I417169
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`(19) TAIWAN INTELLECTUAL PROPERTY OFFICE
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`(12) INVENTION SPECIFICATION ANNOUNCEMENT
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`(11) CERTIFICATE NUMBER: TW I417169 B
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`(45) ISSUE DATE: 01 DECEMBER 2013
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`(21) APPLICATION NUMBER: 098119596
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`(22) APPLICATION DATE: 11 JUNE 2009
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`(51) INT. CL.: B24B53/12 (2006. 01)
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`B24D3/34 (2006. 01)
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`(71) APPLICANTS: CHEN, WEI EN (TW)
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`NO. 4, ALLEY 9, LANE 34, WENQUAN ROAD, BEITOU DISTRICT, TAIPEI CITY
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`SUNG, CHIEN MIN (TW)
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`NO. 4, LANE 32, CHUNG CHENG ROAD, TAMSUI DISTRICT, NEW TAIPEI CITY
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`CHEN, YING TUNG (TW)
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`NO. 344, CHUNG CHENG ROAD, TAOYUAN CITY, TAOYUAN COUNTY
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`(72) INVENTORS: CHEN, WEI EN (TW); SUNG, CHIEN MIN (TW); CHEN, YING TUNG (TW)
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`(74) AGENT: WANG, MINGCHANG
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`(56) REFERENCES:
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`TW
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`TW
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`JP
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`I26435
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`I290576
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`2005-219152A
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`TW
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`TW
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`I286097
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`200906546A
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`WO
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`97/11484A1
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`EXAMINER: LIU, LV HSIN
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`NUMBER OF CLAIMS: 26 NUMBER OF FIGURES: 16 0 PAGE IN TOTAL
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`(54) TITLE
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`Cutting Tool with a Plurality of Cutting Tops
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`(57) ABSTRACT
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`Provided is a cutting tool with a plurality of cutting tops, comprising: a base, having a working face facing a work piece;
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`and a plurality of grits, arranged on the working face of the base, wherein the grits are respectively processed and formed
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`to have a processing top, the wedge angle of the tops is 30 to 150 degrees, the attack angle between the grits and the
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`work piece is 30 to 150 degrees respectively, the mutual difference between heights of the tops protruding from the
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`working face is within 20%, and the tops are connected to the upper ends of the crystal faces on the outer sides of the
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`grits respectively to improve the wear resistance of the cutting tool, thereby improving the cutting efficiency and
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`lengthening the service life.
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`TW1417169B
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`20・・・cutting tool
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`200・・・specific pattern
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`21・・・base
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`211・・・working face
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`22, 23, 24, 25・・・grits
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`221, 231, 241, 251・・・tops
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`Fig. 4
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`ANNOUNCEMENT
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`13 September 2013 Revision and Replacement Page
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`Invention Patent Specification
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` (Please do not modify the format and sequence of this specification arbitrarily and do not fill in the parts marked with
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`※ Application Number: 98119596
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`※)
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`※ Application Date: 11 June 2009
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`※ IPC Category: B24B 53/12 (2006. 01)
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`B24D 3/34 (2006. 01)
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`I.
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`Title of the Invention: (Chinese/English)
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`Cutting Tool with a Plurality of Cutting Tops
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`II.
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`Invention Abstract in Chinese:
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`Provided is a cutting tool with a plurality of cutting tops, comprising: a base, having a
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`working face facing a work piece; and a plurality of grits, arranged on the working face of
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`the base, wherein the grits are respectively processed and formed to have a processing top,
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`the wedge angle of the tops is 30 to 150 degrees, the attack angle between the grits and the
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`work piece is 30 to 150 degrees respectively, the mutual difference between heights of the
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`tops protruding from the working face is within 20%, and the tops are connected to the
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`upper ends of the crystal faces on the outer sides of the grits respectively to improve the
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`wear resistance of the cutting tool, thereby improving the cutting efficiency and
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`lengthening the service life.
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`III. Abstract in English:
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`098119596
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`1
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`1023338305-0
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`IV. Designated Representative Image:
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`(I) The designated representative image of the present application is: Fig. (4).
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`(II) Brief description of signs in the representative image:
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`20 cutting tool
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`200 specific pattern
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`21 base
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`211 working face
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`22, 23, 24, 25 grits
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`221, 231, 241, 251 tops
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`V.
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`If there are chemical formulae, please disclose the chemical formula that can
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`best show the features of the invention:
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`VI. Description:
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`[TECHNICAL FIELD]
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`The present invention relates to a diamond cutting tool, particularly to a cutting tool
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`with a plurality of cutting tops.
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`[PRIOR ART]
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`Generally, the grits of a diamond wheel or a diamond dresser need to have processing
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`tops for cutting, such as cutting edge angles, cutting ridges and cutting edges, to pierce
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`into the material and have an ability to remove materials from the work piece; diamond
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`grits with tips facing the work piece or ridges facing the work piece have sharp cutting
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`edge angles and cutting ridges and show a good material cutting efficiency; diamond grits
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`with planes facing the work piece can also cut and plane materials from the work piece by
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`using the cutting edges around the plane, but the material cutting efficiency is poor.
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`A dresser for dressing a wafer polishing pad disclosed by Taiwan public patent
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`200707531 comprises: a base plate with a plurality of grooves on the upper surface of the
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`base plate; a fixing material filled in the plurality of grooves; and a plurality of grits,
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`which are fixed in the plurality of grooves by the fixing material. The plurality of grooves
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`are arranged regularly and each of the plurality of grooves is in a size that can only
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`accommodate one grit.
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`Application No. 097109052 filed by the applicant on 14 March 2008 discloses an
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`abrasive steering method with rules and a product. A flat plate is provided with a plurality
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`of positioning units in a shape of polygonal cylinder or cone, some of the abrasives of a
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`plurality of polyhedrons respectively automatically fall into the plurality of positioning
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`units through the mechanical force or the vibration method or the movement of the flat
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`plate, the automatic steering is carried out for leading one tip of each abrasive to protrude
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`from the first surface of the flat plate, and leading the other tip of the abrasive to penetrate
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`the positioning unit and protrude from the second surface of the flat plate, so that the
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`abrasives can be conveniently combined with the flat plate according to the set
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`arrangement pattern and the interval, the exposed height of the tip ends of the abrasives
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`protruding from the flat plate is controlled by utilizing the size and the shape of the
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`through holes of the positioning units, the abrasives are limited by utilizing the shape of
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`the positioning units, and then the abrasives are difficult to rotate after being positioned.
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`Taiwan public patent 200714416 discloses a tool with a polishing part of sintered
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`bodies and a manufacturing method thereof. The tool comprises a polishing tool with a
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`polishing part composed of super abrasive sintered bodies, the polishing part comprises a
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`plurality of polishing units with tops, and the tops are approximately on the same plane.
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`Multiple groups of parallel grooves are appropriately formed on the boundary that divides
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`the polishing part, so that the polishing units are arranged as equally as possible in the
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`entire polishing part.
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`US patent US 7150677 discloses a CMP conditioner, wherein a plurality of diamond
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`grits are bonded to the conditioning surface of the CMP conditioner, and (111) crystal
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`faces of the diamond grits are in parallel with the conditioning surface and face the
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`direction contacting the CMP pad. However, if a plane contacts the CMP pad, the cutting
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`efficiency will be poor.
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`[SUMMARY OF THE INVENTION]
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`In order to improve the wear resistance and cutting efficiency of the diamond cutting
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`tool, the present invention is proposed.
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`A main object of the present invention is to provide a cutting tool with a plurality of
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`cutting tops, wherein a plurality of grits are arranged on a working face of a base, the grits
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`are respectively processed and formed to have a processing top, the tops are connected to
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`the upper ends of the crystal faces on the outer sides of the grits respectively, and a more
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`wear-resistant crystal face of the grit contacts the processed surface of a work piece to
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`improve the wear resistance and cutting efficiency of the cutting tool and lengthen the
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`service life of the cutting tool.
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`Another object of the present invention is to provide a cutting tool with a plurality of
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`cutting tops, wherein the mutual difference between heights of the tops of the grits
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`protruding from the working face is within 20% to improve the cutting efficiency and
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`quality.
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`Other objects and effects of the present invention are shown in the drawings and
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`embodiments. The detailed description is as follows.
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`[DETAILED DESCRIPTION]
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`The following terms in the description and claims of the present invention will be
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`used according to the definitions set forth below.
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`「Working face」means that in a planing or processing procedure, the tool contacts or
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`is configured to contact one surface of the material of the work piece. In some cases, the
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`working face may only face the work piece and may not actually contact the work piece
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`when the working piece is manipulated.
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`「General plane」means appearance, including planar or outline appearance, arranged
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`above the surface of the base. The cutting tops, cutting edges or cutting ridges of grits are
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`aligned with the general plane. Examples of the appearance include without limitation
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`wavy appearance, convex appearance, concave appearance and appearance with a plurality
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`of steps.
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`「Top」refers to the part of a grit that extends for a maximum distance from the base
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`of the cutting tool. Therefore, the tops of grits can contact the surface of the work piece
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`earlier than other parts of the cutting tool. The piercing depth of the tops into the work
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`piece is in direct proportion to the spacing between the grits, and the ratio is related to
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`polishing parameters (for example, if the relative linear velocity is larger, then the piercing
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`depth is smaller) and the material of the work piece (for example, the piercing depth into a
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`plastic work piece is larger than that into a metal work piece). Increasing the sharpness of
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`the tops may reduce piercing resistance and piercing depth. Therefore, the shape of the
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`plurality of grits and the sharpness and spacing of the tops of the grits may determine the
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`distribution of the piercing depth of these grits into the work piece. The tops may be in
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`shapes of tip, ridge, camber and polygon for example.
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`During processing of a rigid grit on the surface of a work piece, the volume of the
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`material removed from the work piece is related to the hardness of the material, the normal
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`force applied on the processed material and the friction factor of the material.
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`During processing of grits, the processing is classified into the following categories
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`according to the characteristics of the material of the processed work piece:
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`1. Ductile materials mold:
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`As shown in Fig. 8, when grits 61 pierce into a work piece 62 made of a ductile
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`material, the work piece 62 will have plastic deformation, the surface 620 of the processed
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`work piece 62 will have raised protrusions 621, and this phenomenon will result in many
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`grooves on the surface 620 of the work piece 62 during processing with a plurality of grits
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`61, for example the processing of plastics. Therefore, when a work piece 62 made of a
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`ductile material is processed, the distance between the grits 61 needs to be controlled
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`appropriately so that the chip pocket material generates a zone of plastic deformation.
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`2. Brittle materials mold:
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`As shown in Fig. 9, when the work piece 63 is hard, lateral micro-cracks 631 will be
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`generated on the work piece 63 at both ends of the grits 61, and even the work piece 63 is
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`removed in the form of micro cracking. For example, silicon wafers, glass and other hard
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`and brittle materials are processed.
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`As shown in Fig. 9, Fig. 10 and Fig. 11, if the wedge angle (θ) of the tops 611 of the
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`grits 61, the space (d) between the grits 61 and the rake angle (a) of processing are
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`appropriately designed, the piercing depth (Dp) of the grits 61 into the work piece 64 and
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`the width (L) of the lateral cracks of cuttings 641 can be controlled as shown in Fig. 11
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`and continuous cuttings 641 in the form of micro cracking will be generated on the surface
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`of the work piece 64 as shown in Fig. 9. In addition to effectively removing the material,
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`the surface roughness of the work piece 64 can be controlled, too.
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`When the grits 61 are in various shapes, they will interact with the work piece 64 (the
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`processed object). Due to intervention, processing traces in various depths are left.
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`Therefore, some grits 61 will cut the material of the work piece 64, some grits 61 will
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`plow the material of the work piece 64 and some grits 61 will only slide on the surface of
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`the work piece 64. These complex polishing actions make the polishing marks on the
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`surface 642 of the work piece 64 fine, tiny (subject to the size of the grits) and irregular,
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`while the more the grits 61 slide, the poorer the cutting ability will be.
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`Between the grits 61 and the work piece 64, there are the following three modes of
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`interactions:
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`1. Cutting: During the process of cutting, cuttings 641 are generated from the work
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`piece 64, as shown in Fig.11 and Fig. 12.
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`2. Plowing: During the process of plowing, the work piece 62 is plastically
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`deformed and does not generate cuttings, but ridged protrusions 621 are generated on both
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`sides of the grits 61, as shown in Fig. 8.
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`3. Rubbing: The grits 61 rub along the surface 642 of the work piece 64, and elastic
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`deformations 644 are generated on the surface 642 of the work piece 64, as shown in Fig.
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`13.
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`During actual processing, all of these three modes will happen, but the probabilities of
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`these modes depend on the piercing depth of the grits and the morphological design of the
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`tops. For example, when the wedge angle of grit tops is small and the grits are sharp, the
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`piercing depth (Dp) into the work piece is large, but the strength is low; on the contrary,
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`when the wedge angle is large, it is not easy to pierce the material, but the wear resistance
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`is high. As shown in Fig. 11, when the grits 61 perform processing at a positive rake angle
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`(+ α), it is easy for cuttings 641 to slide along the surfaces of the grits 61 and be deformed
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`along the shearing surface, thereby removing the cuttings 641 and making for the
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`processing efficiency; as shown in Fig. 12, when the grits 61 perform processing at a
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`negative rake angle (- α), it is likely that the work piece 64 is squeezed by the grits, and
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`the work piece 64 is plastically deformed due to plowing, particularly when the work piece
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`64 is made of a soft material.
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`As shown in Fig. 10, Fig. 11, Fig. 14 and Fig. 15, when the relation between the
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`piercing depth (Dp) and the attack angle (β) is considered, the smaller the wedge angle (θ)
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`of the grits 61 is, the larger the attack angle (β) between the grits 61 and the processed
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`material will be, as shown in Fig. 11 and the easier the removal of the processed material
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`will be; the attack angle (β) is related to the wedge angle of the grits 61 and also has a
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`great relation to the rake angle (α) of processing. The larger the negative rake angle is, the
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`smaller the attack angle (β) will be, as shown in Fig. 15, the more easily the material will
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`be squeezed and the lower the removal rate of the material will be. As shown in Fig. 14,
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`the attack angle (β) between the grits 61 and the processed material is between the attack
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`angles (β) shown in Fig. 11 and Fig. 15.
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`The morphology, wedge angle and nose radius (r) of the grits and the space between
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`the grits will affect the piercing depth of the grits into the material and the removal rate of
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`the material, so effective control of these factors can optimize the processing mode.
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`Diamond crystallization is directional. For example, every crystal face of an
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`octahedral diamond is a (111) crystal face and is a surface with the most closely arranged
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`carbon atoms, so its hardness is larger and it is more resistant to wear; for another example,
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`every crystal face of a hexahedral diamond is a (100) crystal face and is a surface with
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`lower density of carbon atoms, so its hardness is low. Therefore, during cutting and
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`polishing of diamonds, when the diamonds are polished to the (111) crystal faces of the
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`diamonds, it will be difficult to continue the processing, so diamond grits 11, 12, 12’ and
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`13 in different shapes as shown in Fig. 1, Fig. 2A, Fig. 2B and Fig. 3 can be obtained.
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`Diamond grits 11, 12, 12’ and 13 have a plurality of (111) crystal faces 111, 121, 121’ and
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`131 on the outer side. Diamond grits 11, 12, 12’ and 13 have tops 110, 120, 120’ and 130
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`respectively; the tops 110, 120, 120’ and 130 are in a sharp shape, a ridge shape, a camber
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`shape and a platform shape respectively; the tops 110, 120, 120’ and 130 are connected to
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`the upper ends of the plurality of (111) crystal faces 111, 121, 121’ and 131 respectively.
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`By various processing methods such as mechanical polishing and energy beam cutting,
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`diamonds can be processed into specific shapes with a top. In addition to the shapes of the
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`foregoing diamond grits 11, 12, 12’ and 13 shown in Fig. 1, Fig. 2A, Fig. 2B and Fig. 3, a
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`conical shape, a three-sided tapered shape, a four-sided tapered shape or other multi-sided
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`tapered shapes, or a prism shape, a four-sided shape or a multi-sided shape may be formed,
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`too. Except that the shape of the processed face is changed, the shapes of other primitive
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`faces of the diamonds can still be retained. Further, the tops are connected to the upper
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`ends of the processed crystal faces on the outer sides of the diamond grits, the (111) crystal
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`face that is more wear resistant for example. Cutting and polishing the work piece by
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`using the (111) crystal face may lengthen the polishing life of the tool.
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`The present invention provides a cutting tool with a plurality of cutting tops. The
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`cutting tool can be used for cutting or performing other actions on a work piece to remove
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`materials from the work piece and may provide a complete, uniform and/or flat surface for
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`the work piece. The cutting tool provided by the present invention can be used effectively,
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`for example by a planing device for planing off materials from a work piece, a processing
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`device for processing different work pieces, and a polishing device for polishing various
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`kinds of work pieces.
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`As shown in Fig. 4 and Fig. 5, a cutting tool 20 in the first embodiment of the present
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`invention comprises a base 21, the base 21 comprises a working face 211, and the working
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`face 211 faces the work piece 30 as shown in the figures to perform the cutting or planing
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`work; a plurality of grits 22, 23, 24, 25, etc. may be arranged on the working face 211 of
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`the base 21, while the grits 22, 23, 24 and 25 are respectively processed and formed to
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`have tops 221, 231, 241 and 251 respectively; the wedge angles of the tops 221, 231, 241
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`and 251 are 30 to 150 degrees; the attack angles between the grits 22, 23, 24 and 25 and
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`the work piece 30 are 30 to 150 degrees respectively. The tops 221, 231, 241 and 251 are
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`the most protruding portions of the grits 22, 23, 24 and 25, and may also be portions in a
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`sharp shape, and the radius of the tips of the sharp-shaped portions is smaller than 100
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`microns. The diameter of the grits 22, 23, 24 and 25 is greater than 0.5 mm. The base 21 is
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`in a discoid shape. The grits 22, 23, 24 and 25 are arranged on the surface of the working
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`face 211 in a specific pattern, for example a specific pattern 200 of a plurality of straight
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`lines as shown in Fig. 4. More than 100 grits 22, 23, 24 and 25 are bonded on the surface
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`of the working face 211. The grits 22, 23, 24 and 25 may be industrial diamond grits. The
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`cutting tool 20 in this embodiment may also comprise diamond grits 11, 12, 12’ and 13 in
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`various shapes as shown in Fig. 1, Fig. 2A, Fig. 2B and Fig. 3.
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`As shown in Fig. 4 and Fig. 5, the height difference of the tops 221, 231, 241 and 251
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`from the general plane 40 is within 10 microns. The spacing of the tops 221, 231, 241
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`and 251 is 3 to 10 times of the diameter of the grits 22, 23, 24 and 25. As shown in Fig. 4,
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`Fig. 5 and Fig. 6, the mutual difference between heights of the tops 221, 231, 241 and
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`251 protruding from the working face 211 is within 20%, which enables most of the tops
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`221, 231, 241 and 251 to pierce into the work piece 30 at the same time and to form more
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`grooves on the surface of the work piece 30 to improve the cutting efficiency and quality.
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`As shown in Fig. 6, the grit 22 cuts the top 221 and may be against the work piece 30,
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`and the grit 22 and the work piece 30 may move relative to each other. As shown by the
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`arrow in Fig. 6, small sheets or cuttings 31 are removed from the work piece 30 by means
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`of cutting, shearing, planing or other actions to cause the surface of the work piece 30 to
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`be very flat and have specific grooves.
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`The grits 22, 23, 24 and 25 are in a conical shape, a four-sided tapered shape, a
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`five-sided tapered shape, a three-sided tapered shape, or other specific multi-sided tapered
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`shapes, or a prism shape, a four-sided shape or a multi-sided shape. The grits 22, 23, 24
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`and 25 may be diamond grits respectively, the tops 221, 231, 241 and 251 thereof are
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`connected to the upper ends of the processed crystal faces on the outer sides of the
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`diamond grits respectively, the (111) crystal face for example, and this crystal face is used
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`to contact the polished work piece to cut and polish the work piece, and is more resistant
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`to wear.
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`As shown in Fig. 7, a cutting tool 50 in the second embodiment of the present
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`invention comprises a base 51, the base 51 comprises a working face 511, and the working
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`face 511 faces the work piece 30 as shown in Fig. 6 to perform the cutting or planing work;
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`a plurality of grits 22, 23, 24, 25, etc. may be arranged on the working face 511 of the base
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`51; the attack angles between the grits 22, 23, 24 and 25 and the work piece are 30 to 150
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`degrees respectively. The base 51 is in a wheel shape. The cutting tool 50 in this
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`embodiment may also comprise diamond grits 11, 12, 12’ and 13 in various shapes as
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`shown in Fig. 1, Fig. 2A, Fig. 2B and Fig. 3.
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`The grits provided by the present invention may be cubic boron nitride (cBN) grits,
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`diamond grits and other grits made of a super hard material.
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`The present invention may use electroplating materials, sintering materials, polymer
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`materials, welding materials and other materials as bonding agents to fix and bond the
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`grits and the base. For example, a metal material is used as a bonding agent to fix the grits
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`onto the base through brazing, sintering or other bonding operations.
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`The base provided by the present invention may be a base made of any material such
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`as metal, metal alloy, plastics, ceramic or composite material.
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`The cutting tool provided by the present invention may be used in different
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`applications. In an embodiment, it is particularly suitable for planing work pieces, which
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`are fragile in nature, for example, silicon wafers, glass sheets, metals, used silicon wafers
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`recovered by the method of CMP (chemical mechanical polishing), LCD glass, LED
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`substrates, silicon carbide wafers, quartz wafers, silicon nitride and zirconium oxide. In
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`the conventional silicon wafer processing technology, a polished wafer can generally be
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`carried by a carrier and positioned on a polishing pad arranged on a rotating platform.
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`When abrasive is applied to the polishing pad and a pressure is applied to the carrier, the
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`wafer can be polished through the relative movement of the platform and the carrier.
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`Therefore, the silicon wafer is actually ground or polished by the action of fine abrasive to
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`obtain a relatively smooth surface.
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`The cutting tool provided by the present invention may also be used in chemical
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`mechanical polishing (CMP), as a polishing pad dresser, i.e., as shown in Fig. 6, the work
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`piece 30 can be a CMP pad, and the cutting tool provided by the present invention can
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`form a rough area 32 in a specific size and shape on the CMP pad. The roughness (Ra) of
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`the rough area 32 is smaller than 50 microns, and the Asperities tops formed in the rough
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`area 32 do not protrude from the average height of the surface of the CMP pad by more
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`than 20 microns.
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`The present invention provides a cutting tool with a plurality of cutting tops, a
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`plurality of grits are arranged on a working face of a base, the grits are respectively
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`processed and formed to have a top, the wedge angles of the tops are 30 to 150 degrees,
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`the attack angles between the grits and the work piece are 30 to 150 degrees respectively,
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`and the direction of the tops may be perpendicular to the processed faces of the lattices of
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`the grits to raise the wear resistance of the cutting tool, improve the cutting efficiency and
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`lengthen the service life; further, the mutual difference between heights of the tops of the
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`grits protruding from the working face is within 20% to improve the cutting quality.
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`The above record is only embodiments applying the technical content of the present
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`invention. All the modifications and changes made by those skilled in the art by using the
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`present invention shall fall in the scope of the claims of the present invention. The present
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`invention is not limited to the embodiments.
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`[BRIEF DESCRIPTION OF THE DRAWINGS]
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`Fig. 1 is a schematic view of a diamond grit with a top in a sharp shape.
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`Fig. 2A is a schematic view of a diamond grit with a top in a ridge shape.
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`Fig. 2B is a schematic view of a diamond grit with a top in a camber shape.
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`Fig. 3 is a schematic view of a diamond grit with a top in a platform shape.
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`Fig. 4 is a schematic view of a cutting tool in the first embodiment of the present
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`invention.
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`Fig. 5 is a schematic view of A-A section in Fig. 4.
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`Fig. 6 is a schematic view of a cutting tool that cuts a work piece in the present
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`invention.
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`Fig. 7 is a schematic view of a cutting tool in the second embodiment of the present
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`invention.
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`Fig. 8 is a schematic view of a grit that pierces into a work piece, causing plastic
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`deformation of the work piece.
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`Fig. 9 is a schematic view of a grit that pierces into a work piece, generating lateral
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`micro-cracks.
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`Fig. 10 is a schematic view of a plurality of grits that cut a work piece.
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`Fig. 11 is a schematic view of processing of a grit at a positive rake angle.
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`Fig. 12 is a schematic view of processing of a grit at a negative rake angle.
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`Fig. 13 is a schematic view of a grit that rubs along the surface of a work piece,
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`generating an elastic deformation.
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`Fig. 14 is a schematic view of processing of a grit at a small attack angle.
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`Fig. 15 is a schematic view of processing of a grit at an even smaller attack angle.
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`[Description of Reference Signs]
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`11, 12, 12’, 13 diamond grits
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`110, 120, 120’, 130 tops
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`111, 121, 121’, 131 (111) crystal faces
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`20, 50 cutting tools
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`200 specific pattern
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`21, 51 base
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`211, 511 working faces
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`22, 23, 24, 25, 61 grits
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`221, 231, 241, 251, 611 tops
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`30, 62, 63, 64 work pieces
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`31, 641 cuttings
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`32 rough area
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`40 general plane
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`620, 642 surfaces
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`621 protrusion
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`631 micro-crack
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`644 elastic deformation
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`VII．Claims:
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`1. A cutting tool with a plurality of cutting tops, comprising:
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`a base, having a working face facing a work piece; and
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`a plurality of grits, which need to be combined and arranged on the working face of
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`the base according to different processing characteristics;
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`wherein the grits are respectively processed and formed into specific shapes with a
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`top, the tops protrude from the working face respectively and the mutual difference
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`between heights of the tops protruding from the working face is within 20%; the
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`height difference between the tops and the general plane is within 10 microns; there
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`is a gap between the grits to adjust the piercing depth of the grits into the work piece
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`and carve specifically distributed grooves on the work piece, and the specifically
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`distributed grooves decide the roughness of the surface of the work piece.
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`2.
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`The cutting tool with a plurality of cutting tops according to claim 1, wherein the
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`grits are cubic boron nitride grits or diamond grits.
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`3.
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`The cutting tool with a plurality of cutting tops according to claim 2, wherein the
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`grits are in a conical shape, a multi-sided tapered shape, a prism shape, a four-sided
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`shape or a multi-sided shape.
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`4.
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`The cutting tool with a plurality of cutting tops according to claim 3, wherein the
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`diameter of the grits is greater than 0.5 mm.
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`5.
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`The cutting tool with a plurality of cutting tops according to claim 4, wherein the
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`spacing of the tops is 3 to 10 times of the diameter of the grits.
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`6.
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`The cutting tool with a plurality of cutting tops according to claim 5, wherein the
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`grits are respectively processed and formed by means of mechanical polishing or
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`energy beam cutting.
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`7.
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`The cutting tool with a plurality of cutting tops according to claim 6, wherein the
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`grits are arranged on the surface of the working face in a specific pattern.
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`8.
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`The cutting tool with a plurality of cutting tops according to claim 7, wherein more
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`than 100 grits are bonded on the surface of the working face.
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`9.
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`The cutting tool with a plurality of cutting tops according to claim 8, wherein the
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`grits are in a conical shape or a multi-sided tapered shape; and the tops are tips of the
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`sharp-shaped portions of the grits and the radius of the tips is smaller than 100
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`microns.
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`10. The cutting tool with a plurality of cutting tops according to claim 9, wherein the
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`base is made of metal, metal alloy, plastics, ceramic or composite material.
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`11. The cutting tool with a plurality of cutting tops according to claim 10, wherein the
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`grits and the base are fixed and bonded by means of electroplating, sintering or
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`welding, or by using a polymer material as a bonding agent.
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`12. The cutting tool with a plurality of cutting tops according to claim 11, wherein a
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`metal material is used as a bonding agent between the grits and the base to fix the
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`grits onto the base through brazing or sintering operation.
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`13. The cutting tool with a plurality of cutting tops according to any of claims 1 to 12,
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`wherein the base is in a discoid shape.
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`14. The cutting tool with a plurality of cutting tops according to claim 13, wherein the
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`cutting tool is polishing pad dresser; and the work piece is a polishing pad.
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`15. The cutting tool with a plurality of cutting tops according to claim 14, wherein the
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`polishing pad is a CMP (chemical mechanical polishing) pad.
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`16. The cutting tool with a plurality of cutting tops according to claim 15, wherein the
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`cutting tool forms a rough area in a specific size and shape on the CMP pad; and the
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`roughness of the rough area is smaller than 50 microns.
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`17. The cutting tool with a plurality of cutting tops according to claim 16, wherein the
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`Asperities tops formed in the rough area do not protrude from the average height of
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`the surface of the CMP pad by more than 20 microns.
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`18. The cutting tool with a plurality of cutting tops according to claim 17, wherein the
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`grits are diamond grits; and the tops of the diamond grits are connected to the upper
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`ends of the crystal faces on the outer sides of the diamond grits respectively.
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`19. The cutting tool with a plurality of cutting tops according to claim 18, wherein the
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`crystal faces on the outer sides of the diamond grits are (111) crystal faces.
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`20. The cutting tool with a plurality of cutting tops according to claim 19, wherein the
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`grits are industrial diamond grits.
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