S C S P A R Y L E N E P R O P E R T I E S
`
`Structural integrity.
`
`Regeneron Exhibit 1074.001
`
`

`

`No other company understands Parylene coatings better than we do.
`SCS is the direct descendant of the companies that developed Parylene
`and began using it in commercial applications. We have been providing
`Parylene coating services, equipment and materials for more than 35 years,
`as well as aggressively researching and developing new Parylene variants
`and application processes to find innovative coating solutions for customers’
`advanced technologies.
`
`Introduction
`Parylene is the generic name for members of
`a unique polymer series. The basic member of
`the series, Parylene N, is poly(para-xylylene),
`a completely linear, highly crystalline material.
`Parylene N is a primary dielectric, exhibiting a very
`low dissipation factor, high dielectric strength, and
`a low dielectric constant invariant with frequency.
`The crevice-penetrating ability of Parylene N is
`second only to that of Parylene HT ®. The Parylene
`structures are shown in Figure 1.
`Parylene C, the second commercially available
`member of the series, is produced from the same
`raw material (dimer) as Parylene N, modified only
`by the substitution of a chlorine atom for one of
`the aromatic hydrogens. Parylene C has a useful
`combination of electrical and physical properties
`plus a very low permeability to moisture and
`corrosive gases.
`Parylene D, the third available member of the series,
`is produced from the same raw material as the
`Parylene N dimer, modified by the substitution of
`chlorine atoms for two of the aromatic hydrogens.
`Parylene D is similar in properties to Parylene C with
`the added ability to withstand slightly higher use
`temperatures.
`Parylene HT, the newest commercially available
`Parylene, replaces the alpha hydrogen atom of
`the N dimer with fluorine. This variant of Parylene
`is useful in high temperature applications (short-
`term up to 450°C) and those in which long-term UV
`stability is required. Parylene HT also has the lowest
`coefficient of friction and dielectric constant, and
`the highest penetrating ability of the four variants.
`Due to the uniqueness of vapor phase deposition,
`the Parylene polymers can be formed as structurally
`continuous films from as thin as several hundred
`angstroms to 75 microns.
`
`2
`
`Figure 1. Parylenes N, C, D and
`Parylene HT Chemical Structures
`
`CH2
`
`CH2
`
`Parylene N
`
`Cl
`
`CH2
`
`CH2
`
`Parylene C
`
`Cl
`
`CH2
`
`CH2
`
`Cl
`Parylene D
`
`CF2
`
`CF2
`
`Parylene HT®
`
`n
`
`n
`
`n
`
`n
`
`Regeneron Exhibit 1074.002
`
`

`

`Figure 2. Parylene Vapor Deposition Polymerization (VDP)
`(Parylene N illustrated)
`
`Vaporization
`Dimer
`di-para-xylylene
`150°C, 1.0 torr
`
`Pyrolysis
`Monomer
`para-xylylene
`680°C, 0.5 torr
`
`Deposition
`Polymer
`poly(para-xylylene)
`25°C, 0.1 torr
`
`S C S P A R Y L E N E P R O P E R T I E S
`
`The Deposition Process
`The Parylene polymers are deposited by a process
`which in some respects resembles vacuum
`metallizing. Unlike vacuum metallization, however,
`which is conducted at pressures of 10-5 torr or below,
`the Parylenes are formed at around 0.1 torr. Under
`these conditions, the mean free path of the gas
`molecules in the deposition chamber is on the order
`of 0.1 cm. The deposition is not line of sight, and
`all sides of an object to be coated are uniformly
`impinged by the gaseous monomer, which results in
`a truly conformal, pinhole-free coating. Parylene
`deposition equipment can be configured to meet the
`requirements of the substrates to be coated.
`Substrates are required to have only a reasonable
`vacuum tolerance.
`
`The deposition process consists of three distinct steps
`as outlined in Figure 2.
`The first step is the vaporization of the solid dimer
`at approximately 150°C. The second step is the
`quantitative cleavage (pyrolysis) of the dimer vapor
`at the two methylene-methylene bonds at about
`680°C to yield the stable monomeric diradical, para-
`xylylene. Finally, the monomeric vapor enters the
`room temperature deposition chamber where it
`spontaneously polymerizes on the substrate. The
`substrate temperature never rises more than a few
`degrees above ambient.
`No liquid phase has ever been isolated, therefore
`Parylene suffers none of the fluid effects that can
`cause pooling, flowing, bridging, meniscus or edge-
`effect flaws. Parylene also contains no solvents,
`catalysts or plasticizers that can leach or outgas
`from the coating.
`
`3
`
`Regeneron Exhibit 1074.003
`
`

`

`Properties
`The electrical, barrier, mechanical, thermal, optical,
`biocompatibility and other properties of Parylenes N,
`C, D and Parylene HT are discussed below. These
`properties are compared to those reported for other
`conformal coating materials such as acrylics,
`epoxies, polyurethanes and silicones.
`A. Electrical Properties
`The electrical properties of Parylene are shown
`in Table 1.
`1. Thin Film Dielectric Properties
`One of the features of Parylene coatings is that
`they can be formed in extremely thin layers. The
`breakdown AC voltages of Parylene N, C and
`Parylene HT films have been determined
`as a function of polymer thickness. The data in
`Table 1 show that Parylenes have excellent
`dielectric withstanding voltages. It has also been
`demonstrated that the voltage breakdown per unit
`thickness increases with decreasing film thickness.
`2. Circuit Board Insulation Resistance
`A critical test of the protection afforded by
`a Parylene coating is to coat circuit board
`test patterns (as described in MIL-I-46058C)
`and subject them to insulation resistance
`measurements during a temperature-humidity
`cycle (MIL-STD-202, methods 106 and 302). In
`brief, this test consists of 10 cycles (one cycle per
`day), with each cycle consisting of seven steps.
`The seven steps range from low temperature, low
`humidity (25°C, 50% RH) to more severe
`conditions (65°C, 90% RH). Resistance readings
`are taken initially and at the 65°C, 90% RH step
`for each cycle of the 10-day test.
`Results are shown in Table 2 for Parylene C
`coating thicknesses from 50.8 µm to 2.5 µm.
`It is interesting to note that even for the very
`thin coatings (2.5 µm), the insulation resistance
`values are about one order of magnitude above
`the prescribed specification.
`
`B. Barrier Properties and Chemical Resistance
`1. Barrier
`The barrier properties of the Parylenes are given
`in Table 3. The water vapor transmission rates
`(WVTR) are again compared with those of other
`conformal coating materials. The WVTR for
`Parylene C is superior to the most common
`polymeric materials.
`Circuit boards coated with SCS Parylene HT were
`salt-fog tested by an independent testing facility.
`The coated boards showed no corrosion or salt
`deposits after 144 hours of exposure in
`accordance with ASTM B117-(03) (See Figure 3).
`Boards coated with Parylene C exhibited similar
`results.
`2. Chemical Resistance
`The Parylenes resist room temperature chemical
`attack and are insoluble in all organic solvents
`up to 150°C. Parylene C can be dissolved in
`chloro-napthalene at 175°C, and Parylene N
`softens at the solvent’s boiling point (265°C).
`Both polymers are resistant to permeation by
`most solvents. Parylene HT films do not swell
`significantly with exposure to automotive
`chemicals and fluids, and there are no perceivable
`changes in the film’s optical or mechanical
`properties.
`
`Figure 3. Circuit boards after
`144 hours of salt-fog exposure
`
`Coated with SCS Parylene HT
`
`Uncoated
`
`4
`
`Regeneron Exhibit 1074.004
`
`

`

`Table 1. Parylene Electrical Properties
`
`Method
`
`Parylene N
`
`Parylene C
`
`Parylene D
`
`Parylene HT
`
`7,000
`1.4 x 1017
`
`5,600
`8.8 x 1016
`
`5,500
`1.2 x 1017
`
`5,400
`2.0 x 1017
`
`1.0 x 1013
`
`1.0 x 1014
`
`1.0 x 1016
`
`5.0 x 1015
`
`Properties
`Dielectric Strength
`V/mil
`Volume Resistivity,
`ohm-cm, 23ºC,
`50% RH
`Surface Resistivity,
`ohms, 23ºC,
`50% RH
`Dielectric Constant
`60 Hz
`1 KHz
`1 MHz
`Dissipation Factor
`0.020
`0.0002
`60 Hz
`0.019
`0.0002
`1 KHz
`0.013
`0.0006
`1 MHz
`aHandbook of Plastics, Elastomers, and Composites, Chapter 6,
`“Plastics in Coatings and Finishes,” 4th Edition, McGraw Hill, Inc., New York, 2002.
`bConformal Coating Handbook, Humiseal Division, Chase Corporation, Pennsylvania, 2004.
`
`1
`2
`
`2
`
`3
`
`3
`
`2.65
`2.65
`2.65
`
`3.15
`3.10
`2.95
`
`2.84
`2.82
`2.80
`
`0.004
`0.003
`0.002
`
`2.21
`2.20
`2.17
`
`<0.0002
`0.0020
`0.0010
`
`Acrylic
`(AR)a,b
`
`Epoxy
`(ER)a,b
`
`Polyurethane
`(UR)a,b
`
`Silicone
`(SR)a,b
`
`3,500
`1.0 x 1015
`
`2,200
`1.0 x 1016
`
`3,500
`1.0 x 1013
`
`2,000
`1.0 x 1015
`
`1.0 x 1014
`
`1.0 x 1013
`
`1.0 x 1014
`
`1.0 x 1013
`
`–
`–
`2.7 – 3.2
`
`3.3 – 4.6
`–
`3.1 – 4.2
`
`4.1
`–
`3.8 – 4.4
`
`3.1 – 4.2
`–
`3.1 – 4.0
`
`0.04 – 0.06 0.008 – 0.011 0.038 – 0.039 0.011– 0.02
`–
`–
`–
`–
`0.02 – 0.03 0.004 – 0.006 0.068 – 0.074 0.003 – 0.006
`Test Methods:
`1. ASTM D 149
`2. ASTM D 257
`3. ASTM D 150
`
`S C S P A R Y L E N E P R O P E R T I E S
`
`(International conversion chart on back cover.)
`
`Table 2. Parylene C Circuit Board Screening
`Insulation Resistance (ohms), MIL-STD-202, method 302
`
`Parylene
`Thickness
`(µm)
`
`50.8
`38.1
`25.4
`12.7
`7.6
`2.5
`
`Initial
`Measurement
`25ºC, 50% RH
`2.0 x 1014
`5.0 x 1014
`2.0 x 1014
`5.0 x 1014
`5.0 x 1014
`5.0 x 1014
`
`Precycle
`
`25ºC, 90% RH
`1.8 x 1013
`2.4 x 1013
`9.2 x 1012
`2.3 x 1013
`2.7 x 1013
`3.2 x 1010
`
`Step 5
`Cycle 3
`65ºC, 90% RH
`2.3 x 1012
`8.6 x 1011
`8.1 x 1011
`4.1 x 1012
`4.4 x 1012
`1.3 x 1011
`
`Step 5
`Cycle 7
`65ºC, 90% RH
`2.5 x 1011
`1.9 x 1011
`3.4 x 1011
`2.4 x 1011
`9.0 x 1010
`1.1 x 1011
`
`Step 5
`Cycle 10
`65ºC, 90% RH
`1.4 x 1011
`1.1 x 1011
`1.3 x 1011
`1.1 x 1011
`4.7 x 1010
`6.4 x 1010
`
`Step 7
`Cycle 10
`25ºC, 90% RH
`7.5 x 1012
`5.2 x 1012
`6.3 x 1012
`4.7 x 1012
`2.9 x 1012
`2.3 x 1012
`
`(International conversion chart on back cover.)
`
`Table 3. Parylene Barrier Properties
`
`Polymer
`Parylene N
`Parylene C
`Parylene D
`Parylene HT
`Acrylic (AR)
`Epoxy (ER)
`Polyurethane (UR)
`Silicone (SR)
`
`Gas Permeability at 25ºC, (cc •mm)/(m2•day•a t m )a
`N2
`O2
`CO2
`H2
`3.0
`15.4
`84.3
`212.6
`0.4
`2.8
`3.0
`43.3
`1.8
`12.6
`5.1
`94.5
`4.8
`23.5
`95.4
`–
`–
`–
`–
`–
`1.6
`2.0 – 3.9
`3.1
`43.3
`31.5
`78.7
`1,181
`–
`–
`19,685
`118,110
`17,717
`
`Water Vapor Transmission Rate
`(g•mm)/(m2•day)
`0.59b
`0.08c
`0.09b
`0.22d
`13.9e
`0.94e
`0.93 – 3.4e
`1.7 – 47.5e
`
`aASTM D 1434
`bASTM E 96 (at 90% RH, 37ºC)
`cASTM F 1249 (at 90% RH, 37ºC)
`dASTM F 1249 (at 100% RH, 38ºC)
`eCoating Materials for Electronic Applications, Licari, J.J., Noyes Publications, New Jersey, 2003.
`
`(International conversion chart on back cover.)
`
`5
`
`Regeneron Exhibit 1074.005
`
`

`

`C. Thermal, Cryogenic, Vacuum and
`Sterilization Properties
`1. Thermal
`Based on an Arrhenius extrapolation of test data,
`Parylene C is expected to survive continuous
`exposure to air at 80°C for 10 years (100,000
`hours). In oxygen-free atmospheres, or in the
`vacuum of space, the Parylenes are expected
`to perform similarly on continuous exposure to
`220°C. Parylene HT has been demonstrated
`to survive continuous exposure to air at 350°C.
`In all cases, higher temperature shortens useful
`life. If the requirements for your application are
`near or exceed this time-temperature-atmospheric
`conditions envelope, it is recommended that you
`test the complete structure under conditions more
`closely resembling the actual conditions of
`intended use.
`Parylene may be annealed to increase cut-
`through resistance, increase hardness and improve
`abrasion resistance. This is the result of polymer
`density and an increase in crystallinity.
`General thermal properties are summarized
`in Table 4.
`2. Cryogenic
`Unsupported 50.8 µm films of Parylene C
`can be flexed 180° six times at -200°C
`before failure occurs. Comparable films of
`polyethylene, polyethylene terephthalate
`and polytetrafluoroethylene fail at three,
`two and one flexes, respectively.
`Steel panels coated with Parylene C and
`chilled in liquid nitrogen at -196°C
`withstood impacts of more than 11.3 N •m in
`a modified Gardner falling ball impact test. This
`compares with values of about 28.2 N •m at room
`temperature.
`Supported films of Parylene N withstand thermal
`cycling from room temperature to -269°C without
`crackling, peeling from substrate, or degrading
`of electrical properties.
`
`3. Vacuum Stability
`Vacuum tests conducted at the Jet Propulsion
`Laboratory show that total weight loss at 49.4°C
`and 10-6 torr was 0.12% for Parylene C and
`0.30% for Parylene N. Volatile collectible,
`condensable material values were less than
`0.01% (the limit of sensitivity of the test)
`for both polymers.
`4. Parylene Sterilization
`Parylenes N and C were exposed to a variety of
`sterilization methods including steam autoclave,
`gamma and e-beam irradiation, hydrogen peroxide
`plasma, and ethylene oxide. Post-sterilization
`analysis compared the impact of these agents on
`sterilized samples versus unsterilized control
`samples. Further details on the sterilization tests
`can be reviewed in the SCS Biomedical
`Technologies brochure.
`D. Physical and Mechanical Properties
`Physical and mechanical properties of the
`Parylenes are summarized in Table 5. Because of
`their high molecular weight (~500,000) and because
`the melting temperatures and crystallinity are high,
`the Parylenes cannot be formed by conventional
`methods such as extrusion or molding. Solubility
`in organic or other media, except at temperatures
`above 175°C, is so low that they cannot be formed
`by casting.
`Impact resistance is high when the Parylene
`polymers are supported on test panels. Gardner
`falling ball impact tests on 25.4 µm thick Parylene C
`coated steel “Q” panels are in the 28.2 N •m range.
`Wear index values (measured on a Taber® Abraser
`machine using CS-17 “Calibrase” wheel with 1,000
`gram weight) were 22.5 for Parylene C and 8.8 for
`Parylene N. By comparison, polytetrafluoroethylene
`is 8.4, high impact polyvinylchloride is 24.4, epoxy
`is 41.9 and polyurethane is 59.5.
`
`6
`
`Regeneron Exhibit 1074.006
`
`

`

`Table 4. Parylene Thermal Properties
`
`Method
`
`Parylene N
`
`Parylene C
`
`Parylene D
`
`Parylene HT
`
`Properties
`Melting Point (ºC)a
`T5 Point (ºC)
`(modulus = 690 MPa)
`T4 Point (ºC)
`(modulus = 70 MPa)
`Continuous Service
`Temperature (ºC)
`Short-Term Service
`Temperature (ºC)
`Linear Coefficient of
`Thermal Expansion
`at 25ºC (ppm)
`Thermal
`Conductivity at
`25ºC (W/(m•K))
`Specific Heat
`at 20ºC (J/(g•K))
`
`1
`2, 3
`
`2, 3
`
`–
`
`–
`
`4
`
`420
`160
`
`>300
`
`60
`
`80
`
`69
`
`290
`125
`
`240
`
`80
`
`100
`
`35
`
`5, 6
`
`0.126
`
`0.084
`
`–
`
`0.837
`
`0.712
`
`380
`125
`
`240
`
`100
`
`120
`
`38
`
`–
`
`–
`
`aThe temperature at which heat flow properties show signs of change.
`
`bHandbook of Plastics, Elastomers, and Composites, Chapter 6,
`“Plastics in Coatings and Finishes,” 4th Edition, McGraw Hill, Inc., New York, 2002.
`
`cCoating Materials for Electronic Applications, Licari, J.J.,
`Noyes Publications, New Jersey, 2003.
`
`dLange’s Handbook of Chemistry, 5th Edition, McGraw Hill, Inc., New York, 1999.
`
`(International conversion chart on back cover.)
`
`Acrylic
`(AR)
`85 – 105b
`–
`
`–
`
`82b
`
`–
`
`Epoxy
`(ER)
`
`NA
`110
`
`120
`
`177b
`
`–
`
`Polyurethane
`(UR)
`~170b
`~30
`
`–
`
`121b
`
`–
`
`Silicone
`(SR)
`
`NA
`~125
`
`~80
`
`260b
`
`–
`
`55 – 205b, c
`
`45 – 65b, c
`
`100 – 200b, c
`
`250 – 300b, c
`
`>500
`377
`
`>450
`
`350
`
`450
`
`36
`
`0.096
`
`0.167 – 0.21c, d 0.125 – 0.25c, d
`
`0.11c, d
`
`0.15 – 0.31c, d
`
`1.04
`
`1.04b
`
`1.05b
`
`1.76b
`
`1.46b
`
`Test Methods:
`1. DSC
`2. Taken from Secant modulus-temperature curve (except Parylene HT)
`3. ASTM 5026 (Parylene HT only)
`4. TMA
`5. ASTM C 177 (except Parylene HT)
`6. ASTM 1461 (Parylene HT only)
`
`Table 5. Parylene Physical and Mechanical Properties
`
`Parylene C
`400,000
`
`Parylene D
`380,000
`
`Parylene HT
`370,000
`
`Method
`1, 2
`
`Parylene N
`350,000
`
`Acrylic
`(AR)a,b
`2,000 – 10,000
`
`Epoxy
`(ER)a,b
`350,000
`
`Polyurethane
`(UR)a,b
`1,000 – 100,000
`
`Silicone
`(SR)a,b
`900
`
`10,000
`
`11,000
`
`7,500
`
`7,000 – 11,000 4,000 – 13,000
`
`175 – 10,000
`
`350 – 1,000
`
`S C S P A R Y L E N E P R O P E R T I E S
`
`–
`
`>14
`
`–
`
`–
`
`100 – 210
`
`–
`
`–
`
`–
`
`1.19
`1.48
`
`0.3
`
`1.11 – 1.40
`1.55 – 1.61
`
`1.10 – 2.50
`1.50 – 1.60
`
`1.05 – 1.23
`1.43
`
`0.05 – 0.10
`
`0.6 – 0.8
`
`0.1
`
`aCoating Materials for Electronic Applications, Licari, J.J.,
`Noyes Publications, New Jersey, 2003.
`
`cHandbook of Plastics, Elastomers, and Composites, Chapter 6,
`“Plastics in Coatings and Finishes,” 4th Edition, McGraw Hill, Inc., New York, 2002.
`
`(International conversion chart on back cover.)
`
`Less than
`0.1
`R85
`
`Less than
`0.1
`R80
`
`Less than
`0.1
`R80
`
`Less than
`0.01
`R122
`
`0.25
`0.25
`
`0.29
`0.29
`
`0.33
`0.31
`
`M68 – M105 M80 – M110
`
`68A – 80D
`(Shore)
`
`40A – 45A
`(Shore)
`
`–
`–
`
`–
`–
`
`0.15
`0.13
`Test Methods:
`1. ASTM D 882 (except Parylene HT)
`2. ASTM D 5026 (Parylene HT only)
`3. ASTM D 882
`4. ASTM D 1505
`5. Abbe Refractometer (except Parylene HT)
`
`–
`–
`
`–
`–
`
`6. ASTM D 542 (Parylene HT only)
`7. ASTM D 570
`8. ASTM D 785
`9. ASTM D 1894
`
`7
`
`7,000
`
`6,100
`
`2.5
`
`8,000
`
`9,000
`
`5,000
`
`–
`
`–
`
`Up to 250
`
`Up to 200
`
`Up to 200
`
`Up to 200
`
`2 – 5.5
`
`3 – 6
`
`4
`5, 6
`
`1.10 – 1.12
`1.661
`
`2.9
`
`1.289
`1.639
`
`3.0
`
`1.418
`1.669
`
`2.0
`
`1.32
`1.559
`
`Properties
`Secant (Young’s)
`Modulus (psi)
`Tensile
`Strength (psi)
`Yield
`Strength (psi)
`Elongation
`to Break (%)
`Yield
`Elongation (%)
`Density (g/cm3)
`Index of Refraction
`23]
`(nD
`Water Absorption
`(% after 24 hrs)
`Rockwell Hardness
`
`Coefficient of Friction
`Static
`Dynamic
`
`3
`
`3
`
`3
`
`3
`
`7
`
`8
`
`9
`
`Regeneron Exhibit 1074.007
`
`

`

`E. Optical Properties and Radiation Resistance
`1. Optical Properties
`Parylene exhibits very little absorption in the
`visible region and is, therefore, transparent and
`colorless. Below wavelengths of about 280 nm,
`all the Parylenes absorb strongly, as shown in
`Figure 4.
`The Fourier Transform infrared spectra for 12.7
`µm Parylene films are shown in Figures 5, 6, 7
`and 8.
`2. Radiation Resistance
`Parylenes N, C, D and Parylene HT films show
`a high degree of resistance to degradation by
`
`gamma rays in vacuum. Tensile and electrical
`properties were unchanged after 1,000 kGy dosage
`at a dose rate of 16 kGy/hr. Exposure in air leads
`to rapid embrittlement.
`Although stable indoors, Parylenes N, C and D
`are not recommended for long-term use when
`exposed to direct sunlight (UV light). Parylene HT
`exhibits significant resistance to UV light, with no
`property degradation from accelerated exposures
`of up to 2,000 hours in air.
`
`Figure 4. Ultraviolet Spectra of Parylenes N, C, D and Parylene HT
`
`Parylene D
`
`Parylene C
`
`Parylene N
`
`Parylene HT
`
`100
`
`90
`
`80
`
`70
`
`60
`
`50
`
`40
`
`30
`
`20
`
`10
`
`0
`
`% Transmittance
`
`200
`
`225
`
`250
`
`275
`
`300
`
`325
`
`350
`
`375
`
`400
`
`Wavelength, nm
`
`Figure 5. FTIR Absorbance Spectrum of Parylene N
`
`3,500
`
`3,000
`
`2,500
`
`2,000
`
`1,500
`
`1,000
`
`500
`
`Wavenumbers (cm-1)
`
`0.30
`
`0.28
`
`0.26
`
`0.24
`
`0.22
`
`0.20
`
`0.18
`
`0.16
`
`0.14
`
`0.12
`
`0.10
`
`0.08
`
`Absorbance
`
` 0.06
`
`0.04
`
`0.02
`
`0.00
`4,000
`
`8
`
`Regeneron Exhibit 1074.008
`
`

`

`S C S P A R Y L E N E P R O P E R T I E S
`
`Figure 6. FTIR Absorbance Spectrum of Parylene C
`
`3,500
`
`3,000
`
`2,500
`2,000
`Wavenumbers (cm-1)
`
`1,500
`
`1,000
`
`500
`
`Figure 7. FTIR Absorbance Spectrum of Parylene D
`
`3,500
`
`3,000
`
`2,500
`2,000
`Wavenumbers (cm-1)
`
`1,500
`
`1,000
`
`500
`
`Figure 8. FTIR Absorbance Spectrum of Parylene HT
`
`3,500
`
`3,000
`
`2,500
`2,000
`Wavenumbers (cm-1)
`
`1,500
`
`1,000
`
`500
`
`9
`
`0.30
`
`0.28
`
`0.26
`
`0.24
`
`0.22
`
`0.20
`
`0.18
`
`0.16
`
`0.14
`
`0.12
`
`0.10
`
`0.08
`
`Absorbance
`
` 0.06
`
`0.04
`
`0.02
`
`0.00
`4,000
`
`0.30
`
`0.28
`
`0.26
`
`0.24
`
`0.22
`
`0.20
`
`0.18
`
`0.16
`
`0.14
`
`0.12
`
`0.10
`
`0.08
`
`Absorbance
`
` 0.06
`
`0.04
`
`0.02
`
`0.00
`4,000
`
`0.30
`
`0.28
`
`0.26
`
`0.24
`
`0.22
`
`0.20
`
`0.18
`
`0.16
`
`0.14
`
`0.12
`
`0.10
`
`0.08
`
`Absorbance
`
` 0.06
`
`0.04
`
`0.02
`
`0.00
`4,000
`
`Regeneron Exhibit 1074.009
`
`

`

`F. Biocompatibility and Biostability
`SCS Parylenes N, C and Parylene HT have been
`tested according to the Biological Evaluations
`requirements of ISO 10993. Further, the
`biocompatibility and biostability of SCS Parylenes
`have been demonstrated in a wide range of medical
`coating applications over the past three decades.
`
`Adhesion
`Optimal adhesion of Parylene to a wide variety
`of substrates can be achieved by a simple
`treatment with a solution of an organic silane
`prior to Parylene coating. Silane pre-treatment
`techniques were originally developed for electronic
`components and assemblies and do not affect any of
`the substrate or coating properties. These adhesion
`promotion techniques are now applied to numerous
`other substrates. Silane can also be vapor phase
`applied if non-liquid application is preferable.
`
`Applications
`Automotive
`Ultra-thin SCS Parylene coatings protect critical
`sensors, circuit boards and other electronic
`components from harsh chemicals, fluids and gases.
`They also protect components at high temperatures
`encountered during prolonged use in automotive
`and heavy-duty engines and systems.
`Electronics
`SCS Parylene coatings are conformal and uniform,
`ensuring complete coverage of circuit boards,
`ferrite cores and other electronics packages, such as
`MEMS, labs on chips and electrowetting lenses. SCS
`Parylene C coatings have been shown to suppress
`the formation of tin whiskers that can result from
`the use of pure tin plating.
`Medical
`SCS Parylenes, listed in the FDA’s Biomaterials
`Compendium, provide an ideal surface modification
`for implantable and non-implantable devices such
`as catheters, seals, stents, cochlear implants, surgical
`tools, pacemakers and components. The coatings
`protect devices and components from moisture,
`biofluids and biogases and serves as a biocompatible
`surface for tissue contact.
`Military/Aerospace
`SCS Parylenes offer extreme tolerance of severe
`environments and are used in many military and
`aerospace applications, including equipment for
`international space programs. Parylene coatings
`are also excellent for electronics used in aerospace
`applications and military vehicles and equipment,
`to protect against elements such as dust, sand,
`moisture, and chemical and biological agents.
`
`Stent courtesy of MeKo, Germany
`
`10
`
`Regeneron Exhibit 1074.010
`
`

`

`Product Safety
`Specialty Coating Systems has compiled the
`information contained herein from what it believes
`are authoritative sources and believes that it is
`accurate and factual as of the date printed. It is
`offered solely as a convenience to its customers and
`is intended only as a guide concerning the products
`mentioned. Because the user’s product formulation,
`specific use application, and conditions of use are
`beyond SCS control, SCS makes no warranty or
`representation regarding the results that may be
`obtained by the user. It shall be the responsibility
`of the user to determine the suitability of any
`products mentioned for the user’s specific
`application. SCS urges you to review, prior to use,
`the Material Safety Data Sheets (MSDS) for any
`SCS products mentioned herein. These documents
`are available by contacting SCS.
`This information is not to be taken as a warranty or
`representation for which Specialty Coating Systems
`assumes legal responsibility nor as permission to
`practice any patented invention without a license.
`
`Standards and Certifications
`Each SCS customer has very unique and exact
`product and performance specifications that must be
`met. SCS experience and expertise is leveraged on
`every project – from the initial planning phases, to
`advanced engineering, to the development of
`customer-specific application processes – in order to
`meet the most challenging customer specifications
`and quality requirements.
`The following is a brief overview of the standards
`and certifications to which SCS and/or SCS Parylene
`coatings comply:
`• All U.S. and European coating facilities are
`ISO 9001:2000 certified.
`• SCS maintains ISO 14644 cleanrooms.
`• SCS coating centers are experienced in the
`Production Parts Approval Process (PPAP).
`• SCS Parylenes N, C and Parylene HT are
`ISO 10993 and USP Class VI certified.
`• SCS maintains comprehensive U.S. FDA Device
`and Drug Master Files that may be referenced in
`FDA submissions by SCS commercial coating
`service customers.
`• SCS Parylenes meet the requirements of
`IPC-CC-830.
`• SCS Parylenes are listed on the QPL for
`MIL-I-46058C.
`• SCS Parylene C is UL (QMJU2) recognized.
`• SCS Parylene coating services, raw materials and
`equipment comply with the European Union’s
`RoHS Directive 2002/95/EC.
`If you have any questions or would like more
`detail on the information presented here, please
`contact SCS.
`
`S C S P A R Y L E N E P R O P E R T I E S
`
`11
`
`Regeneron Exhibit 1074.011
`
`

`

`Table 6. International Conversions
`
`To convert g/cm3 to kg/m3, multiply by 1,000.
`To convert psi to MPa, divide by 145.
`To convert J/(g•K) to Cal/(g•K), divide by 4.184.
`To convert W/(m•K) to Cal/(s•cm•K), divide by 418.4.
`To convert (g•mm)/(m2•day) to (g•mil)/(100in2•day), multiply by 2.54.
`To convert (cc•mm)/(m2•day•atm) to (cc•mil)/(100in2•day•atm), multiply by 2.54.
`
`Innovative solutions for advanced technologies.
`Specialty Coating Systems leads the industry in providing Parylene solutions for our global customers’
`advanced technologies. SCS is the direct descendant of the companies that originally developed Parylene, and
`we have more than 35 years of experience and expertise that we leverage on every project for our customers
`– from the initial planning phases, to advanced engineering, to the development of application processes.
`Our worldwide resources include highly experienced sales engineers, some of the world’s foremost Parylene
`specialists, and expert manufacturing personnel working in nine state-of-the-art coating facilities around the
`globe. In addition to Parylene coating services, we design and manufacture industry-leading Parylene
`deposition systems; liquid spray, dip and spin coating systems; ionic contamination test systems; and UV
`and thermal cure units. Our equipment is used in environments that range from small university and
`research labs to high-volume production applications.
`Our extensive and proactive approach to production and quality requirements – testing, validating,
`documenting and processing – provides our customers peace of mind and minimizes their resources needed
`to meet the most challenging industry specifications and quality requirements.
`
`World Headquarters 7645 Woodland Drive, Indianapolis, IN 46278 USA
`TF 800.356.8260 P 317.244.1200 F 317.240.2739 W scscoatings.com
`
`© Copyright 2007 Specialty Coating Systems, Inc. All rights reserved. Covered by patent rights issued and/or pending. SCS test data herein may not be copied, reproduced
`or referenced without express written permission of SCS. Specialty Coating Systems and SCS are trademarks and service marks of Specialty Coating Systems, Inc.
`Parylene HT is a registered trademark of Specialty Coating Systems, Inc. Taber is a registered trademark of Taber Industries.
`
`002 2/07
`
`Regeneron Exhibit 1074.012
`
`