UNITED STATES PATENT AND TRADEMARK OFFICE
`
`____________________
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`____________________
`
`SAMSUNG ELECTRONICS CO., LTD
`Petitioners
`
`v.
`
`DEMARAY LLC
`Patent Owner
`
`____________________
`
`Patent No. 7,381,657
`____________________
`
`DECLARATION OF DR. VIVEK SUBRAMANIAN
`IN SUPPORT OF PETITION FOR INTER PARTES REVIEW
`OF U.S. PATENT NO. 7,381,657
`
`Samsung Electronics Co., Ltd. v. Demaray LLC
`Samsung Electronic's Exhibit 1002
`Exhibit 1002, Page 1
`
`

`

`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
`
`TABLE OF CONTENTS
`
`V.
`
`VI.
`
`INTRODUCTION .......................................................................................... 1
`I.
`BACKGROUND AND QUALIFICATIONS ................................................ 2
`II.
`III. MATERIALS REVIEWED ........................................................................... 5
`IV.
`PERSON OF ORDINARY SKILL IN THE ART AND THE TIME OF
`THE ALLEGED INVENTION .................................................................... 10
`TECHNICAL BACKGROUND .................................................................. 11
`A.
`Sputter Deposition .............................................................................. 11
`B.
`Reactive Sputter Deposition ............................................................... 14
`C.
`Power Supplies Used for Reactive Sputtering ................................... 15
`D.
`Filter(s) ............................................................................................... 19
`THE ’657 PATENT ...................................................................................... 29
`A.
`Description ......................................................................................... 29
`VII. OVERVIEW OF THE PRIOR ART ............................................................ 31
`A.
`Barber ................................................................................................. 31
`B.
`Hirose ................................................................................................. 38
`VIII. CLAIM CONSTRUCTION ......................................................................... 45
`IX.
`THE PRIOR ART DISCLOSES OR SUGGESTS ALL RECITED
`FEATURES OF CLAIMS 1-21 OF THE ’657 PATENT ............................ 46
`A.
`Barber in view of Hirose Discloses and/or Suggests the
`Limitations of Claims 2-4, 6, 8, 10-12, and 21 .................................. 46
`1.
`Claim 2 ..................................................................................... 46
`a)
`Claim 2[a] “A method of depositing an insulating
`film on a substrate, comprising:” ................................... 46
`Claim 2[b] “providing a process gas between a
`target and a substrate;” .................................................. 53
`
`b)
`
`i
`
`Ex. 1002, Page 2
`
`

`

`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
`
`c)
`
`d)
`
`(2)
`
`Claim 2[c] “providing pulsed DC power to the
`target through a narrow band rejection filter such
`that the voltage on the target alternates between
`positive and negative voltages;” .................................... 55
`(1)
`“providing pulsed DC power
`to
`the
`target…such that the voltage on the target
`alternates between positive and negative
`voltages;” ............................................................. 55
`[providing pulsed DC power to the target]
`“through a narrow band rejection filter [such
`that …]” ; ............................................................. 66
`Claim 2[d] “providing an RF bias that corresponds
`to the narrow band rejection filter to the substrate;
`and” ................................................................................ 93
`Claim 2[e] “providing a magnetic field to the
`target;” ........................................................................... 94
`Claim 2[f] “wherein an oxide material is deposited
`on the substrate, and the insulating film is formed
`by reactive sputtering in a mode between a metallic
`mode and a poison mode.” ............................................ 95
`Claim 3 ................................................................................... 108
`a)
`“The method of claim 2 wherein the target is a
`metallic target and the process gas includes
`oxygen.” ....................................................................... 108
`Claim 4 ................................................................................... 113
`a)
`“The method of claim 2 wherein the target is a
`metallic target and the process gas includes one or
`more of a set consisting of N2, NH3, CO, NO, CO2,
`halide containing gasses.” ............................................ 113
`Claim 6 ................................................................................... 113
`a)
`“The method of claim 2 wherein the magnetic field
`is provided by a moving magnetron.” ......................... 113
`
`e)
`
`f)
`
`2.
`
`3.
`
`4.
`
`ii
`
`Ex. 1002, Page 3
`
`

`

`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
`
`
`5.
`
`
`
`Claim 8 ................................................................................... 114
`a)
`“The method of claim 2 wherein the process gas
`includes a mixture of Oxygen and Argon.” ................. 114
`Claim 10 ................................................................................. 115
`a)
`“The method of claim 2 wherein the process gas
`further includes nitrogen.” ........................................... 115
`Claim 11 ................................................................................. 116
`a)
`“The method of claim 2 wherein providing pulsed
`DC power to a target includes providing pulsed DC
`power to a target which has an area larger than that
`of the substrate.” .......................................................... 116
`Claim 12 ................................................................................. 117
`a)
`“The method of claim 2, further
`including
`uniformly sweeping the target with a magnetic
`field.” ........................................................................... 117
`Claim 21 ................................................................................. 118
`a)
`“The method according to claim 2, wherein the RF
`frequency is about 2 MHz.” ......................................... 118
`Barber in view of Hirose and Dogheche Discloses Claims 5 and
`7 ........................................................................................................ 120
`1.
`Claim 5 ................................................................................... 120
`a)
`“The method of claim 2 wherein the target is a
`ceramic target.” ............................................................ 120
`Claim 7 ................................................................................... 124
`a)
`“The method of claim 2 further including holding
`the temperature of the substrate substantially
`constant.” ..................................................................... 124
`Barber in view of Hirose and Safi Discloses and/or Suggests the
`Limitations of Claim 9 ..................................................................... 128
`1.
`Claim 9 ................................................................................... 128
`
`6.
`
`7.
`
`8.
`
`9.
`
`B.
`
`C.
`
`2.
`
`
`
`
`
`iii
`
`
`
`Ex. 1002, Page 4
`
`

`

`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
`
`
`a)
`
`
`
`D.
`
`E.
`
`“The method of claim 2 wherein the Oxygen flow
`is adjusted to adjust the index of refraction of the
`film.” ............................................................................ 128
`Barber in view of Hirose and Aokura Discloses and/or Suggests
`the Limitations of Claims 12 and 13 ................................................ 131
`1.
`Claims 12 and 13.................................................................... 131
`a)
`[12] “The method of claim 2, further including
`uniformly sweeping the target with a magnetic
`field.” ........................................................................... 131
`[13] “The method of claim 12 wherein uniformly
`sweeping the target with a magnetic field includes
`sweeping a magnet in one direction across the target
`where the magnet extends beyond the target in the
`opposite direction.” ...................................................... 131
`Barber in view of Hirose and Segal Discloses and/or Suggests
`the Limitations of Claims 14-18....................................................... 139
`1.
`Claims 14 and 15.................................................................... 139
`a)
`[14] “The method of claim 2 wherein the target is
`an alloyed target.” ........................................................ 139
`[15] “The method of claim 14 wherein the alloyed
`target includes one or more rare-earth ions.” .............. 139
`Claim 16 ................................................................................. 145
`a)
`“The method of claim 14 wherein the alloyed target
`includes Si and Al.” ..................................................... 145
`Claim 17 ................................................................................. 145
`a)
`“The method of claim 14 wherein the alloyed target
`includes one or more elements taken from a set
`consisting of Si, Al, Er, Yb, Zn, Ga, Ge, P. As, Sn,
`Sb, Pb, Ag, Au, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Th,
`Dy Ho, Tm, and Lu.” ................................................... 145
`Claim 18 ................................................................................. 146
`
`b)
`
`b)
`
`2.
`
`3.
`
`4.
`
`
`
`
`
`iv
`
`
`
`Ex. 1002, Page 5
`
`

`

`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
`
`
`a)
`
`
`
`F.
`
`G.
`
`H.
`
`“The method of claim 14 wherein the alloyed target
`is a tiled target.” ........................................................... 146
`Barber in view of Hirose, Segal, and Sakawaki Discloses and/or
`Suggests the Limitations of Claim 19 .............................................. 150
`1.
`Claim 19 ................................................................................. 150
`a)
`“The method of claim 18 wherein each tile of the
`tiled target is formed by prealloy atomization and
`hot isostatic pressing of a powder.” ............................. 150
`Barber in view of Hirose and Sill Discloses and/or Suggests the
`Limitations of Claim 20 ................................................................... 157
`1.
`Claim 20 ................................................................................. 157
`a)
`“The method according to claim 2, wherein the
`narrow band-rejection filter has a bandwidth of
`about 100 kHz.” ........................................................... 157
`Barber in view of Hirose and Sellers Discloses and/or Suggests
`the Limitations of Claim 1 ............................................................... 162
`1.
`Claim 1 ................................................................................... 162
`a)
`Claim 1[a] “A method of depositing a film on an
`insulating substrate, comprising:” ............................... 162
`Claim 1[b] “providing a process gas between a
`conductive target and the substrate;” ........................... 163
`Claim 1[c] “providing pulsed DC power to the
`target through a narrow band rejection filter such
`that the target alternates between positive and
`negative voltages;”....................................................... 164
`Claim 1[d] “providing an RF bias at a frequency
`that corresponds to the narrow band rejection filter
`to the substrate;” .......................................................... 164
`Claim 1[e] “providing a magnetic field to the target;
`and” .............................................................................. 165
`
`b)
`
`c)
`
`d)
`
`e)
`
`
`
`
`
`v
`
`
`
`Ex. 1002, Page 6
`
`

`

`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
`
`
`f)
`
`I.
`
`
`
`Claim 1[f] “reconditioning the target; wherein
`reconditioning
`the
`target
`includes
`reactive
`sputtering in the metallic mode and then reactive
`sputtering in the poison mode.” ................................... 165
`Each of the Above Prior Art Combinations in view of Belkind
`Discloses and/or Suggests the Claims of the ’657 Patent ................ 177
`1.
`Barber in view of Hirose and Belkind Discloses and/or
`Suggests Limitations of Claims 2-4, 6, 8, 10-12, and 21 ...... 184
`Barber in view of Hirose, Belkind, and Dogheche
`Discloses and/or Suggests Limitations of Claims 5 and 7 ..... 185
`Barber in view of Hirose, Belkind, and Safi Discloses
`and/or Suggests Limitations of Claim 9 ................................ 185
`Barber in view of Hirose, Belkind, and Aokura Discloses
`and/or Suggests Limitations of Claims 12 and 13 ................. 186
`Barber in view of Hirose, Belkind, and Segal Discloses
`and/or Suggests Limitations of Claims 14-18 ....................... 186
`Barber in view of Hirose, Belkind, Segal, and Sakawaki
`Discloses and/or Suggests Limitations of Claim 19 .............. 187
`Barber in view of Hirose, Belkind, and Sill Discloses
`and/or Suggests Limitations of Claim 20 .............................. 187
`Barber in view of Hirose, Belkind, and Sellers Discloses
`and/or Suggests Limitations of Claim 1 ................................ 187
`CONCLUSION ........................................................................................... 189
`
`2.
`
`3.
`
`4.
`
`5.
`
`6.
`
`7.
`
`8.
`
`X.
`
`
`
`
`
`
`
`vi
`
`
`
`Ex. 1002, Page 7
`
`

`

`
`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
`
`
`
`I, Vivek Subramanian, declare as follows:
`
`I.
`
`INTRODUCTION
`I have been retained as an independent expert consultant in this
`1.
`
`proceeding before the United States Patent and Trademark Office (“PTO”) regarding
`
`U.S. Patent No. 7,381,657 (“the ’657 patent”) (Ex. 1001).1 I have been asked to
`
`consider whether prior art references disclose or suggest the features recited in
`
`claims 1-21 (“the challenged claims”) of the ’657 patent. My opinions are set forth
`
`below.
`
`2.
`
`I am being compensated at a rate of $650/hour for my work in this
`
`proceeding. My compensation is in no way contingent on the nature of my findings,
`
`the presentation of my findings in testimony, or the outcome of this or any other
`
`proceeding. I have no other interest in this proceeding.
`
`
`
`
`
`
`
`
`
`
` In this Declaration, I refer to exhibits that I understand are to be attached to the
`
` 1
`
`petition for Inter Partes Review of the ’657 patent.
`
`
`
`
`
`1
`
`
`
`Ex. 1002, Page 8
`
`

`

`
`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
`
`
`II. BACKGROUND AND QUALIFICATIONS
`3. My qualifications are stated more fully in my curriculum vitae, which
`
`is attached as Ex. 1003. Below is a summary of my education, work experience, and
`
`other qualifications.
`
`4.
`
`I received a bachelor’s degree summa cum laude in electrical
`
`engineering from Louisiana State University in 1994. I received M.S. and Ph.D.
`
`degrees in electrical engineering, in 1996 and 1998, respectively, from Stanford
`
`University.
`
`5.
`
`Throughout the course of my education, including my B.S., M.S., and
`
`Ph.D. degrees, I was involved in deposition technology for thin films, including
`
`sputtering technology, and more specifically reactive sputter technology. For
`
`example, during my PhD, I performed research on the deposition of films of metals,
`
`oxides, and semiconductors via sputtering, including Aluminum, Tungsten,
`
`Tungsten Silicide, Titanium, Titanium Nitride, and Silicon Dioxide.
`
`6.
`
`After completing my Ph.D.,
`
`I held multiple appointments
`
`simultaneously between 1998 and 2000. I served as a Consulting Assistant Professor
`
`in the Electrical Engineering Department of Stanford University. I also served as a
`
`Visiting Research Engineer in the Department of Electrical Engineering and
`
`Computer Sciences at the University of California, Berkeley, where my research
`
`2
`
`
`
`
`Ex. 1002, Page 9
`
`

`

`
`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
`
`
`focused on 25nm metal oxide semiconductor field effect transistor (MOSFET)
`
`design and fabrication. I worked on technologies for high-performance transistor
`
`processes, and I published several papers as a direct outcome of this technology
`
`development. As part of my research work both at Berkeley and at Stanford during
`
`this period, I performed research on the use of sputtering and reactive sputtering.
`
`7.
`
`During the same period, I also served as a founder and member of
`
`technical staff of Matrix Semiconductor, a startup company that developed high-
`
`density nonvolatile memories. At Matrix, I led much of the process development
`
`effort to develop a new type of memory. We made extensive use of sputtering and
`
`reactive sputtering in this work, and I led much of the process development in this
`
`regard. Matrix was subsequently acquired by Sandisk.
`
`8.
`
`In 2000, I became an assistant professor at the University of California,
`
`Berkeley in the Department of Electrical Engineering & Computer Sciences. In
`
`2005, I was promoted to the position of tenured Associate Professor, and in 2011, I
`
`was promoted to full Professor. In 2018, I became a full Professor of
`
`Microtechnology at EPFL in Switzerland, where I lead the Laboratory for Advanced
`
`Fabrication Technologies (LAFT). The lab focuses on the development and
`
`application of advanced additive fabrication techniques for realizing precision
`
`
`
`
`
`3
`
`
`
`Ex. 1002, Page 10
`
`

`

`
`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
`
`
`microelectronic and electromechanical systems. As of 2020, I have completed my
`
`move to EPFL and have therefore converted to an adjunct appointment at Berkeley.
`
`9.
`
`Starting in 2004, I was a founding technical advisor for Kovio. Under
`
`my leadership, Kovio re-focused on RFID and RF anti-theft systems. I led the
`
`development of Kovio’s first commercial RFID tag product, including the design of
`
`both the tag and the reader. My involvement with Kovio ended with Kovio’s
`
`acquisition by Thin Film Electronics ASA, but Kovio continues to focus on this area.
`
`10.
`
`I co-founded Locix Inc. in 2014. Locix develops and sells a range of
`
`wireless-enabled products, including proprietary Wi-Fi-based RF localization
`
`systems and sub-GHz low-power wireless sensor networks. As CTO of Locix, I led
`
`the development of the entire Locix RF product portfolio. I continue to be involved
`
`with Locix on a regular basis.
`
`11.
`
`I have authored or co-authored over 200 technical papers in
`
`international journals and conferences and have been named an inventor or co-
`
`inventor on more than 50 patents, many of which cover aspects of thin film
`
`deposition and devices based on the same, including use of sputtering and reactive
`
`sputtering in this regard.
`
`
`
`
`
`
`
`
`
`4
`
`
`
`Ex. 1002, Page 11
`
`

`

`
`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
`
`
`III. MATERIALS REVIEWED
`13. The opinions contained in this Declaration are based on the documents
`
`I reviewed, my professional judgment, as well as my education, experience, and
`
`knowledge regarding systems and processes for sputtering-based deposition of films
`
`on substrates.
`
`14.
`
`In forming my opinions expressed in this Declaration, I reviewed the
`
`following materials:
`
`Ex. 1001
`
`U.S. Patent No. 7,381,657
`
`Ex. 1004
`
`Prosecution History of U.S. Patent No. 7,381,657
`
`Ex. 1005
`
`U.S. Patent No. 6,342,134 to Barber et al.
`
`Ex. 1006
`
`U.S. Patent No. 6,485,602 to Hirose
`
`Ex. 1007
`
`U.S. Patent No. 5,651,865 to Sellers
`
`Ex. 1008
`
`A. Belkind et al., Pulsed-DC reactive sputtering of dielectrics:
`Pulsing parameter effects (2000)
`
`Ex. 1009
`
`U.S. Patent No. 4,464,223 to Gorin
`
`Ex. 1010
`
`U.S. Patent No. 6,132,564 to Licata
`
`Ex. 1011
`
`U.S. Patent No. 5,942,089 to Sproul
`
`Ex. 1012
`
`U.S. Patent No. 6,352,629 to Wang
`
`Ex. 1013
`
`S. Gibilisco, Handbook of Radio & Wireless Technology
`(1999)
`
`
`
`
`
`5
`
`
`
`Ex. 1002, Page 12
`
`

`

`
`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
`
`
`
`Ex. 1014
`
`J. Joo, Low-temperature polysilicon deposition by ionized
`magnetron sputtering (2000)
`
`Ex. 1015
`
`B. Chapman, Glow Discharge Processes
`
`Ex. 1016
`
`U.S. Patent No. 4,579,618 to Celestino
`
`Ex. 1017
`
`International Publication No. WO 02/23588 to Quon
`
`Ex. 1018
`
`International Publication No. WO 01/6300 to Johnson
`
`Ex. 1019
`
`U.S. Patent No. 6,695,954 to Hong
`
`Ex. 1020
`
`U.S. Patent No. 6,153,068 to Ohmi
`
`Ex. 1021
`
`U.S. Patent No. 4,846,920 to Keller
`
`Ex. 1022
`
`U.S. Patent No. 6,911,351 to Kidoguchi
`
`Ex. 1023
`
`U.S. Patent No. 5,302,882 to Miller
`
`Ex. 1024
`
`Ex. 1025
`
`Ex. 1026
`
`Ex. 1027
`
`Pinnacle Plus+ 10KW (325-650 Vdc) Master/Slave AE Bus,
`DeviceNet, MDXL User, UHF Output User Manual (March
`2005)
`The Advanced Energy MDX Magnetron Drive, Advanced
`Energy Industries, Inc. (March 1993)
`Pinnacle 10x6 kW DeviceNet, MDXL User 5702063-C, User
`Manual, (May 2000)
`U.S. Patent Publication No. 2002/0027249 A1 to Takemura
`
`Ex. 1028
`
`U.S. Patent Publication No. 2002/0144889 to Tao
`
`Ex. 1029
`
`Ex. 1030
`
`E. Dogheche, Growth and optical characterization of
`aluminum nitride thin films deposited on silicon by radio-
`frequency sputtering, Applied Physics Letters (1999)
`U.S. Patent No. 6,506,686 to Masuda
`
`
`
`
`
`6
`
`
`
`Ex. 1002, Page 13
`
`

`

`
`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
`
`
`
`K. Nam, A study on the high rate deposition of CrN films with
`x controlled microstructure by magnetron sputtering, Surface
`& Coatings Technology (2000)
`D. Mattox, Handbook of Physical Vapor Deposition (PVD)
`Processing – Film Formation, Adhesion, Surface Preparation
`and Contamination Control (1998)
`U.S. Patent No. 5,830,327 to Kolenkow
`
`Ex. 1031
`
`Ex. 1032
`
`Ex. 1033
`
`Ex. 1034
`
`U.S. Patent Publication No. 2001/0041252 to Laird
`
`Ex. 1035 M. Ruske, Properties of SiO2 and Si3N4 layers deposited by
`MF twin magnetron sputtering using different target
`materials, Thin Solid Films (1999)
`Ex. 1036 W. Sproul, High-rate reactive DC magnetron sputtering of
`oxide and nitride superlattice coatings (1998)
`U.S. Patent Publication No. 2003/0029563 to Kaushal
`
`Ex. 1037
`
`Ex. 1038
`
`U.S. Patent No. 6,627,323 to Nagaraj
`
`Ex. 1039
`
`Ex. 1040
`
`Ex. 1041
`
`Ex. 1043
`Ex. 1044
`
`I. Safi, A novel reactive magnetron sputtering technique for
`producing insulating oxides of metal alloys and other
`compound thin films (2000)
`U.S. Patent No. 6,001,227 to Pavate
`
`S. Wolf et al., Silicon Processing for the VLSI Era, Vol. 1
`(2000)
`
`U.S. Patent Publication No. 2001/0031383 to Sakawaki
`U.S. Patent No. 4,895,631 to Wirz
`
`Ex. 1045
`
`U.S. Patent No. 7,041,391 to Ando
`
`Ex. 1046
`
`U.S. Patent No. 6,984,550 to Yamazaki
`
`Ex. 1047
`
`A. Billard, Low-frequency modulation of pulsed d.c. or r.f.
`discharges for controlling the reactive magnetron sputtering
`process, Surface & Coatings Technology (1996)
`
`
`
`
`
`7
`
`
`
`Ex. 1002, Page 14
`
`

`

`
`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
`
`
`
`P. Kelly, The deposition of aluminum oxide coatings by
`reactive unbalanced magnetron sputtering (1996)
`U.S. Patent No. 7,247,227 to Hanson
`
`Ex. 1048
`
`Ex. 1049
`
`Ex. 1050
`
`U.S. Patent No. 7,391,072 to Forbes
`
`Ex. 1051
`
`International Publication No. WO 96/06203 to Seeley
`
`Ex. 1054
`
`Ex. 1056
`
`Ex. 1057
`
`Ex. 1058
`
`Ex. 1059
`
`
`Ex. 1060
`Ex. 1061
`Ex. 1062
`
`
`Ex. 1063
`Ex. 1065
`
`Ex. 1067
`
`Ex. 1068
`
`Ex. 1069
`
`U.S. Patent No. 5,331,218 to Moody
`
`U.S. Patent No. 6,409,965 to Nagata
`
`U.S. Patent No. 6,284,110 to Sill
`
`U.S. Patent No. 5,148,133 to Zennamo
`
`P. Kelly et al., Reactive pulsed magnetron sputtering
`process for alumina films (2000)
`
`U.S. Patent Application No. 09/145,323 to Miller et al.
`U.S. Patent No. 4,960,651 to Pettigrew
`Pinnacle 20 kW DeviceNet, MDXL User 5702199-A, User
`Manual, (April 2001)
`
`U.S. Patent No. 6,010,583 to Annavarapu
`Pinnacle Plus Pulsed DC Power Supply Data Sheet (April
`1999)
`Pinnacle Plus 10kW User 5702269-B, User Manual, (June
`2002)
`Japanese Patent Publication No. JPH10102247A to Aokura
`and certified English translation of JPH10102247A
`
`U.S. Patent Application Publication US 2001/0047838 to
`Segal
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` also considered any other documents and materials I refer to in this Declaration.
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`8
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`Ex. 1002, Page 15
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`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
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`15. My opinions contained in this declaration are based on the documents
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`I reviewed and my knowledge and professional judgment. My opinions have also
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`been guided by my appreciation of how a person of ordinary skill in the art would
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`have understood the state of the art, the prior art, and the claims and the specification
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`of the ’657 patent at the time of the alleged invention, which I discuss below.
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`16.
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`I have been asked to initially consider that the time of the alleged
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`invention of the ’657 patent was around 2002 (including and up to March 16, 2002),
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`which corresponds to the filing date of the parent application for ‘657 patent. (Ex.
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`1001, Cover.)
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`17. Based on my experience and expertise, it is my opinion that certain
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`references disclose and/or suggest all the features recited in challenged claims of the
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`’657 patent, as I discuss in detail below.
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`Ex. 1002, Page 16
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`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
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`IV. PERSON OF ORDINARY SKILL IN THE ART AND THE TIME OF
`THE ALLEGED INVENTION
`I am familiar with the level of ordinary skill in the art regarding the
`18.
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`’657 patent as of what I understand to be around the claimed priority date of March
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`16, 2002. Considering the ’657 patent, the technology, the educational level and
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`experience of workers in the field relating to the patent, and problems and solutions
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`in that field (e.g., processes and related systems for sputtering deposition of films on
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`substrates), and drawing on my own experience, I believe a person of ordinary skill
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`in the art at the time of the alleged invention (around March 16, 2002) would have
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`had a Master’s degree in Electrical Engineering or Material Science (or an equivalent
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`subject) and at least two years of relevant experience, or a Bachelor’s degree in
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`Electrical Engineering or Material Science (or an equivalent subject) and at least
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`four years of relevant experience. Relevant experience in the context of the ’657
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`patent refers to experience with sputtering deposition of films on substrates, as
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`referenced in the ’657 patent. (See ’657 patent (Ex. 1001) at 1:10-14, 2:45-47.)
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`19. My opinions in this Declaration regarding the ’657 patent and the
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`prior art (including the state of the art) are from the perspective of one of ordinary
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`skill in the art as I defined above, during the relevant timeframe (e.g., the time of
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`the alleged invention), which I discussed above as being around March 16, 2002.
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`Ex. 1002, Page 17
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`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
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`V. TECHNICAL BACKGROUND
`20. Below, I present a brief overview of certain aspects of systems and
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`processes relating to the sputtering deposition of films on substrates prior to and at
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`the time of the alleged invention for the ’657 patent. The functionalities and
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`concepts I describe below in this technical background section reflect the state of the
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`art that a person of ordinary skill in the art would have had knowledge of and
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`understood prior to and at the time of the alleged invention of the ’657 patent. I rely
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`on, and incorporate as applicable (even if not expressly mentioned below in Section
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`IX), the following disclosures and opinions to support my opinions in this
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`Declaration, including those opinions relating to how the prior art discloses and/or
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`suggests the challenged claims of the ’657 and how and why a person of ordinary
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`skill in the art would have been motivated to consider and combined the disclosures
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`and suggestions from that prior art as I explain below in Section IX. The concepts
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`below would have been within the knowledge and mindset of a person of ordinary
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`skill in the art at the time.
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`Sputter Deposition
`A.
`21. Sputter deposition, which was also often known as just “sputtering,” is
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`a film deposition technique that takes place in a plasma process chamber, where a
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`target is bombarded with gas ions, such as noble/inert gas (e.g., argon) ions. (Ex.
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`11
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`Ex. 1002, Page 18
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`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
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`1007, 1:19-21; see also Ex. 1032, 6; Ex. 1041, 5-10 (discussions regarding the
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`physics of sputtering).) Those of ordinary skill in the art understood that ionized gas
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`was (and is) also known as a plasma. (Ex. 1041, 3-4 (disclosing that a plasma is a
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`“partially ionized gas”).) In a sputtering process, the gas ion bombardment
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`mechanically frees atoms of the target material, and the target material is then
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`deposited, forming a film on a substrate placed in the plasma chamber. (Ex. 1007,
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`1:21-23.) Argon was known generally as the gas of choice for sputtering processes
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`because “it is easily available (hence low in cost), and its mass is a good match to
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`those of the elements most frequently sputtered (Al, Cu, Si, and Ti).” (Ex. 1041, 8;
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`see also Ex. 1032, 7 (“typically argon…is used for inert gas sputtering since it is a
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`relatively inexpensive inert gas”).)
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`22. Many types of target materials (e.g., element, alloy, or compound) were
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`known and available for sputter deposition processes, which allowed for diverse
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`fields of applications. (Ex. 1032, 18 (disclosing that one of the advantages of
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`sputtering deposition is that the method is capable of sputtering “element, alloy, or
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`compound” materials); see also id., 19-20 (disclosing a list of exemplary target
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`materials available for sputtering for various fields of applications, e.g.,
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`semiconductor devices, optical coatings, and wear/erosion-resistant coatings …
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`Ex. 1002, Page 19
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`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
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`etc.); Ex. 1011, 3:58-60). For example, single element targets made of aluminum or
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`silicon were well known before March 2002. (See e.g., Ex. 1005, 6:42-50.) It was
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`also well known that a target may be made of an alloy, which contained, for example,
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`both aluminum and silicon. (See e.g., Ex. 1034, ¶[0027].) It was also known that
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`an alloy target may also include rare-earth ions, such as yttrium. (Ex. 1036, 6; Ex.
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`1069, ¶¶[0041]-[0048].) Furthermore, oxides of yttrium-containing alloy such, as
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`yttria-stabilized zirconia (YSZ), were known to be widely used as a thermal-barrier
`
`coating for its high-temperature capability. (Ex. 1038, 1:30-35.) Also, a person of
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`ordinary skill in the art would have appreciated and known that an aluminum
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`oxynitride layer (AlNxOy), deposited using a “reactive” sputtering technique (which
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`I discuss in the next section below), was used in manufacturing displays, particularly
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`useful for “blocking moisture and oxygen” and “to prevent impurity…from
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`entering” semiconductor devices in the displays and the film also has other useful
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`properties including “a high thermal conductivity, a heat radiation effect, and a very
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`high light transmitting property.” (Ex. 1046, 19:34-39.)
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`23. Typical sputtering systems were also known to include a substrate
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`holder, upon which a substrate is positioned to face the target for film deposition.
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`(See, e.g., Ex. 1005, FIG. 2 (disclosing a substrate platen 115, upon which a substrate
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`Ex. 1002, Page 20
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`Declaration of Dr. Vivek Subramanian
`U.S. Patent No. 7,381,657
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`110 is positioned).) A wide range of substrate materials were known to be used,
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`including, for example, silicon, quartz, sapphire, aluminum oxide (id., 3:63-65), or
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`a piece of steel (Ex. 1011, 3:56-58). Additionally, those of ordinary skill in the art
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`were aware, would have appreciated, and understood the benefits of monitoring and
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`controlling the temperature of the substrate (via for example temperature control
`
`circuits or the like) to obtain a high-quality sputter deposited film (Ex. 1029, 2) and
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`that the temperature can be controlled with a high accuracy (Ex. 1030, 1:33-40
`
`(disclosing temperature control within a plasma environment with an “accuracy of
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`± 5 °C), 1:60-67 (disclosing temperature control within a plasma environment with
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`“a high accuracy of ± 2 °C).)
`
`B. Reactive Sputter Deposition
`24. A reactive sputtering process differs from the above discussed
`
`sputtering process as it introduces one or more reactive gases (e.g., oxygen