Navigator® ii MatchiNg Networks
`with a solid-state techNology optioN
`
`the matching network serves several critical purposes in an rF plasma system:
`• produces sufficient voltage to allow plasma ignition
`• converts the plasma / chamber impedance to near 50 Ω in order to allow rF power from the generator to reach the plasma
`• Follows plasma impedance through process recipe changes without inefficient mismatching or extinguishing the plasma
`
`traditional matching networks utilizing analog-based control often cannot tune properly when provided with pulsed rF input. additionally,
`traditional tuning algorithms can “drop” the plasma when moving variable capacitors from their “ignition preset” positions to the final tune position.
`the result of both of these scenarios is a poorly controlled plasma process.
`
`the Navigator® ii matching network is designed with advanced digital measurement and controls, enabling tune-while-pulsing over a wide pulse
`frequency and duty cycle range. its model-based adaptive tuning algorithm follows the most direct capacitor position trajectory from ignition to tuned
`plasma, allowing true independence from preset positions during plasma process development. a solid-state option incorporates hot-switchable variable
`capacitors, rather than vacuum capacitors, that can follow the fastest process transitions in real time.
`
`b
`
`Pfor
`
`Pref
`
`b
`
`Pfor
`
`Pref
`
`Traditional matching instrumentation is
`unable to properly measure pulsed RF,
`resulting in (a) unstable tuning, and (b)
`varying reflected power.
`
`Navigator II fast instrumentation and digital
`tuning algorithm accurately measure RF power
`during pulsed operation. The result is (a) stable
`tuning and (b) minimized reflected power.
`
`TUNES wITh PUlSED RF INPUT
`
`Traditional Matching Network
`
`a
`
`10
`
`20
`Time (Sec)
`
`30
`
`40
`
`Navigator® II Matching Network
`
`a
`
`70
`
`60
`
`50
`
`40
`
`30
`
`20
`
`10
`
`Capacitor Position (percent)
`
`0
`
`0
`
`80
`
`70
`
`60
`
`50
`
`40
`
`30
`
`20
`
`10
`
`0
`
`Capacitor Position (percent)
`
`0
`
`5
`
`10
`
`15
`Time (Sec)
`
`20
`
`25
`
`30
`
`MoDEl-bASED ADAPTIVE TUNINg AlgoRIThM
`
`Traditional Matching Network
`
`Navigator® II Matching Network
`
`Traditional Matching Network
`
`Navigator® II Matching Network
`
`500
`
`400
`
`300
`
`200
`
`~2 sec (typical)
`
`500
`
`400
`
`300
`
`200
`
`~0.5 sec (typical)
`
`100
`
`80
`
`60
`
`100
`
`80
`
`60
`
`Experimental Setup
`
`Directional
`Coupler
`
`Z'Scan® II
`Output Sensor
`
`Paramount®
`RF Generator
`
`Pfor
`
`Pref
`
`Navigator® II
`RF Matching
`Network
`
`Plasma
`Chamber
`
`Oscilloscope
`
`PC
`
`RF System
`Paramount RF generator
`Navigator II RF matching network
`
`Diagnostics
`Directional coupler: Forward, reflected power at generator output
`Navigator II internal diagnostics: Capacitor position, Z'Scan II readback
`Personal computer: Data acquisition, Navigator II control
`
`Navigator® II Architecture
`
`RF Section (Variable & Fixed Elements)
`
`RF In
`(From Generator)
`
`Input Sensor
`
`
`
`Optionalp
`
`Output Sensor
`
`RF Out
` (To Generator)
`
`Motor Drive
`
`Logic/Controls
`
`I/O (To/From Tool)
`
`40
`
`20
`
`Load (%)
`
`40
`
`20
`
`Load (%)
`
`1
`
`2
`
`3
`Time (s)
`
`4
`
`5
`
`6
`
`0
`0
`
`20
`
`40
`60
`Tune (%)
`
`80
`
`100
`
`0
`0
`
`20
`
`40
`60
`Tune (%)
`
`80
`
`100
`
`100
`
`0
`0
`
`Reflected Power (W)
`
`1
`
`2
`2
`
`3
`Time (s)
`
`4
`
`5
`
`6
`
`100
`
`0
`0
`
`Reflected Power (W)
`
`Traditional phase-magnitude
`algorithm tuning times from
`various preset positions.
`
`Navigator II model-based
`adaptive algorithm cuts tuning
`times by more than half.
`
`Traditional phase-magnitude
`algorithm requires careful
`selection and possibly
`compromises capacitor presets
`in order to maintain plasma
`after ignition.
`
`Navigator II model-based
`adaptive algorithm drives
`directly from optimized
`capacitor preset position to
`tuned plasma, minimizing
`potential of losing ignition.
`
`Autotune Time
`
`~3 msec
`
`2
`
`4
`Time (s)
`
`6
`
`8
`
`1.0
`
`0.9
`
`0.8
`
`0.7
`
`00000000000000000..66666666666666666666
`0.6
`
`0.5
`
`0.4
`
`0.3
`
`0.2
`
`0.1
`
`0
`
`0
`
`d
`
`|rho|
`
`SolID-STATE MATChINg TEChNology
`a
`
`Millisecond Tuning Time on a Plasma Application
`
`P fwd
`
`P rfl
`
`c
`
`b
`
`A. Experiment demonstrating Naviga-
`tor II FastCap capability of following
`rapid plasma process transitions. RF
`power set point is toggled between
`50 W and 600 W, creating a plasma
`impedance transition between two
`points.
`
`100msec
`
`B. Close up showing reflected power
`“bump” for approximately 8 msec. A
`vacuum capacitor match would take
`approximately 100 msec to respond to
`the same plasma impedance transition.
`
`C. The FastCap model-based digital
`tuning algorithm adjusts capacitor values
`in ~2 msec steps.
`
`D. Final tune time values
`are typically in the sub-10
`msec range.
`
`Advanced Energy Industries, Inc.
`1625 Sharp Point Drive Fort Collins, Colorado 80525 U.S.A.
`T: 800.446.9167 or +1.970.221.4670 · F: +1.970.221.5583
`support@aei.com · www.advanced-energy.com
`Please see www.advanced-energy.com for worldwide contact information.
`© Advanced Energy Industries, Inc. 2012
`All rights reserved. Printed in U.S.A.
`
`Advanced Energy®, FastCap™, Navigator®, Paramount®, and Z'Scan® are trademarks of Advanced Energy Industries, Inc.
`Navigator patents:
`5,523,955 - System for Characterizing AC Properties of a Processing Plasma
`6,661,324 - Voltage and Current Sensor
`6,888,313 -Impedance Matching Network with Termination of Secondary RF Frequencies
`7,049,751 - Termination of Secondary Frequencies in RF Power Delivery
`7,822,565 - System, Method and Apparatus for Monitoring Characteristics of RF Power
`
`Components
`RF Section
`Variable and fixed RF elements used to tune the input impedance
`to the desired value
`Input Sensor
`Provides input impedance to Logic / Control section
`Motor Drive
`Provides power to move variable elements in RF section
`I/O
`Channel for communication between tool and match logic
`Logic/Controls
`Manages tuning algorithm and commands Motor Drive
`to adjust variable elements
`Output Sensor (Optional)
`Used to monitor and report RF chamber conditions
`
`Navigator® II Matching Technology Options
`
`Parameter
`
`Navigator® II
`
`Navigator® II FastCap™
`
`Instrumentation
`
`Analog + Digital
`
`Analog + Digital
`
`Controls
`
`Digital
`
`Digital
`
`Tuning Algorithm
`
`Model-Based
`
`Model-Based
`
`Capacitor Technology
`
`Vacuum, Variable
`
`Solid-State, Hot-Switchable
`
`Power and Frequency
`
`Range
`
`1 to 15 kW
`2 to 60 MHz
`
`Introductory
`2 to 3 KW
`13.56 MHz
`
`Page 1 of 1
`
`ADVANCED ENERGY INDUSTRIES INC.
`Exhibit 1006
`
`
`with a solid-state techNology optioN
`
`the matching network serves several critical purposes in an rF plasma system:
`• produces sufficient voltage to allow plasma ignition
`• converts the plasma / chamber impedance to near 50 Ω in order to allow rF power from the generator to reach the plasma
`• Follows plasma impedance through process recipe changes without inefficient mismatching or extinguishing the plasma
`
`traditional matching networks utilizing analog-based control often cannot tune properly when provided with pulsed rF input. additionally,
`traditional tuning algorithms can “drop” the plasma when moving variable capacitors from their “ignition preset” positions to the final tune position.
`the result of both of these scenarios is a poorly controlled plasma process.
`
`the Navigator® ii matching network is designed with advanced digital measurement and controls, enabling tune-while-pulsing over a wide pulse
`frequency and duty cycle range. its model-based adaptive tuning algorithm follows the most direct capacitor position trajectory from ignition to tuned
`plasma, allowing true independence from preset positions during plasma process development. a solid-state option incorporates hot-switchable variable
`capacitors, rather than vacuum capacitors, that can follow the fastest process transitions in real time.
`
`b
`
`Pfor
`
`Pref
`
`b
`
`Pfor
`
`Pref
`
`Traditional matching instrumentation is
`unable to properly measure pulsed RF,
`resulting in (a) unstable tuning, and (b)
`varying reflected power.
`
`Navigator II fast instrumentation and digital
`tuning algorithm accurately measure RF power
`during pulsed operation. The result is (a) stable
`tuning and (b) minimized reflected power.
`
`TUNES wITh PUlSED RF INPUT
`
`Traditional Matching Network
`
`a
`
`10
`
`20
`Time (Sec)
`
`30
`
`40
`
`Navigator® II Matching Network
`
`a
`
`70
`
`60
`
`50
`
`40
`
`30
`
`20
`
`10
`
`Capacitor Position (percent)
`
`0
`
`0
`
`80
`
`70
`
`60
`
`50
`
`40
`
`30
`
`20
`
`10
`
`0
`
`Capacitor Position (percent)
`
`0
`
`5
`
`10
`
`15
`Time (Sec)
`
`20
`
`25
`
`30
`
`MoDEl-bASED ADAPTIVE TUNINg AlgoRIThM
`
`Traditional Matching Network
`
`Navigator® II Matching Network
`
`Traditional Matching Network
`
`Navigator® II Matching Network
`
`500
`
`400
`
`300
`
`200
`
`~2 sec (typical)
`
`500
`
`400
`
`300
`
`200
`
`~0.5 sec (typical)
`
`100
`
`80
`
`60
`
`100
`
`80
`
`60
`
`Experimental Setup
`
`Directional
`Coupler
`
`Z'Scan® II
`Output Sensor
`
`Paramount®
`RF Generator
`
`Pfor
`
`Pref
`
`Navigator® II
`RF Matching
`Network
`
`Plasma
`Chamber
`
`Oscilloscope
`
`PC
`
`RF System
`Paramount RF generator
`Navigator II RF matching network
`
`Diagnostics
`Directional coupler: Forward, reflected power at generator output
`Navigator II internal diagnostics: Capacitor position, Z'Scan II readback
`Personal computer: Data acquisition, Navigator II control
`
`Navigator® II Architecture
`
`RF Section (Variable & Fixed Elements)
`
`RF In
`(From Generator)
`
`Input Sensor
`
`
`
`Optionalp
`
`Output Sensor
`
`RF Out
` (To Generator)
`
`Motor Drive
`
`Logic/Controls
`
`I/O (To/From Tool)
`
`40
`
`20
`
`Load (%)
`
`40
`
`20
`
`Load (%)
`
`1
`
`2
`
`3
`Time (s)
`
`4
`
`5
`
`6
`
`0
`0
`
`20
`
`40
`60
`Tune (%)
`
`80
`
`100
`
`0
`0
`
`20
`
`40
`60
`Tune (%)
`
`80
`
`100
`
`100
`
`0
`0
`
`Reflected Power (W)
`
`1
`
`2
`2
`
`3
`Time (s)
`
`4
`
`5
`
`6
`
`100
`
`0
`0
`
`Reflected Power (W)
`
`Traditional phase-magnitude
`algorithm tuning times from
`various preset positions.
`
`Navigator II model-based
`adaptive algorithm cuts tuning
`times by more than half.
`
`Traditional phase-magnitude
`algorithm requires careful
`selection and possibly
`compromises capacitor presets
`in order to maintain plasma
`after ignition.
`
`Navigator II model-based
`adaptive algorithm drives
`directly from optimized
`capacitor preset position to
`tuned plasma, minimizing
`potential of losing ignition.
`
`Autotune Time
`
`~3 msec
`
`2
`
`4
`Time (s)
`
`6
`
`8
`
`1.0
`
`0.9
`
`0.8
`
`0.7
`
`00000000000000000..66666666666666666666
`0.6
`
`0.5
`
`0.4
`
`0.3
`
`0.2
`
`0.1
`
`0
`
`0
`
`d
`
`|rho|
`
`SolID-STATE MATChINg TEChNology
`a
`
`Millisecond Tuning Time on a Plasma Application
`
`P fwd
`
`P rfl
`
`c
`
`b
`
`A. Experiment demonstrating Naviga-
`tor II FastCap capability of following
`rapid plasma process transitions. RF
`power set point is toggled between
`50 W and 600 W, creating a plasma
`impedance transition between two
`points.
`
`100msec
`
`B. Close up showing reflected power
`“bump” for approximately 8 msec. A
`vacuum capacitor match would take
`approximately 100 msec to respond to
`the same plasma impedance transition.
`
`C. The FastCap model-based digital
`tuning algorithm adjusts capacitor values
`in ~2 msec steps.
`
`D. Final tune time values
`are typically in the sub-10
`msec range.
`
`Advanced Energy Industries, Inc.
`1625 Sharp Point Drive Fort Collins, Colorado 80525 U.S.A.
`T: 800.446.9167 or +1.970.221.4670 · F: +1.970.221.5583
`support@aei.com · www.advanced-energy.com
`Please see www.advanced-energy.com for worldwide contact information.
`© Advanced Energy Industries, Inc. 2012
`All rights reserved. Printed in U.S.A.
`
`Advanced Energy®, FastCap™, Navigator®, Paramount®, and Z'Scan® are trademarks of Advanced Energy Industries, Inc.
`Navigator patents:
`5,523,955 - System for Characterizing AC Properties of a Processing Plasma
`6,661,324 - Voltage and Current Sensor
`6,888,313 -Impedance Matching Network with Termination of Secondary RF Frequencies
`7,049,751 - Termination of Secondary Frequencies in RF Power Delivery
`7,822,565 - System, Method and Apparatus for Monitoring Characteristics of RF Power
`
`Components
`RF Section
`Variable and fixed RF elements used to tune the input impedance
`to the desired value
`Input Sensor
`Provides input impedance to Logic / Control section
`Motor Drive
`Provides power to move variable elements in RF section
`I/O
`Channel for communication between tool and match logic
`Logic/Controls
`Manages tuning algorithm and commands Motor Drive
`to adjust variable elements
`Output Sensor (Optional)
`Used to monitor and report RF chamber conditions
`
`Navigator® II Matching Technology Options
`
`Parameter
`
`Navigator® II
`
`Navigator® II FastCap™
`
`Instrumentation
`
`Analog + Digital
`
`Analog + Digital
`
`Controls
`
`Digital
`
`Digital
`
`Tuning Algorithm
`
`Model-Based
`
`Model-Based
`
`Capacitor Technology
`
`Vacuum, Variable
`
`Solid-State, Hot-Switchable
`
`Power and Frequency
`
`Range
`
`1 to 15 kW
`2 to 60 MHz
`
`Introductory
`2 to 3 KW
`13.56 MHz
`
`Page 1 of 1
`
`ADVANCED ENERGY INDUSTRIES INC.
`Exhibit 1006
`
`
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