`
`High Bandwidth Low Insertion
`
`Loss Solenoid Transformers
`
`Using FeCoB Multilayer
`
`Xing Xing, Baoxing Chen
`11/18/2012
`Analog Devices Inc., Wilmington, USA
`
`ADI Confidential Information – Not for external distribution
`—Analog Devices Confidential Information—
`
`Ex.1030 / IPR2022-00117 / Page 1 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Outline
`
` Introduction
` Magnetic core transformer integration
` Developing the Next Generation of isoPower
` Design
` Converter Design
` Transformer Design
` Fabrication
` Inductor Modeling, Testing & Results
` Magnetics and Permeability
` Multilayer study
` Testing
` Discussion
` Saturation Current
` Transformer Performance
` One side
` Coupling
` Conclusion
`2
`
`—Analog Devices Confidential Information—
`
`Ex.1030 / IPR2022-00117 / Page 2 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Introduction
`
`Portable Electronic
`Devices
`
`Power Supply
`Integration
`
`Inductor/Transformer
`Integration
`
`Low L/Q &
`High Frequency
`
`Easy Fabrication &
`Down Scaled Size
`
`Integrated Air-core
`Transformer
`
`High Switching
`Loss & EMI
`
`Magnetic Core
`Transformer
`
`Multilayer Magnetics
`
`Anisotropy Induced
`Hard Axis Along
`Switching Direction
`
`Additional Core Loss
`
`Eddy Current &
`Hysteresis Loss
`
`3
`
`—Analog Devices Confidential Information—
`
`Ex.1030 / IPR2022-00117 / Page 3 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Pot-core
`
`Solenoid
`
`Magnetic Core
`Transformer
`
`Multilayer Magnetics
`
`Anisotropy Induced
`Hard Axis Along
`Switching Direction
`
`REF1
`
` Magnetic layers enclosing spirals
`
` Complex core structure
` Limited magnetic permeability
` Difficulty in domain alignment controlling
` Significant core loss
`
`REF2
`
` Windings enclosing magnetic core
` Via complexity
`
` Simple core structure
` Higher permeability
` Easy domain alignment
` Limited hysteresis loss
`
`4
`
`—Analog Devices Confidential Information—
`
`Ex.1030 / IPR2022-00117 / Page 4 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Developing the Next Generation of isoPower
`Magnetic Core iCoupler® Transformers
`
`Discrete solutions with
`optocouplers and external
`transformers are Large,
`Custom designs with Poor
`Reliability.
`
`Proprietary isoPower
`integrates data &
`power in one
`package.
`
`Today’s air core
`transformers will be
`replaced with magnetic
`core transformers.
`
`Magnetic Core isoPower
` Better Efficiency & Power
` Low Noise Emissions
`(EMI)
`
`5
`
`—Analog Devices Confidential Information—
`
`Isolated
`+5V
`
`Regulator
`
`Data
`
`Isolated Data
`
`Data
`
`Isolated Data
`
`Data
`
`Isolated Data
`
`Data
`
`Isolated Data
`
`Isolated Transformer Driver
`
`+5V
`
`GND
`
`Ex.1030 / IPR2022-00117 / Page 5 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Converter Design Goal
`
`Design Goal
`
`Architecture
`
`Fly-back DC/DC Converter
`
`Input Voltage
`
`Output Voltage
`
`Frequency
`
`Power
`
`Inductance
`
`3 Volt
`
`3 Volt
`
`20 MHz
`
`1 Watt
`
`120 nH
`
`Peak Current
`
`0.75 Amp
`
`Fly-back Converter
`
`6
`
`—Analog Devices Confidential Information—
`
`V
`IN
`
`
`
`L
`
`p
`
`I
`
`1
`
`I
`
`2
`DT
`
`I Load
`
`
`
`D
`
`
`
`I
`
`1
`
`
`
`I
`
`2
`
`
`
`2
`
`Ex.1030 / IPR2022-00117 / Page 6 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Transformer Designs
`
`I
`
`III
`
`II
`
`Blue:
`Secondary,
`10 turns
`
`Red:
`Primary,
`10 turns
`
`IV
`
`Yellow:
`Magnetic
`core
`
`7
`
`Strong Coupling
`—Analog Devices Confidential Information—
`
`Good Isolation
`
`Ex.1030 / IPR2022-00117 / Page 7 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Fabrication
`
`8
`
`Bottom winding
`
`Magnetic core
`—Analog Devices Confidential Information—
`
`Top winding
`
`Ex.1030 / IPR2022-00117 / Page 8 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Inductor Modeling
`
`R
`
`L
`
`Total inductance
`L
`=
`
`Main inductance
`
`Lm
`
`Leakage inductance
`+
`
`Ll
`
`C
`
`Total resistance
`R
`
`=
`
`Winding resistance
`
`Core resistance
`
`Rw
`
`+ Rc
`
`Q
`
`= ωL / R
`
`9
`
`—Analog Devices Confidential Information—
`
`s
`
`
`s
`
`
`c
`
`sin
`
`cos
`
`
`
`sinh
`
`cosh
`
`s
`
`
`c
`s
`
`
`c
`
`L
`(
`
`dc
`
`)
`
`
`c
`s
`
`Rw
`
` f2
`
`A
`
`A
`
`
`
`2
`
`sin(
`
`
`
`)2 A
`
`
`
`2
`
`cos(
`
`
`
`)2 A
`
`]
`
`2
`
`A
`
`
`
`e
`2
`
`e
`
`A
`
`
`
`e
`
`2
`
`2
`
`
`
`e
`
`R
`(dcw
`
`
`
`)
`
`A
`
`
`
`[
`
`sin
`
`cos
`
`s
`
`
`s
`
`
`c
`
`
`
`s
`
`
`s
`
`
`c
`
`sinh
`
`cosh
`
`L
`
`
`(
`
`dc
`
`)
`
`
`c
`s
`
`Ex.1030 / IPR2022-00117 / Page 9 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`On-wafer Measurement
`
`[S] [Y]
`
`[Yde-embed]=[YDUT]-[YPAD]
`
`[Yde-embed] [Zde-embed]
`
`P Model of Two-port Measurement
`
`Inductor
`
`Transformer
`
`REF4
`
`10
`
`—Analog Devices Confidential Information—
`
`L
`1
`
`)
`
`Z
`Im( 11
`
`
`L
`2
`
`)
`
`Z
`Im( 22
`
`
`R
`1
`
`Z
`Re( 11
`
`)
`
`R
`2
`
`Z
`Re( 22
`
`)
`
`RL
`
`1
`
`
`
`1
`
`Q
`1
`
`
`
`RL
`
`2
`
`
`
`2
`
`Q
`2
`
`
`
`Ex.1030 / IPR2022-00117 / Page 10 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Inductor Results
`
` Enhancement due to the magnetic
`core
`
` Inductance ~ 65nH at 20MHz
`9.3X of the air-core
`
` Quality factor ~ 8 at 20MHz; 11.5
`at 50MHz
`8.7X of the air-core
`
` Magnetic permeability of FeCoB
`multilayer ~ 100
`
`9.3X
`
`8.7X
`
`11
`
`—Analog Devices Confidential Information—
`
`Ex.1030 / IPR2022-00117 / Page 11 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`200nm
`FeCoB
`Single Layer
`
`Magnetics
`
` FeCoB/Al2O3 multilayer
` Reduced FMR linewidth
`Lower eddy current loss
` 6nm Al2O3 spacer
`Minimum thickness above which the
`anti-ferromagnetic coupling between
`neighboring FeCoB layers disappears
`Very low coercive field
`Very low hysteresis loss
`
` Magnetic annealing
`Extremely low hysteresis loss along
`hard axis
`
` [FeCoB (500nm)+Al2O3 (6nm)] × 6
`
`12
`
`—Analog Devices Confidential Information—
`
`REF3
`
`Ex.1030 / IPR2022-00117 / Page 12 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Permeability Measurement
`
` Testing system
` Vector network analyzer
` Waveguide
` External magnetic field generator
` S11 & S12
` Magnetic film absorbs microwave
`energy at frequency f, under bias
`field B.
`
`FeCoB 100nm/Al2O3
`6nm/FeCoB 100nm
`
`REF3
`
`13
`
`—Analog Devices Confidential Information—
`
`1
`
`
`
`S
`
`11H
`1
`
`
`
`
`S
`
`b ia s
`
`
`
`21H
`
`b ia s
`
`S
`
`
`11H
`
`b ia s
`
`
`
`1
`
`
`
`S
`
`
`11H
`
`ref
`
`
`
`S
`
`
`
`21H
`
`ref
`
`1
`
`
`
`S
`
`
`11H
`
`ref
`
`j
`
`(
`
` klt
`
`
`0
`0
`
`)
`
`
`r
`
`
`
`Z
`
`0
`
`Ex.1030 / IPR2022-00117 / Page 13 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Substrate Surface Condition Dependency of
`
`Permeability and Inductance
`
`200 nm single
`layer, on bare
`Si
`
`500 nm single
`layer, on bare
`Si
`
`[FeCoB 500
`nm/Al2O3 6
`nm]X6, on
`bare Si
`
`500 nm single
`layer, on PI/Si
`
`500 nm single
`layer, on PI/Cu
`stripes/PI/Si
`
`Relative
`Permeability
`
`Inductance of 3um
`thick core (nH)
`
`750
`
`470
`
`350
`
`200
`
`350
`
`200
`
`200
`
`115
`
`100
`
`65
`
` Permeability decreases as the single layer thickness increases.
` Permeability decreases due to the poor flatness and smoothness of the polyimide surface on which the
`magnetic deposition was performed.
` [FeCoB 200 nm/Al2O3 6 nm]X15 deposited on an appropriately planarized polyimide surface is able to
`produce an inductance of 470 nH.
` Future work: polyimide surface planarization before magnetic deposition
`
`14
`
`—Analog Devices Confidential Information—
`
`Ex.1030 / IPR2022-00117 / Page 14 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Saturation Current
`
`The magnetic material tends to get
`magnetically saturated when the field
`exceeds a critical value.
`The saturation magnetization of FeCoB is
`4PMs=1.5Tesla.
`The magnetic core stops contributing to
`the inductance when it gets saturated --
`~1.
`Higher initial permeability lower
`saturation current in the coil
`The saturation current at 70%Ms is
`estimated to be 1.4 Amp for Inductor
`Type I.
`
`15
`
`—Analog Devices Confidential Information—
`
`Ex.1030 / IPR2022-00117 / Page 15 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Saturation Current Modeling of [FeCoB 500
`
`nm/Al
`
`O
`2
`3
`
`6 nm]X6 Core
`
`Input Current on Primary Side
`vs. Time
`
`0.12
`
`0.10
`
`0.08
`
`0.06
`
`0.04
`
`0.02
`
`0.00
`
`Side (V)
`
`Induced Voltage on Secondary
`
`0
`
`0.2
`
`0.6
`0.4
`Time (us)
`
`0.8
`
`1
`
`Total Magnetic Flux vs. Time
`
`0
`
`0.2
`
`0.6
`0.4
`Time (us)
`
`0.8
`
`1
`
`5.00
`
`4.00
`
`3.00
`
`2.00
`
`1.00
`
`0.00
`
`Input Current (Amp)
`
`60.00
`
`50.00
`
`40.00
`
`30.00
`
`20.00
`
`10.00
`
`0.00
`
`Total Flux (nWb)
`
`16
`
`Input Current
`
`H field
`
`B-H loop
`
`Flux B
`
`Vout=dФ/dt
`
`Input Current vs. Induced Voltage
`
`0
`
`3
`2
`1
`Input Current on Primary Side(Amp)
`
`4
`
`5
`
`—Analog Devices Confidential Information—
`
`Ex.1030 / IPR2022-00117 / Page 16 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Transformer Performance – Looking at One Side
`
` Transformer II: highest inductance, ~ 53nH; highest total loss due to denser flux; quality
`factor of 2.7 at 20MHz.
` Transformer III: slightly higher inductance (~ 35.3nH) & resistance than I (~ 33.5nH), due
`to shape anisotropy inside core.
` Transformer IV: inductance ~ 12nH, due to small core width
`—Analog Devices Confidential Information—
`17
`
`Ex.1030 / IPR2022-00117 / Page 17 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Transformer Performance – Coupling
`
` Transformer II: low coupling constant of 0.1 due to separated
`windings.
` Transformer III: strongest coupling (~ 0.9) & lowest minimum
`insertion loss ( -7dB at 20MHz).
` Transformer IV: poor coupling, no like bulk magnetic core
`
`MIL=1/Gmax
`
`18
`
`—Analog Devices Confidential Information—
`
`L
`
`pm
`
`LL
`s
`
`k
`
`Re(
`
`Z
`
`)11
`
`x
`
`
`
`Re(
`
`Z
`2
`)]12
`
`)22
`
`
`
`[Re(
`
`Z
`
`2
`)]12
`2
`)]12
`
`[Im(
`
`Z
`
`
`
`[Re(
`
`Z
`
`G
`max
`
`
`
` (21
`
`x
`
`
`
`2
`
`x
`
`
`
`x
`
`)
`
`Ex.1030 / IPR2022-00117 / Page 18 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Reference
`
` [1] T. O'Donnell, N. Wang, M. Brunet, S. Roy, S., A. Connell, J. Power, C O'Mathuna, P.
`McCloskey, Thin film micro-transformers for future power conversion, IEEE Applied Power
`Electronics Conference, pp. 939-944 (2004).
` [2] C. H. Ahn,Y. J. Kim, and M. G. Allen, A fully integrated planar toroidal inductor with a
`micromachined nickel-iron magnetic bar, IEEE Trans. Comp., Packag., Manufact. Technol. A, no. 3,
`pp. 463–469, Sept. (1994).
` [3] X. Xing, et al, RF Magnetic Properties of FeCoB/Al2O3/FeCoB Structure with Varied Al2O3
`Thickness, Magnetics, IEEE Transactions on 47 (10), 3104-3107 (2011)
` [4] X. Xing, Soft Magnetic Materials and Devices on Energy Applications, PhD Dissertation, (2011).
` [5] M. Yamaguchi, M. Baba, K. Suezawa, T. Moizumi, K. I. Arai, A. Haga, Y. Shimada, S. Tanabe,
`And K. Itoh, Improved RF Integrated Magnetic Thin-Film Inductors by Means of Micro Slits and
`Surface Planarization Techniques, IEEE TRANS. MAGN., BOL. 36, NO. 5, SEPTEMBER (2000).
` [6] G. Grandi, M. K. Kazimierczuk, A. Massarini, U. Reggiani, and G. Sancineto, Model of
`Laminated Iron-Core Inductors for High Frequencies, IEEE Trans. Magn., VOL. 40, NO. 4 (2004).
` [7] M. K. Kazimierczuk, G. Sancineto, G. Grandi, U. Reggiani, and A. Massarini, High-Frequency
`Small-Signal Model of Ferrite Core Inductors, IEEE Trans. Magn., VOL. 35, pp. 4185–4191 (1999).
` [8] David C. et al, LATERAL MICROWAVE TRANSFORMERS AND INDUCTORS
`IMPLEMENTED IN A Si/SiGe HBT PROCESS.
` [9] D. W. Lee, K. Hwang, and S. X. Wang, Fabrication and analysis of high performance integrated
`solenoid inductor with magnetic core, IEEE TRANS. Magnetics, pp. 4089-4095, VOL. 44, NO.11,
`November (2008).
`
`19
`
`—Analog Devices Confidential Information—
`
`Ex.1030 / IPR2022-00117 / Page 19 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Conclusion
`
` Fly-back DC/DC converter
` Four solenoid integrated transformers with FeCoB multilayer cores
` Different winding
` Different core structures
` 3µm FeCoB/Al2O3 multilayer film a factor of 9.3 and 8.7 improvements in
`the inductance and quality factor, respectively
` Material study on the FeCoB/Al2O3
` Multilayer film has reduced eddy current loss
` [FeCoB 500 nm/Al2O3 6 nm]X6 has very small hysteresis loss
` permeability of the magnetic thin films depends very much on the substrate surface
`roughness.
` Saturation current
` Transformer III interleaved winding and sliced magnetic core, exhibited the
`lowest insertion loss as well as the best comprehensive performance.
` Polyimide surface planarization before magnetic deposition.
`
`20
`
`—Analog Devices Confidential Information—
`
`Ex.1030 / IPR2022-00117 / Page 20 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`
`
`Thank you!
`
`&
`
`Questions?
`
`21
`
`—Analog Devices Confidential Information—
`
`Ex.1030 / IPR2022-00117 / Page 21 of 21
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
`
`