Artisan Technology Group is your source for quality
`
`
`
`new and certified-used/pre-owned
`
`SERVICE CENTER REPAIRS
`
`Experienced engineers and technicians on staff
`
`
`
`
`
`
`at our full-service, in-hOuse repair center
`
`WE BUY USEO EQUIPMENT
`
`
`Sell your excess, underutilized, and idle used equipment
`
`
`We also offer credit tor buy-backs and trade-ins
`www.artisantg.com/WeBuyEquipment
`-'
`
`equipment l
`
`Instr a �e,a,• REMOTE INSPECTION
`LOOKING FOR MORE INFORMATION?
`
`
`Visit us on the web at www.artisantg.com" tor more
`
`
`
`
`
`Remotely inspect equipment before purChasing with
`
`
`our interactive website at www.instraview.com-'
`
`
`
`information on price quotations, drivers. technical
`
`
`specifications, manuals, and documentation
`
`
`
`111: (888) 88·S0URCE Contact I sales@artisantt,com I www.artisantg.com
`
`
`
`
`
`Samsung Electronics Co., Ltd. v. Demaray LLC
`Samsung Electronic's Exhibit 1025
`Exhibit 1025, Page 1
`
`

`

`THE
`ADVANCED ENERGY*
`MDX MAGNETRON DRIVE
`
`
`
`Version: domestic input voltage (200/208 V ac)
`
`
`ADVANCED ENERGY
`INDUSTRIES, INC
`
`1600 Prospect Parkway
`Fort Collins, Colorado 80525
`(303)221-4670
`Telex #45-0938
`
`PN: 5700092-D
`March 1993
`
`Artisan Technology Group- Quality Instrumentation ... Guaranteed | (888) 88-SOURCE| www.artisantg.com
`
`Page 2 of 245
`
`Ex. 1025, Page 2
`
`Ex. 1025, Page 2
`
`

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`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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`Page 3 of 245
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`Ex. 1025, Page 3
`
`

`

`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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`Page 4 of 245
`
`Ex. 1025, Page 4
`
`

`

`
`
`SAFETY
`
`WARNING
`
`SAFE OPERATING PROCEDURES AND PROPER USE OF THE
`EQUIPMENT ARE THE RESPONSIBILITY OF THE USER OF THIS SYSTEM.
`
`Advanced EnergyIndustries, Inc., provides information on its products and
`associated harzards, but it assumes no responsibility for the after-sale
`operation of the equipment or the safety practices of the owneror operator.
`
`This equipment producespotentially lethal high-voltage and high-current
`energy. You should read this manual and understandits contents before you
`attempt to hook up or operate the equipment it describes. Follow all safety
`precautions. Never defeat interlocks or grounds.
`
`YOU
`
` DANGER! All personnel who workwith or
`SHOULD KNOW...
`
`whoare exposed to this equipment must
`take precautions to protect themselves
`against serious or possibly fatal bodily
`injury.
`
`DO NOT BE CARELESS AROUND THIS EQUIPMENT.
`
`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE| www.artisantg.com
`
`Page 5 of 245
`
`Ex. 1025, Page 5
`
`Ex. 1025, Page 5
`
`

`

`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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`Page 6 of 245
`
`Ex. 1025, Page 6
`
`

`

`
`
`CONTENTS
`
`INTRODUCTION
`‘Read This Page! ............ cee eee eee ee ee eee eens vii
`Overview of the Manual. .......... 0. cece eee eee eee eens ix
`interpreting the Manual ................. 0c eee eee eee xi
`
`PART | GETTING TO KNOW YOUR MDX MAGNETRONDRIVE
`
`1. WHATIT IS
`Table of Contents ....... 2.2... cee ee cee eee eee eee 1-3
`General Description... ...... ccc cece ee ce eee eee nees 1-5
`Typical Applications... 12... 2... 0... eee eee cece eee eee 1-9
`Specifications... 0... cece cece eee ee eee e teen eee 1-17
`
`2. HOW IT WORKS
`Table of Contents .......... cc ccc ec cee ee eee ee eee eee 2-1
`Theory of Operation............. 00.0. cc cece eee eee eee 2-3
`COMNECHOIS. .. 0 eee cee eee ee ence eee eneees 2-7
`Status Information .......... 0... cece cece eee eee cece nee 2-13
`Interfacing ... 02.0... ee cc eee eee cee etree eens 2-25
`
`PART Il OPERATING YOUR MDX MAGNETRONDRIVE
`
`3. PREPARING FOR USE
`Table of Contents ......... 0. cece cece eee cere eeee 3-3
`Setting Up... ccc ccc eee eee eee teeeneee 3-5
`Making Rear Panel Connections. ...............00.ee 000s 3-13
`First-time Operation. ........ 0... cece eee eee ee eee eens 3-31
`
`4. CHOOSING MODES/SETTINGS
`Table of Contents ............ 20... cece ee ee ee eens 4-1
`Output Regulation ....... 0... cece ee cece eect renee 4-5
`Program Mode... ....... cece eee cee eee ence eee eens 4-5
`Lock Mode... 2.0... cece cece cee eee cee eee eee 4-19
`REMOtES. 0... cece cee eee eect ee ee ence eneees 4-21
`Tap Selection. ....... 0... cece cee eee cece eee eee 4-27
`Impedance Options ....... 0.0... eee eee ee eee 4-45
`Line Voltage Changes .......... cece cece eee eee e ee eeee 4-47
`Master/Slave Operation.............0 2c eee ee eee eee eee 4-49
`
`5. USING THE SPECIAL FEATURES/OPTIONS
`Table of Contents .......... cece eee e cece e eee eee eees 5-1
`ARC-CHECK™, 20.e cece eee e eens 5-3
`Fast Ramp ....... ccc ce cece cee cece ete e eee eeeeeeeens 5-5
`Contactor Hold... 0... ccc eee eens 5-7
`
`Artisan Technology Group- Quality Instrumentation ... Guaranteed | (888) 88-SOURCE| www.artisantg.com
`
`Page 7 of 245
`
`Ex. 1025, Page 7
`
`Ex. 1025, Page 7
`
`

`

`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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`Page 8 of 245
`
`Ex. 1025, Page 8
`
`

`

`
`
`INTRODUCTION
`
`READ THIS PAGE!
`
`We know that some of you want to start the magnetron drive now and that
`you don't feel you have time to read the entire manual. Belowis a list of the
`subsections you will need to read in order to get started. We also think that
`youwill find Overview of the Manual(pageix) and Interpreting the Manual
`(page xi) useful. They are very short sections, and are intended to guide you
`through the manual.
`
`Overview of the Manual explains the organization of the manual, so that you
`can more quickly find what you need. Interpreting the Manual explains the
`type conventions (whatit means when a word appears in capitalizeditalic
`type, for instance), and whatthe five icons (symbols) mean.
`
`Physical specifications
`e
`e Connectors
`e
`§6Setting up
`e
`§©Start-up procedures
`e Control panel switches and LEDs
`e
`Line voltage changes
`
`page 1-19
`page 2-7
`page 3-5
`page 3-29
`page 2-15, 2-17, 2-21, 2-25
`page 4-47
`
`Artisan Technology Group- Quality Instrumentation ... Guaranteed | (888) 88-SOURCE| www.artisantg.com
`
`Page 9 of 245
`
`Ex. 1025, Page 9
`
`vii
`
`Ex. 1025, Page 9
`
`

`

`
`
`INTRODUCTION
`
`OVERVIEW OF THE MANUAL
`
`The main table of contents is a general outline of major topics covered in the
`manual. It contains only the main headings within each chapter so that you
`can skim it and get a general idea of what is contained here, without having to
`look at a lot of headings. When you tum to oneofthe six chapters, youwill
`find a detailed table of contents that lists every headingin that particular
`chapter. This will help you to quickly decide which page contains the
`information you are looking for. Throughout the manual, the chaptertitles are
`printed at the top rnght-hand comerof each odd-numbered page.
`
`Part | contains two chapters: WhatIt Is, and How It Works. WhatIt Is gives a
`general overview of the MDX magnetrondrive,its various features and
`configurations, and typical applications. A detailed description of the functional
`specifications anda list of the physical specifications are also included.
`
`How It Works contains a functional block diagram and important information
`on connections,includinglistings of all input, output, and reference pins.
`Status indicators and messages (and suggested responses) are briefly
`discussed, and functions that are available through eachof the interfaces are
`described. The transmission parameters for the Host (RS-232) port are also
`includedin this section, as are several tables detailing recognized commands
`and explaining possible responses to those commands.
`
`Part Il consists of three chapters: Preparing for Use, Choosing
`Modes/Settings, and Using the Special Features. Preparing for Use provides
`information on connection and wiring options, spacing and cooling
`requirements, and start-up procedures.
`
`Choosing Modes/Settings contains information on selecting one of the three
`methods of output regulation: power, current, or voltage. The subsection on
`“program” mode describes the target controls and various programmable
`setpoints and timers. Accessing functions through the analog/digital (“User”)
`interface is discussed. Step-by-step procedures are provided for changing
`taps andline voltage settings. Also included is an explanation of the
`impedance options and a table that shows the maximum output current
`for various MDX models. Special considerations for systems that use both
`“master” and “slave” MDX units are briefly examined.
`
`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE| www.artisantg.com
`
`Page 10 of 245
`
`Ex. 1025, Page 10
`
`ix
`
`Ex. 1025, Page 10
`
`

`

`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
`
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`Page 11 of 245
`
`Ex. 1025, Page 11
`
`

`

`INTRODUCTION
`
`
`INTERPRETING THE MANUAL
`
`Type Conventions
`
`To help you quickly pick out what is being discussed, the manual presents
`certain words and phrasesin type that is different from the rest of the text.
`
`Pin and line names appearin capitalized italics (RAMP IN.A). Labels that are
`on the MDX (Switches,indicators, etc.) generally appear in boldface capital
`letters (MODIFY). Exceptions are port names, which simply begin with a
`capital letter (User port).
`
`Specific messagesthat will appear on the control panel meters are indicated
`by quotation marks (“E-02"). Functions are printed in boldface lowercase
`letters (contactor hold).
`
`How to Use the Symbols
`
`YOu
`SHOULD KNOW...
`
` Safety notes. Important notes conceming potential harm to
`people.
`
`
`
`An YOU
`
`
`SHOULD KNOW...
`
`
`Warning notes. Important notes concemi
`9
`Pe
`this unit or associated equipment.
`
`nape
`
`ssible harm to
`
`Flo Operating notes. More thoughts on howto use the extended
`
`features provided.
`
`Artisan Technology Group- Quality Instrumentation ... Guaranteed | (888) 88-SOURCE| www.artisantg.com
`
`Page 12 of 245
`
`Ex. 1025, Page 12
`
`xi
`
`Ex. 1025, Page 12
`
`

`

`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
`
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`Page 13 of 245
`
`Ex. 1025, Page 13
`
`

`

`PART |
`
`GETTING TO KNOW YOUR
`
`MDX MAGNETRON DRIVE
`
`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE| www.artisantg.com
`
`Page 14 of 245
`
`Ex. 1025, Page 14
`
`Ex. 1025, Page 14
`
`

`

`General Description... 2... 2... cece ee ee ee eee 1-5
`Output Impedance Range ..............-.--.+5- 1-5
`Output Regulation................ 2.2 eee eee eee 1-5
`Interfaces ...... 0... eee cece eee ee eee 1-5
`
`Microprocessor AdvantageS..............20.000- 14
`DisplayS ...... 0.2... cee eee cee eee eee 14
`Built-in Protection ........... 00... eee eee ee 14
`
`Arc-suppression Circuitry ................002000- 14
`Sophisticated Options. ..................00.000- 1-46
`Typical ApplicationS............. 0. cece cece eee ee eee 1-9
`Basic Magnetron Sputtering .............-.-2--.-05- 1-9
`Factory Configuration (Negative Output)........... 1-9
`Optimum Configuration (Positive or Negative Output). 1-10
`Optimum Configuration (Floating Output) .......... 1-12
`DC Sputtering with RF Bias .....................08- 1-13
`DC-biased RF Sputtering .............. 2. eee ee eee 1-15
`Specifications. ......... 0... cece eee eee eee eee 1-17
`Functional Specifications. .......... 0... cece eee eee 1-17
`
`WHATIT IS
`
`CONTENTS
`
`Physical Specifications .... 20... 0... cece ee eee eee 1-19
`
`1-3
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`
`Page 15 of 245
`
`Ex. 1025, Page 15
`
`Ex. 1025, Page 15
`
`

`

`
`
`WHATIT IS
`
`GENERAL DESCRIPTION
`
`The de magnetron drives in the MDX series prove just how convenient and
`efficient advanced high-frequency switchmode powersupplies are.
`They...
`
`are light and compact
`are highly efficient (low heat emission)
`provide excellent regulation and stability
`have a highly reliable solid state design
`are modular
`store very little energy in the outputfilter
`
`These magnetron drives exhibit superior output response time, low output
`ripple voltage, and considerable space savings over lower frequency designs.
`The intemal microprocessor ensures ease of use, and the modular design
`allows the supplies to be easily serviced.
`
`Output Impedance Range
`
`Each MDXis equipped with a built-in impedance-matching transformer. These
`tap-selectable transformers are available in high Z, standard Z, or low Z
`configurations. With the proper transformer and tap (See pages 4-27 and
`4-45), load impedances requiring voltages from 400 V to 1250 V can be
`accomodated.
`
`Plasmastrike voltages are available onall taps — levels reach as high as
`1500 V, depending on the model. Thefull rated power output for each MDXis
`available throughout the range of each tap.
`
`Output Regulation
`
`The MDX canbe used as a power, current, or voltage source, depending on
`the method of output regulation selected. Since setpoint levels are stored in
`nonvolatile memory, they can be used in recovering from input power
`interruptions and to ensure repeatability from run to run.
`
`Interfaces
`
`The MDX can becontrolled from a variety of attached or remote control
`panels, an analog/digital connector, or an RS-232 serial data port. The RS-232
`(Host) interface provides access to all operating parameters and control
`functions. The analog/digital (User) interface provides data logging capability
`and access to a numberoffeatures.
`
`1-5
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`
`Page 16 of 245
`
`Ex. 1025, Page 16
`
`Ex. 1025, Page 16
`
`

`

`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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`Page 17 of 245
`
`Ex. 1025, Page 17
`
`

`

`
`
`WHAT IT IS
`
`cathodic arc processes. When recovering from a low-impedancecondition, the
`MDX automatically ramps up slowly in current regulation. As the chamber
`impedance increases (with the removal of excess ions), the power supply
`automatically crosses over to the previously selected methodof output
`regulation (poweror voltage). Timing and current magnitudes can be adjusted
`to protect sensitive targets and system components.
`
`1-7
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`
`Page 18 of 245
`
`Ex. 1025, Page 18
`
`Ex. 1025, Page 18
`
`

`

`
`
`WHATIT IS
`
`TYPICAL APPLICATIONS
`
`Basic Magnetron Sputtering
`
`Three output configurations are possible for the MDX: negative output voltage,
`positive output voltage, and floating ground. Provisions within the MDX chassis
`allow you totie either the anode or the cathode to ground; altematively, you
`canlet the output float with respect to ground by not grounding either the
`anodeorthe cathode.
`
` YOU
`SHOULD KNOW...
`
`Danger! An understanding of grounding and
`the proper hookup of groundsis essential to
`personnel safety and is necessary for the
`proper operation of your system.In all cases
`you must connect the chassis ground stud
`on the rear of the MDX to earth-groundwith
`the lowest possible impedance (see
`operating note on grounding methods and
`definitions, page 7-1).
`
`Factory Configuration (negative output)
`Most MDX applications require a negative output voltage, which in tum
`requires that the anode be connected to ground. The MDxXis shipped with a
`safety jumperinstalled as shownin Fig. 1-1 to make this ground connection,
`althoughthis is not the optimum configuration. The reasonis related to safety
`-— most people associate the braided shield layer of a coaxial cable with a
`ground connection. If we shipped products with no intemal ground, it is
`conceivable that a system could be configured with a lethal voltage on the
`coaxial cable’s sheath. This would be extremely dangerous because of the
`possibility that people could unknowingly be exposed to such a voltage at the
`connectors.
`
`The disadvantage of having aninstalled groundis that additional grounds
`invariably do exist in the system. This meansthat there are two or more
`ground pathsin the system. When multiple ground paths exist, the chassis is
`made to conduct someofthis current. This current flow can cause a loss of
`instrumentation accuracy, electrical noise, and heating of the chassis or
`connectors andjoints; it may even raise the ground-reference voltage level so
`that extemal and intemal contro! signals either control the MDX erratically or
`not at all. Thus the best system performance is obtained using the “optimum
`configuration (positive or negative output)” described next.
`
`1-9
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`
`Page 19 of 245
`
`Ex. 1025, Page 19
`
`Ex. 1025, Page 19
`
`

`

`PART|
`
`
`
`Ac
`
`/
`
`Sofety Jumper
`
` Factory—instolled
`
`Insulated
`Feedthrough
`
`Cothode
`(Target Moteriol)
`
`Substrate
`
`Optionol
`Grounded
`Substrote
`
`Figure 1-1. Factory configuration (factory-installed safetyjumper).
`
`Optimum Configuration (positive or negative output)
`The configuration that AE recommends is illustrated in Fig. 1-2, which shows
`an independently grounded anode at the chamber,forcing all retum current
`through the anode retum path. The design of the chamber may use the
`chamber wall, special intemal shielding structure, or the substrate holder as
`the actual anode. With this setup, only one current path will exist, thus
`eliminating the problems caused by multiple retums.
`
`Makecertain that you have established a good ground at the chamber anode
`or the ground reference will be lost. The integrity of this ground connection
`should be checked as part of a periodic maintenance schedule to ensure
`continued optimum performance and safety. Whenever a system is configured
`in this manner,it is recommended that secondary dielectric shielding be
`installed overall parts of the coaxial cable and connectors that are exposed.
`
`Whenthis connection degrades,as it will over time, the system could become
`unsafe (as described in the two preceding paragraphs); more likely,
`performance will be lost. This slow loss of performance can be subtle and very
`difficult to detect. Some indications of ground degradation are loss of
`instrumentation accuracy, symptoms of increased noise such asdisplay flicker
`and jittery data-logging lines, secondary plasma development between the
`target and the closest point at ground potential, change in the appearance of
`the chamber plasma at known powerlevels, and increasingly erratic behavior
`of the power supply or the system controller.
`
`4-10
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`
`Page 20 of 245
`
`Ex. 1025, Page 20
`
`Ex. 1025, Page 20
`
`

`

`
`
`WHATIT IS
`
`All of these considerations hold true when the MDxXis usedin the positive
`output voltage (grounded cathode) configuration.
`
`/
`
`Insuloted
`Feedthrough
`
`Chamber
`
`Cathode
`
`Substrate
`
`Optional
`Grounded
`Substrate
`
`(Target Moterial)
`
`
`Figure 1-2. Optimum grounding configuration (negative output).
`
`/
`
`Insulated
`Feedthrough
`
`Cathode
`(Target Material)
`
`Substrote
`
`Optional
`Grounded
`Substrate
`
`Figure 1-3. Optimum grounding configuration (positive output).
`
`1-11
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`
`Page 21 of 245
`
`Ex. 1025, Page 21
`
`Ex. 1025, Page 21
`
`

`

`PART|
` Ar
`
`Optimum Configuration (floating output)
`In some applicationsit is desirable to bias the positive or negative output of
`the MDXwith another powersupply. This supply may be another dc supply or
`an RF supply. The MDX maybe biased by a voltage of up to +400 V
`referenced to its own (MDX) chassis ground. Figure 1-4 illustrates a typical
`configuration of this type.
`
`Whenusing the MDxXin this configuration, it is again very important to provide
`a good chassis ground for each powersupply. Further, all power supply
`chassis grounds should be connected at one commonpoint. All
`interconnecting power supply output lines and connectors mustbe fully
`insulated to protect personnel from accidental exposure to potentially lethal
`voltages.
`
`/
`
`Insulated
`Feedthrough
`
`(Torget Moterial) Chamber
`
`Cathode
`
`Optional
`Biosed
`Substrate
`
`Figure 1-4. Hoating-output configuration.
`
`1-12
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`
`Page 22 of 245
`
`Ex. 1025, Page 22
`
`Ex. 1025, Page 22
`
`

`

`
`
`WHAT IT 1S
`
`DC Sputtering with RF Bias
`
`YOU
`
` WARNING! You mustplace an ac blocking
`SHOULD KNOW...
`
`filter in series with the output of the dc
`power supply if your system uses a dc
`powersupply in combination with an ac
`powersupply that has an output frequency
`greater than 50 kHz.
`
`In this application (see the illustration on the next page), properinstallation of
`the RF generator and tuneris critical to proper operation of the system. Proper
`installation includes good, solid, RF grounding anddcinstallation.
`
`An RFfilter must be placed between the dc output and the chamber because
`13.56 MHz can damage the typical dc magnetron power supply. There is no
`need to put a filter between the RF tuner output and the chamber because
`Advanced Energy® tuners provide a dc block.
`
`The purposeofthis type of installation is to elevate the potential on the biased
`substrate. With properinstallation and programming, an Advanced Energy®
`RFX can control the developed dc bias on the substrate (See the operating
`note on dc bias, page 6-3).
`
`This extra contro] parameter (RF bias) may provide higher deposition rates or
`better film structure. The results will vary with each application. Biasing alters
`the ion and acceleration potentials, and these altered potentials provide the
`desired results.
`
`1-13
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`
`Page 23 of 245
`
`Ex. 1025, Page 23
`
`Ex. 1025, Page 23
`
`

`

`PART | Ac
`
`Insulated
`
`RF Filter
`
`\
`
`Feedthrough
`
`
`509
`
`Target
`
`Substrote
`|
`= Alternate
`
`Method
`
`Figure 1- 5. Typical configuration for de sputtering with RFbias.
`
`1-14
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`
`Page 24 of 245
`
`Ex. 1025, Page 24
`
`Ex. 1025, Page 24
`
`

`

`
`
`WHAT IT IS
`
`DC-biased RF Sputtering
`
`YOU
`SHOULD KNOW...
`
`
`
` WARNING! You must place an ac blocking
`filter in series with the output of the dc
`powersupply if your system uses a dc
`powersupply in combination with an ac
`powersupply that has an output frequency
`greater than 50 kHz.
`
`Figure 1-6 (on the next page) showsa typical RF sputtering application, where
`the target shield and chamberwalls are referenced to ground, but the
`substrate is directly biased with a dc powersupply. This could be a planar
`magnetron or an “S”gun installation.
`
`Improper grounding of the tuner, chamber, and MDXwill result in radio
`frequency interference (RFI), which is often evidencedin this application by
`chattering valves or your computer behaving erratically.
`
` You
`are not properly grounded.
`
`DANGER!Lethalhigh-voltage potentials will
`be presentif the tuner, chamber, and MDX
`
`SHOULD KNOW...
`
`Some RFsputtering applications require a length of cable between the tuner
`output and the vacuum feedthrough. This type of connection should only be
`used, with extreme caution, if there is no way to mount the tuner directly to the
`vacuum feedthrough. The impedancetransformation that takes place within
`the interconnect cable can create large circulating currents on this cable. The
`powerdissipatedis a function of I7R losses. This formula showsthat any
`increase in circulating current greatly increases the losses in the cable.
`
`In light of this fact, a teflon dielectric cable should be used becauseteflon has
`a more favorable thermal characteristic than other cable materials. The teflon
`will minimize migration of the center conductor due to overheating, thus
`reducing the probability of the center conductor shorting to the outer sheath.
`
`A key consideration in any RFinstallation is the RF retum path. Power
`supply/Atuner connection: The powersupply is usually connected to the
`tuning network through a coaxial cable, and the braided shield on this cable
`acts as an adequate RF retum for this section of the circuit. Tuner/chamber
`connection: Pay special attention to the connection betweenthe tuning
`
`1-15
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`
`Page 25 of 245
`
`Ex. 1025, Page 25
`
`Ex. 1025, Page 25
`
`

`

`PART |
`
`
`
`Fi
`
`network and chamber. Onall Advanced Energy® tuners, the aluminum
`chassis provides the RF retum path.Ideally, this chassis should be bolted
`directly onto the vacuum chamber,thus establishing good surface contact.If
`this is not possible, connect the tuner and chamberwith a solid copperstrap.
`Avoid using braid — the fine strands within the braid form a highly inductive
`path and may melt from overheating. Also avoid using stainless steel hardware
`— steel is a poor conductorat high frequencies becauseofits ferromagnetic
`properties.
`
`Brass hardware is most commonly used becausebrass is a good conductor
`andis readily available.
`
`509
`
`/
`
`Insulated
`Feedthrough
`
`Target
`
`
`Ye Filter Chamber
`
` --?
`a Supply
`
`
`Substrate
`
`Power
`
`5092
`
`Figure 1-6. Typical configuration for RF sputtering with dcbias.
`
`1-16
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`
`Page 26 of 245
`
`Ex. 1025, Page 26
`
`Ex. 1025, Page 26
`
`

`

`WHAT IT IS
`
`
`SPECIFICATIONS
`
`Functional Specifications
`
`Modeof Control
`
`Control Signal
`Sources
`
`Program — full control is available from all
`interfaces.
`Lock— front-panelcontrolis limited to output
`on/off, emergency stop, and test functions;also,
`setpoints can be viewed for whatever method of
`output regulation (power, current, or voltage) was
`selected in program mode.
`Off — all functions are disabled.
`
`Output can becontrolled from the control panel, the
`host-remote (RS-232) interface, or the user-remote
`interface. Control! of output regulation, ramptime,
`output on/off, or target select can be split between
`the User port and the control panel or between the
`Userport and the Host port.
`
`Methods of Output
`Regulation
`
`The value that remains constant when the MDXis
`producing output can be power,current, or voltage.
`
`Programmable
`Setpoints
`
`Target Supervision
`
`An output level (up to the unit's maximum rated
`output) can be programmed for power, current, or
`voltage.
`
`One of eight target-life counters (0-7) can be
`selected either remotely or from a control panel.
`Targetlife can be specified and monitored from a
`host computeror from a control panel (1-9900
`kWh).
`
`Arc Suppression
`
`Arc conditions are quickly detected and MDX
`output is quickly modified to prevent damageto the
`target and substrate.
`
`1-17
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`
`Page 27 of 245
`
`Ex. 1025, Page 27
`
`Ex. 1025, Page 27
`
`

`

`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
`
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`Page 28 of 245
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`Ex. 1025, Page 28
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`

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`
`
`WHAT IT IS
`
`Physical Specifications
`
`Input Voltages
`
`200 V ac or 208 V ac mms + 10%, 50/60 Hz,
`three-phase “Y” connection; maximum ground
`leakage currentless than 3.5 mA.
`
`Input Current
`
`200 V ac or 208 V acfull load; see table below for
`maximums.
`
`MDX
`
`Model
`
`MDX 5K
`MDX 10K
`MDX 15K
`MDX 20K
`MDX 25K
`MDX 30K
`
`Maximum Current(at
`-10% input line voltage)
`
`19A
`38 A
`57A
`76A
`95A
`114A
`
`Output Power
`
`See table below for details.
`
`Output
`Power
`
`0-5000 W
`
`0-10,000 W
`0-15,000 W
`0-20,000 W
`0-25,000 W
`0-30,000 W
`
`Chassis Per Output Ripple
`System
`Voltage (% rms)
`
`Output Ripple
`Frequency
`
`1
`
`WWNN=
`
`5
`
`NMMNBD
`
`50 kHz
`100 kHz
`100 kHz
`100 kHz
`100 kHz
`100 kHz
`
`Output Display
`Accuracy
`
`Within 2% of actual output level or 0.2% of
`maximum rated output level, whicheveris greater.
`
`Target Accumulator
`
`Targetlife is displayed in 1-kWh increments; the
`counter is updated every 4.7 ms.
`
`Methodsof Control
`
`Full or restricted access, local or remote control,
`programmed or manual operation.
`
`1-19
`Artisan Technology Group- Quality Instrumentation ... Guaranteed | (888) 88-SOURCE| www.artisantg.com
`
`Page 29 of 245
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`Ex. 1025, Page 29
`
`Ex. 1025, Page 29
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`

`

`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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`Page 30 of 245
`
`Ex. 1025, Page 30
`
`

`

`
`
`WHAT IT IS
`
`Output Parameters
`
`The table below indicates the maximum current
`that can be produced at eachtap.It also shows the
`range of output voltages available at each tap,
`when the MDXis in voltage regulation (see page
`4-3).
`
`Tap
`No.
`
`Output Volt.
`Range
`
`
`MDX 5K
`
`MDX10K
`
` MDX15K
`
`MDX 20K
`
`MDX 25K
`
`MDX 30K
`
`0 V to 500 V
`0 V to 640 V
`0 V to 800 V
`
`12.50A
`10.00A
`7.75 A
`
`
`
`Maximum Output Current: Low Impedance(“Low 2”)
`
`25.00A
`20.00 A
`15.50A
`
`37.50A
`30.00A
`23.50 A
`
`50.00 A
`40.00 A
`31.00 A
`
`62.50A
`50.00 A
`38.75 A
`
`75.00 A
`60.00 A
`46.50A
`
`Maximum Output C