~ ~ --------------- --- -----
`
`CERTIFICATE OF TRANSLATION
`
`I, Sayuri Anderson, located in Chicago, Illinois, am fluent in the Japanese and English languages. I have
`been translating documents for 25 years and am competent to translate documents from Japanese into
`English. I hereby certify that the document identified below, translated from Japanese into English, is
`true and accurate, to the best of my knowledge and belief.
`
`Japanese Patent H2001-82935 (P2001-82935A}
`
`I declare under penalty of perjury under the laws of the United States of America that the foregoing is
`true and correct to the best of my ability. I hereby declare that all statements made herein of my own
`knowledge are true and that all statements made on information and belief are believed to be true to
`the best of my ability; and further that these statements were made with the knowledge that willful
`false statements and the like so made are punishable by fine or imprisonment, or both, under Section
`1001 of Title 18 of the United States Code.
`
`Sayuri Anderson
`Name
`
`April 11,2018
`Date
`
`Signature
`
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`CERTIFICATE OF TRANSLATION
`
`I, Matthew Bramble, located at 2301 Caprock Place, Georgetown TX, am fluent in
`the Japanese and English languages. I have been translating documents for25
`years and am competent to translate documents from Japanese into English. I
`hereby certify that the document identified below, translated from Japanese into
`English, is true and accurate, to the best of my knowledge and belief.
`
`Japanese Unexamined Patent Application No. 2001-82935
`
`I declare under penalty of perjury under the laws of the United States of America
`that the foregoing is true and correct. I hereby declare that all statements made
`herein of my own knowledge are true and that all statements made on information
`and belief are believed to be true; and further that these statements were made
`with the knowledge that willful false statements and the like so made are
`punishable by fine or imprisonment, or both, under Section 1001 of Title 18 of the
`United States Code.
`
`Name
`
`Date
`
`Signature
`
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`(1) Japanese Unexamined Patent application publication H2001-82935 (P2001-82935A)
`
`(19) Japan Patent Office (JP)
`
`(12) Japanese Unexamined Patent
`Application Publication (A)
`
`(11) Japanese Unexamined Patent
`Application Publication Number
`
`2001-82935
`(P2001-82935A)
`
`(51) Int Cl7
`G01B
`11/24
`
` ID Symbols
`
` F1
`G01B 11/24
`
`(43) Publication Date March 30, 2001
` Theme Code (Reference)
`K
`2F066
`
` Examination Claim Unexamined, Number of Claim Items 5 OL (Total 10 pages)
`
`(21) Patent Application No.
`
`Patent Application H11-256683
`
`(22) Application Date
`
` September 10, 1999
`
`(71) Applicant 000129253
` Keyence Corp
`1-3-14 Higashi-Nakashima, Higashi Yodogawa-ku, Osaka city, Osaka
`prefecture
`
`(72) Inventor Yoichi Okamoto
` c/o Keyence Corp
`1-3-14 Higashi-Nakashima, Higashi Yodogawa-ku, Osaka city, Osaka
`prefecture
`(72) Inventor Sachitaro Morizono
` c/o Keyence Corp
`1-3-14 Higashi-Nakashima, Higashi Yodogawa-ku, Osaka city, Osaka
`prefecture
`(74) Agent 100106127
`Patent Attorney Naoki Matsumoto
`
`Continued to the last page
`
`(54) [Title of Invention] 3-dimensional Measurement Device
`
`(57) [Abstract]
`[Topics] A 3-dimensional measurement device is provided that is
`easy to understand the corresponding relationship of the site of the
`actual means target object and the site of the surface shape that is
`displayed on the display device.
`[Solution means] A confocal microcopy, which is a 3 dimensional
`measurement device, comprises: a photo receptor 19 which
`receives the light from the measurement target object w through
`confocal light system 1 that includes object lens 17; color CCD 24
`that obtains for each pixel the color information of measurement
`target object w; Z direction displacement mechanism 30 that
`enables the change of the relative position of measurement target
`object w with respect to focal point of object lens 17 at optical axis
`direction; scanning mechanisms 14a, 14b that scan the
`measurement target object w by the light from light source 10 in
`XY direction that is vertical to optical axis direction; processing
`device 46 that seeks and stores for each pixel the height
`information and color information that correspond to the relative
`position in the optical axis direction of the measurement target
`object w when the light reception amount is maximized; and
`display device 47 that uses height information and color
`information for each pixel and engages in color 3 dimensional
`display of the surface shape of the measurement target object w.
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`(2) Japanese Unexamined Patent application publication H2001-82935 (P2001-82935A)
`
`[Scope of Patent Claim]
`[Claim 1] A 3-dimensional measurement device that receives lights from the
`measurement target object using photo receptor, and obtains 3-dimensional
`surface shape that includes the height information of the aforementioned
`measurement target object based on the light reception information and
`displays 3 dimensionally the aforementioned surface shape on the display
`device,
`The 3-dimensional measurement device wherein the device comprises color
`filming means that obtains color images of the aforementioned measurement
`target object
`and using the color information for each pixel that is obtained from the
`aforementioned color filming means, colors the 3-dimensional display of the
`aforementioned surface shape
`
`[Claim 2] The 3-dimensional measurement device according to claim 1
`wherein the device is furthermore provided with means that seeks the
`maximum light reception amount for each pixel and using 2nd color
`information which replaces the brightness ingredient of the color information
`for each aforementioned pixel by the maximum light reception amount for
`each aforementioned pixel, the 3-dimensional display of the aforementioned
`surface shape is colored.
`
`[Claim 3] The 3-dimensional measurement device according to claim 1or 2
`wherein laser beam is irradiated on the aforementioned measurement target
`object and based on the light reception information of the reflection light or
`penetrated light, the information of 3-dimensional surface shape that
`includes aforementioned measurement target object height information is
`obtained
`
`[Claim 4] A 3-dimensional measurement device that comprises: a light
`source that irradiates light on the measurement target object;
`A photo receptor that receives light from the aforementioned measurement
`target object through the confocal optical system that includes the target
`lens;
`Color information - obtaining sensor that obtains the color information of the
`aforementioned measurement target object for each pixel;
`Z direction displacement mechanism that enables the change of relative
`position of the aforementioned measurement target object with respect to the
`focal point of the aforementioned object lens in optical axis direction;
`Scanning mechanism that scans the aforementioned measurement target
`object using the light from the aforementioned light source in the XY
`direction vertical to the aforementioned light axis direction,
`A processing device that seeks and stores for each pixel the height
`information and the aforementioned color information that correspond to the
`relative position in optical axis direction of the measurement target object
`when the light reception amount is maximized;
` and a display device that uses height information for each aforementioned
`pixel and color information for each aforementioned pixel and engages in
`color 3-dimensional display of the surface shape of the measurement target
`object,
`
`[Claim 5] The 3-dimensional measurement device according to claim 4
`wherein the aforementioned display device, using 2nd color information
`which replaced the brightness ingredient of the color information for
`aforementioned pixel by the maximum light reception amount for the
`aforementioned pixel, performs the color 3-dimensional display of the
`aforementioned surface shape.
`
`[Detailed Explanation of Invention]
`[0001]
`[Technical field of the Invention] The present invention is related to a 3-
`dimensional measurement device in which the light from the measurement
`target object is received by photo receptor and based on the light reception
`information, 3-dimensional surface information that includes the height
`information of the aforementioned measurement target object is obtained and
`
`the aforementioned surface information is displayed 3 dimensionally on the
`display device
`
`[0002]
`[Prior art] As one example of a 3-dimensional measurement device, there is
`a confocal microcopy. In confocal microcopy, the light from light source
`(normally laser beam) is irradiated on a sample that is a measurement target
`object and its penetrated light or reflected light is received by the photo
`receptor via confocal optical system and based on the received light amount,
`information of 3-dimensional surface shape that includes sample height is
`obtained. Its measurement principle is explained in the following.
`
`[0003] For example, if the stage with samples placed is moved in optical axis
`direction (Z direction), the amount of light that comes into the photo receptor
`via confocal optical system, that is, the light reception amount changes, and
`when it is focused on the sample surface, the light reception amount is
`maximized. Hence, the height data of the sample surface is obtained from Z
`direction position of the stage when the maximum light reception amount is
`obtained, Then, by scanning the sample surface by the light in XY direction
`that is vertical to the light axis direction, the sample surface height
`distribution, that is, 3-dimensional surface shape information is obtained.
`This height distribution, is displayed 3 dimensionally (sterically) on the
`screen by CG (computer graphic) method.
`
`[0004] For example, when XY plane is divided into many small areas and
`each area height is expressed by Z direction column, height distribution
`(surface shape) can be sterically displayed as many column congregation
`with various height. The column height of each area becomes the average
`value of height data of pixel that is contained in the area. Or, as in the 3-
`dimensional display in general, the sample (measurement target object)
`surface can be displayed as the congregation of small polygons.
`
`[0005] As these 3-dimensional display models, there are wire framed model
`and solid model. Regarding wired frame model, the surface shape is drawn
`as the gathering of lines and regarding solid model, surface shape is drawn as
`the surface gathering. Then, coloring can be executed by various shades of
`pattern and color graduation depending on the height data. For example,
`using the dark color for low height and light color for high part, coloring of
`3-dimensional display of surface shape has been done traditionally.
`
`[0006]
`[Topics the Invention attempted to solve] As described above, traditionally,
`using the color that was selected depending on height data, artificial coloring
`has been done for 3-dimensional display of surface shape, but using such
`coloring, 3-dimensional display of surface shape was not necessarily easy on
`eyes. That is, sometimes the corresponding relationship of the site of actual
`measurement target object and the site in the 3-dimensional display of
`surface shape that is displayed on the display device is not easy to tell.
`
`[0007] The present invention, in view of the such traditionally issue, has the
`purpose to provide a 3-dimensional measurement device in which
`corresponding relationship of the site of actual measurement target object
`and the site in the 3-dimensional display of surface shape that is displayed on
`the display device is easy to tell.
`
`[0008]
`[Means to solve the issue] A 3-dimensional measurement device of the
`present invention receives lights from the measurement target object using
`photo receptor, and obtains 3-dimensional surface shape that includes the
`height information of the measurement target object based on the light
`reception information and displays 3 dimensionally surface shape on the
`display device, and the device comprises color filming means that obtains
`color of the measurement target object and using the color information for
`each pixel that is obtained from the color filming means, colors the 3-
`dimensional display of the surface shape.
`
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`(3) Japanese Unexamined Patent application publication H2001-82935 (P2001-82935A)
`
`[0009] According to the configuration described above, the 3-
`dimensional display of surface shape is colored according to the
`color information obtained from color filming means, hence
`surface shape is displayed with the color close to the actual color
`of the measurement target object. Hence, the corresponding
`relationship of the site of actual measurement target object and the
`site of the surface shape that is displayed on the display device is
`easier to tell.
`
`[00010] Preferably, means to seek maximum light reception
`amount for each pixel is provided furthermore, and using 2nd color
`information which replaces the brightness ingredient of the color
`information for each pixel by the maximum light reception amount
`for each pixel, the 3-dimensional display of the surface shape is
`colored. In this case, since the light reception amount (maximum
`light reception amount) when each pixel is focused is reflected in
`the color information as brightness information, compared with the
`coloring using only color information obtained from color filming
`means, 3-dimensional display image with a strong contract is
`obtained.
`
`[0011] Moreover, a configuration is preferred in which laser beam
`is irradiated on measurement target object and based on the light
`reception information of permeated light or the reflected light, the
`information of 3-dimensional surface shape that includes height
`information of measurement target object is obtained
`
`[0012] In preferred embodiment, the 3-dimensional measurement
`device of the present invention is a confocal microcopy and 3-
`dimensional measurement device comprise comprises: a light
`source that irradiates light on the measurement target object; A
`photo receptor that receives light from the measurement target
`object through the confocal optical system that includes the target
`lens; Color information - obtaining sensor that obtains the color
`information of the measurement target object for each pixel; Z
`direction displacement mechanism that enables the change of
`relative position of the measurement target object with respect to
`the focal point of the object lens in optical axis direction; Scanning
`mechanism that scans the measurement target object using the light
`from the light source in the XY direction vertical to the light axis
`direction, a processing device that seeks and stores for each pixel
`the height information and the color information that correspond to
`the relative position in optical axis direction of the measurement
`target object when the light reception amount is maximized; and a
`display device that uses height information for each pixel and color
`information for each pixel and engages in color 3-dimensional
`display of the surface shape of the measurement target object.
`
`[0013] More preferably the display device, using 2nd color
`information which replaced the brightness ingredient of the color
`information for pixel by the maximum light reception amount for
`the pixel, performs the color 3-dimensional display of the surface
`shape.
`
`[0014]
`[Embodiment of invention] The following explains the
`embodiments of the present invention based on the drawings of the
`embodiments.
`
`[0015] In Fig. 1 is shown an outline configuration of a confocal
`microcopy which is an example of 3-dimensional measurement
`device involving the present invention. This confocal microcopy is
`
`provided with a confocal optical system 1 to obtain the 3-
`dimensional surface shape information that includes sample height
`and non-confocal optical system 2 to obtain the sample color
`image.
`
`[0016] First, the confocal optical system 1 is explained. The
`confocal optical system 1 comprises light source 10 to irradiate
`single color light on sample 2 (preferably laser beam), 1st
`collimated lens 11, polarized beam splitter 12, 1/4 wave length
`plate 13, horizontal biasing device 14a, vertical biasing device 14b,
`1st relay lens 15, 2nd relay lens 16, object lens 17, image forming
`lens 18, pin hole plate PH, 1st photo receptor 19 etc.
`
`[0017] For light source 10, for example the semi-conductor laser
`that emits red laser beam is used. Laser beam that came from light
`source 10 driven by laser drive circuit 44 goes through 1st
`collimated lens 11 and is bent by polarized beam splitter 12 and
`goes through 1/4 wave length plate 13. After that, after biased in
`horizontal direction (side way) and vertical direction
`(perpendicular) by horizontal biasing device 14a and vertical
`biasing device 14b, light goes through 1st relay lens 15 and 2nd
`relay lens 16 and focuses on the surface of the sample w placed on
`the sample stage 30 by object lens 17.
`
`[0018] The horizontal biasing device 14a and vertical biasing
`device 14b is configured by Galvano mirror each, and by biasing
`laser beam in horizontal and vertical direction, the sample w
`surface is scanned by laser beam. For the ease of explanation,
`horizontal direction is called X direction and vertical direction Y
`direction. Sample stage 30 is driven in Z direction (optical axis
`direction) by stage control circuit 40. Thereby, the relative position
`at optical axis direction at object lens 17 focal point and sample w
`can be changed.
`
`[0019] The relative position at optical axis direction at object lens
`17 focal point and sample w can be changed by other method. For
`example, by fixing the position of sample stage 30 and driving the
`object lens 17 in Z axis direction, the focal point can be changed.
`Or by inserting a lens between object lens 17 and sample w in
`which the lens refraction index changes, a configuration is possible
`that can change the focal point of object lens 17. Moreover, sample
`stage 30 can be displaced in x direction and y direction by manual
`operation for approximate position matching.
`
`[0020] The laser beam that was reflected by sample 2 goes back
`the light path described above in reverse. That is, it goes through
`object lens 17, 2nd relay lens 16 and 1st relay lens 15 and returns
`again to 1/4 wave length plate 13 via horizontal biasing device 14a
`and vertical biasing device 14b. As a result, laser beam permeates
`the polarized beam splitter 12 and is concentrated by image
`forming lens18. Focused laser beam goes through the pin hole of
`pinhole plate PH placed at the focal position of image forming 18
`and enters into 1st photo receptor 19. 1st photo receptor 19 is
`configured by for instance photo multiplier or photo diode and
`converts the light reception amount into electric signal. The
`electric signal that is equivalent to reception light amount is given
`to 1st A/D converter 41 via output amp and gain control circuit (not
`shown in figure) and converted into digital values.
`[0021] As a result of the confocal optical system 1 having the
`configuration described above, information
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`(4) Japanese Unexamined Patent application publication H2001-82935 (P2001-82935A)
`
`concerning the three-dimensional surface profile, including
`information regarding the height of the sample w, can be obtained.
`The principle is briefly described below.
`
`[0022] As described above, the sample stage 30 is driven in the Z
`direction (optical axis direction) by a stage control circuit 40, and
`the relative position of the sample w with respect to focal point of
`the objective lens 17 is changed in the optical axis direction. Next,
`when the focal point of the objective lens 17 coincides with the
`surface (face to be measured) of the sample w, the laser light that is
`reflected at the surface of the sample w is focused by the imaging
`lens 18 along the light path described above, and almost all of the
`laser light passes through the pinhole of the pinhole plate PH.
`Consequently, the amount of light received by the first light-
`receiving element 19 is at maximum at this time. Conversely, when
`the focal point of the objective lens 17 is displaced from the
`surface (face to be measured) of the sample w, the laser light that
`has been focused by the imaging lens 18 has its focal point at a
`position that is displaced from the pinhole plate PH, and therefore
`only some of the laser light can pass through the pinhole. As a
`result, the amount of light received by the first light receiving
`element 19 decreases dramatically.
`
`[0023] Consequently, for any point on the surface of the sample w,
`by detecting the amount of received light of the first light receiving
`element 19 while driving the sample stage 30 in the Z direction
`(optical axis direction), the position of the sample stage 30 in the Z
`direction when the amount of received light is at maximum (the
`relative position of the sample w in the optical axis direction with
`respect to the focal point of the objective lens 17) can be
`definitively determined as height information.
`
`[0024] Actually, the amount of light received by the first light
`receiving element 19 is obtained by scanning the surface of the
`sample w with a horizontal deflection device 14a and a vertical
`deflection device 14b for each single step travel of the sample
`stage 30. When the sample stage 30 is made to move in the Z
`direction from the lower end to the upper end of the measurement
`range, received light quantity data that varies in accordance with
`the position in the Z direction as shown in Fig. 2 is obtained for a
`plurality of points (picture elements) within the scanning range.
`Based on this received light quantity data, the position in the Z
`direction when at maximum received light quantity is obtained for
`each point (picture element). Consequently, the distribution of
`surface heights of the sample w in the XY plane is obtained. This
`processing is executed by a processing device 46 using a
`microcomputer.
`
`[0025] The distribution of surface heights (surface profile
`information) that is obtained can be displayed on a monitor screen
`of a display device 47 by a number of methods. For example, by
`converting the height data into brightness data, the height data can
`be displayed as a two-dimensional distribution that elucidates the
`two-dimensional distribution of surface heights. The surface height
`distribution can also be displayed as a color distribution by
`converting the height data into color difference data. In addition,
`with the confocal microscope of this embodiment, a three-
`dimensional display can three-dimensionally display the height
`distribution (surface profile) of the sample.
`
`[0026] An example of three-dimensional display of a simple solid
`model M is shown in Fig. 3. As in this example, the solid model M
`is displayed on a two-dimensional surface as shown in the
`perspective view drawn by isometric projection. The X axis and Y
`axis in the drawing correspond to the XY plane that is scanned
`with the laser light, and the Z axis corresponds to the height
`
`direction (optical axis direction) of the sample. This type of three-
`dimensional display is well known in the field of computer
`graphics, and by inputting the X coordinate, the Y axis, and the Z
`coordinate (height) for each picture element, various types of
`software can be used in order to perform three-dimensional display
`on a screen.
`
`[0027] In addition, a surface image (black and white image) of the
`sample w is obtained from brightness signals using the received
`light quantity for each point (picture element) in the XY scanning
`range as brightness data. By producing brightness signals using the
`maximum received light quantity for each picture element as
`brightness data, focusing has occurred at points with different
`surface heights, and a confocal image is obtained that has
`extremely high depth of field.
`
`[0028] Next, a non-confocal optical system 2 will be described.
`The non-confocal optical system 2 comprises a white light source
`20 that illuminates the sample w with white light (illumination
`light for color imaging), a second collimating lens 21, a first half
`mirror 22, a second half mirror 23, and a color CCD 24 used as a
`color information capture sensor. Light receiving elements for each
`color R, G, and B may be used instead of a color CCD 24. With the
`non-confocal optical system 2, the objective lens 17 of the
`confocal optical system 1 is used in conjunction, and the optical
`axes of the two optical systems 1 and 2 coincide.
`
`[0029] A white light lamp, for example, is used for the white light
`source 20, but natural light or indoor light may be used without
`providing a particular dedicated light source. The white light that
`exits the white light source 20 passes through the second
`collimating lens 21, the light path is bent by the first half mirror
`22, and the light is focused by the objective lens 17 on the surface
`of the sample w that has been placed on the sample stage 30.
`
`[0030] The white light that has been reflected by the sample w
`passes through the objective lens 17, the first half mirror 22, and
`the second relay lens 16, is reflected by the second half mirror 23,
`and is incident on the color CCD 24, where it is imaged. The CCD
`24 is provided at a position that is conjugate or nearly conjugate to
`the pinhole of the pinhole plate PH of the confocal optical system
`1. The color image that has been imaged by the color CCD 24 is
`read by a CCD drive circuit 43, and the analog output signal is
`provided to a second A/D converter where it is converted to digital
`values. The color image obtained in this manner is displayed on the
`monitor screen of the display device 47 as an enlarged color image
`for observing the sample w.
`
`[0031] Color images obtained with the non-confocal optical system
`2 are combined in a three-dimensional display of the surface
`profile of the sample obtained by the confocal optical system 1
`described above, and color three-dimensional display is carried
`out. As a result, portions represented by hatching viewed from
`above in the Z-axis direction are colored with the colors of a color
`image in the display model shown in Fig. 3. Picture elements of the
`hatched portions are imaged in the XY plane and are associated
`with picture elements of the color image.
`
`[0032] The side wall parts that are not designated by hatching are
`portions that are not seen from above in the Z axis direction and
`are therefore not colored. These portions are shaded portions that
`are represented, for example, by a non-chromatic color such as
`black, but the representation method can be changed in accordance
`with the three-dimensional display technique (software). In
`addition, although the example of Fig. 3
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`(5) Japanese Unexamined Patent application publication H2001-82935 (P2001-82935A)
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`involves three-dimensional display of a solid model, the lines
`thereof should be colored with colors from the color image in the
`case where three-dimensional display is carried out with contour
`lines, as with a wire frame model.
`
`[0033] By coloring the three-dimensional display of the surface
`profile of a sample in accordance with a two-dimensional color
`image of the sample in this manner, the correspondence between
`sample locations and locations in the three-dimensional display
`will be readily seen. Processing for carrying out color three-
`dimensional display of this type is executed in accordance with
`software by a microprocessor contained in the processing device
`46.
`
`[0034] Fig. 4 is a block diagram showing a configuration that
`focuses on the processing device 46 for carrying out color three-
`dimensional display as described above. The received light
`quantity data that is input from a first A/D converter 41 to the
`processing device 46 is stored in a received light quantity memory
`51. The received light quantity memory 51 is peak hold memory.
`The new received light quantity data that has been input and the
`past received light quantity data that is stored are compared with a
`comparator 50, and the SW 1 closed, and the stored data in the
`received light quantity memory 51 is refreshed only if the new
`received light quantity data is greater than the past received light
`quantity data.
`
`[0035] At this time, the color data and height data for the
`corresponding picture elements are stored in color memory 52 and
`height memory 53 via SW 2 and SW 3. In other words, these
`memory data also are refreshed only when the new received light
`quantity data is higher than the old received light quantity data.
`The color data is data that is input from the color CCD 24 to the
`processing device 46 via the CCD drive circuit 43 and the second
`A/D converter 42, and the height data corresponds to the data that
`is provided to the stage control circuit 40 from the processing
`device 46
`
`[0036] At the point when scanning in the XY direction over the
`prescribed Z direction measurement range has been completed, the
`maximum received light data, the color data at this time, and the
`height data at this time, are respectively stored in the received light
`quantity memory 51, the color memory 52, and the height memory
`53. The microprocessor 54 then uses these data and generates color
`three-dimensional display data of the surface profile of the sample
`which is input to a display memory 55. The color three-
`dimensional display data is provided to the display device 47
`through a D/A converter 56.
`
`[0037] The color three-dimensional display data, as described
`above, is generated from the height data and color data for each
`picture element in the XY plane but may also be combined with
`the maximum received light quantity data. Specifically, by
`replacing the RGB color data brightness component for each
`picture element with maximum received light quantity data, a color
`three-dimensional display image with strong contrast is obtained in
`comparison to cases where only color data obtained from a non-
`confocal optical system 2 is used, because the maximum received
`light quantity for each picture element when in focus is reflected as
`brightness information in the color data.
`
`[0038] Fig. 5 is a flow chart showing processing for color three-
`dimensional display that is executed around the centralized
`processing device 46 as described above. First, in step 101, the
`measurement ranges are indicated. In other words, a first operating
`panel 48 is used, and the range over which the sample stage 30 is
`
`to move in the direction of the optical axis (Z direction scanning
`range) and the range over which the surface of the sample w is to
`be scanned with laser light (XY scanning range) are indicated.
`
`[0039] After indicating the measurement ranges and initializing the
`position of the sample stage 30 at the upper end, laser light is made
`to scan in the XY direction so that the XY scanning range that has
`been indicated is scanned on the surface of the sample w by the
`horizontal deflection device 14a and the vertical deflection device
`14b (step 102). The received light quantity data, the color data, and
`the height data (Z direction location) for each picture element in
`the XY scanning range are respectively stored in the received light
`memory 51, the color memory 52, and the height memory 53 (step
`103).
`
`[0040] Next, the sample stage 30 is lowered by one pitch (one
`step) (step 104), and scanning with laser light is again carried out
`over the XY scanning range of the sample w (step 105). The new
`received light quantity data obtained at this time is compared with
`the past received light quantity data stored in the received light
`quantity memory 51 for each picture element (step 106). If the new
`received light quantity is greater than the past received light
`quantity (stored light quantity), then the stored data for the
`received light quantity data, the color data, and the height data are
`refreshed (step 107). If the new received light quantity is smaller
`than the