a logic high input to the
`self-test pin is applied, a calibrated potential is applied across
`the self-test plate and the moveable plate. The resulting electro(cid:173)
`static force (Fe = 1/2 AV2td2} causes the center plate to deflect.
`The resultant deflection is measured by the accelerometer's
`ASIC and a proportional output voltage results. This procedure
`assures both the mechanical (g-cell) and electronic sections of
`the accelerometer are functioning.
`Motorola accelerometers include fault detection circuitry and
`a fault latch. Parity of the EEPROM bits becomes odd in num(cid:173)
`ber.
`Self-test is disabled when EEPROM parity error occurs.
`
`Ratiometricity
`
`Ratiometricity simply means the output offset voltage and
`sensitivity will scale linearly with applied supply voltage. That is,
`as supply voltage is increased, the sensitivity and offset in(cid:173)
`crease linearly; as supply voltage decreases, offset and sensi(cid:173)
`tivity decrease linearly. This is a key feature when interfacing to
`a microcontroller or an AID converter because it provides sys(cid:173)
`tem level cancellation of supply induced errors in the analog to
`digital conversion process.
`
`MMA6200 Series
`4
`
`Motorola Sensor Device Data
`
`Petitioner Samsung Ex-1045, 0004
`
`

`

`BASIC CONNECTIONS
`
`Top View
`
`ST
`Xou
`
`c::
`w
`I-
`w
`::!:
`0
`c::
`w You
`..J
`w
`u
`u
`~
`
`c::
`w
`..J
`..J
`0
`c::
`I-
`z
`0
`u
`0
`c:: Voo
`u
`:E
`
`PO
`
`VRH
`0.1 µF
`
`Q Q Q Q
`z
`z
`z
`z
`Figure 3. Pinout Description
`
`POWER SUPPLY
`
`Figure 5. Recommend PCB Layout for Interfacing
`Accelero meter to Mic rocontroller
`
`Notes:
`1. Use 0.1 µF capacitor on v00 to decouple the power
`source.
`2 . Physical coupling distance of the accelerometer to the
`microcontroller should be minimal.
`3. Flag underneath package is connected to ground.
`4 . Place a ground plane beneath the accelerometer to
`reduce noise, the ground plane should be attached to all
`of the open ended terminals shown in Figure 5.
`5. Use an RC filter with 1.0 kQ and 0.1 µF on the outputs of
`the accelerometer to minimize clock noise (from the
`switched capacitor filter circuit).
`6 . PCB layout of power and ground should not couple power
`supply noise.
`7 . Accelerometer and microcontroller should not be a high
`current path.
`8 . A/O sampling rate and any external power supply
`switching frequency should be selected such that they do
`not interfere with the internal accelerometer sampling
`frequency (16 kHz for Low 100 and 52 kHz for standard
`100 for the sampling frequency). This will prevent aliasing
`errors.
`
`Pin No.
`
`1,5-7, 13, 16
`
`14
`
`15
`
`3
`
`4
`
`2, 8 - 11
`
`Pin
`Name
`N/C
`
`Voo
`Vss
`N/C
`
`No internal connection.
`Leave unconnected.
`Your Output voltage of the accelerometer. Y
`Direction.
`Xour Output voltage of the accelerometer. X
`Direction.
`Power supply input.
`The power supply ground.
`
`Description
`
`Used for factory trim.
`Leave unconnected.
`Logic input pin used to initiate
`self-test.
`
`12
`
`ST
`
`Voo
`
`MMA6260Q
`Series
`
`3 Voo
`
`14 1 kn
`
`Yo
`
`4 Vss
`
`0.1 µF
`
`-
`
`Logic
`Input
`
`0.1 µF I
`
`Xo
`
`0.1 µF r
`
`Figure 4. Accelerometer with Recommended Connection
`Diagram
`
`Motorola Sensor Device Data
`
`MMA6200 Series
`5
`
`Petitioner Samsung Ex-1045, 0005
`
`

`

`DYNAMIC ACCELERATION
`
`Top View D +Y
`
`c)-x
`
`D -Y
`
`16-Pin QFN Package
`
`STATIC ACCELERATION
`
`Top View
`
`! Direction of Earth's gravity field."
`1 er
`
`L!L!L!L! ~
`I
`.,
`
`,.
`I
`
`-;
`I
`-;
`..!
`
`i
`.,
`i
`..
`ijijijij
`
`Xour@ -1g = 0.85V
`Yo1JT@ Og = 1.65V
`
`0 I 11 11 11 I
`I
`
`I
`
`"'.,_.,_.,_.,_ -
`1 er
`-
`..
`-:;
`I
`- -.. -.. -.. -....
`i
`
`~
`I
`i
`
`I 11 11 11
`
`I
`
`Xoor @ +1g = 2.45V
`YOUT @ Og = 1.65V
`
`XOUT @ Og = 1.65V
`Y o1JT@ -1g = 0.85V
`
`I
`!:..
`
`I 11 11 11 I
`
`"'.,_.,_.,_.,_ -
`I
`;
`l
`~ &
`..! w
`t
`-
`I
`..
`i
`ijijijij O
`XOUT @ Og = 1.65V
`Y o1JT@ +1g = 2.45V
`
`• When ositioned as shown the Earth's ravi will result in a
`
`MMA6200 Series
`6
`
`Motorola Sensor Device Data
`
`Petitioner Samsung Ex-1045, 0006
`
`

`

`I
`
`--~71
`
`G
`
`Dll
`D
`D
`- --D-
`D
`0
`
`M~
`
`PIN 1
`INDEX AREA
`
`I
`I
`(fil __ _J __
`
`tJ
`
`EXPOSED DIE
`ATTACH PAD
`
`4.24
`4.04
`
`16X 0.60 1-
`
`0.40~
`$ 0.1 @CAB
`0.05@ C
`
`VIEW M-M
`
`CASE 1477-01
`ISSUE 0
`
`I -?'I 0-1 1c I
`t
`___ r_ol o.os lc I ffi
`1.9s+o.1
`(O~ __j ~ (05,TT
`
`(0.102)
`
`(1)
`
`• ~ SEATING PLANE
`
`DETAILG
`VIEW ROTATED 90• CLOCKWISE
`
`DETAIL M
`
`NOTES:
`1. AU. DIMENSIONS ARE IN MILLIMETERS.
`2. INTERPRET DIMENSIONS AND TOLERANCES
`PER ASME Y14.5M, 1994.
`&_ THIS DIMENSION APPLIES TO MET AI.UZED
`TERMINAL AND IS MEASURED BETWEEN 0.25MM
`AND 0.30MM FROM TERMINAL TIP.
`& THIS DIMENSION REPRESENTS TERMINAL FUU.
`BACK FROM PACKAGE EDGE UP TO0.lMM IS
`ACCEPT ABLE.
`£ COPLANARITY APPLIES TO THE EXPOSED HEAT
`SLUG AS WELL AS THE TERMINAi..
`6. RADIUS ON TERMINAL IS OPTIONAL
`
`MINIMUM RECOMMENDED FOOTPRINT FOR SURFACE MOUNTED APPLICATIONS
`
`Surface mount board layout is a critical portion of the
`total design. The footprint for the surface mount packag(cid:173)
`es must be the correct size to ensure proper solder con(cid:173)
`nection interface between the board and the package.
`With the correct footprint, the packages will self-align
`when subjected to a solder reflow process. It is always
`recommended to design boards with a solder mask layer
`to avoid bridging and shorting between solder pads.
`
`Motorola Sensor Device Data
`
`Pin I ID {noo melallic)
`
`\
`
`0 -oo~ i
`1.00
`
`□-r
`□ .,..
`
`MMA6200 Series
`7
`
`Petitioner Samsung Ex-1045, 0007
`
`

`

`Information in this document is provided solely to enable system and software implementers to use Motorola products. There are no express or implied
`copyright licenses granted hereunder to design or fabricate any integrated circuits or integrated circuits based on the information in this document.
`Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee
`regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product
`or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be
`provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating
`parameters, including “Typicals” must be validated for each customer application by customer’s technical experts. Motorola does not convey any license
`under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for
`surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product
`could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or
`unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all
`claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated
`with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part.
`MOTOROLA and the Stylized M Logo are registered in the US Patent and Trademark Office. All other product or service names are the property of their
`respective owners.
`© Motorola, Inc. 2004
`
`HOW TO REACH US:
`
`USA/EUROPE/LOCATIONS NOT LISTED:
`Motorola Literature Distribution
`P.O. Box 5405, Denver, Colorado 80217
`1-800-521-6274 or 480-768-2130
`
`• MOTOROLA
`
`JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center
`3-20-1 Minami-Azabu. Minato-ku, Tokyo 106-8573, Japan
`81-3-3440-3569
`
`ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre
`2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong
`852-26668334
`
`HOME PAGE: http://motorola.com/semiconductors
`
` MMA6260Q
`
`Petitioner Samsung Ex-1045, 0008
`
`