Pinnacle(cid:228)
` Plus+ Pulsed DC Power Supply:
`New Horizons in Reactive Sputtering Performance
`
`AE’s new Pinnacle Plus+ pulsed dc power supply opens up new performance horizons for your
`reactive processes. Traditionally, RF has been used to create high quality films by sputtering
`insulating targets directly. With its advanced pulsed dc capabilities, AE’s new Pinnacle Plus+
`product line offers a cost-effective, technologically advanced alternative—and it’s available in
`single- and dual-output 5 kW models as well as single-output 10 kW models.
`
`Using RF technology is expensive and complex compared with using pulsed dc technology
`available in the Pinnacle Plus+ product line. This new product line delivers high-quality films and
`allows increased throughput. It is ideal for extending the performance of existing processes as
`well as for expanding the possibilities for developing new, previously unachievable dc processes.
`
`The Pinnacle Plus+ product line is an effective combination of standard dc technology and
`process-proven pulsed dc technology first invented by AE in the early 1990s. AE’s application
`and engineering expertise ensures a robust, flexible, reliable design that delivers the high output
`accuracy and process repeatability that is critical in reactive processes.
`
`Performance Results You Can See
`
`AI2O3 sputtered with pulsed dc.
` AI2O3 sputtered without pulsed dc.
`Photo Source: Centre for Advanced Materials and Surface Engineering, University of Salford, UK
`
`•
`
`Innovative Features and Performance Benefits You Can Bank On
`•
`Individually controllable dual-output pulsed dc power from a single unit
`Provides a cost-effective solution for multi-chamber production
`Increased process flexibility
`Incorporates an extended frequency range of 5 kHz to 350 kHz
`Full power over a wide impedance range with high current at low voltage
`50% duty cycle—the highest available—enables bi-polar pulsed dc operation
`• More repeatable process performance
`Integrated microprocessor
`Active front panel
`Provides easy access to critical parameters
`• Meets CE requirements
`
`•
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`Page 1 of 4
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`APPLIED MATERIALS EXHIBIT 1065
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`Easy to Operate
`Ease-of-use is a top design consideration with the Pinnacle Plus+ product line which offers a wide
`selection of well established User and Host port protocols. In addition, we’ve designed the “form and fit”
`to allow easy transition from earlier generations of AE supplies.
`
`Electrical Specifications
`Output
`Power Options
`
`10 kW: Single output
` 5 kW: Single output; dual output, independently controlled
`
`Voltage Range
`
`325 Vdc to 650 Vdc
`
`Maximum Current
`
`Frequency
`
`Reverse Time
`
`Duty Cycle
`
`10 kW: 30.8 A (below 325 V)
` 5 kW: 15.4 A (below 325 V)
`
`5 kHz to 350 kHz (variable)
`
`400 nsec to 5 m sec (variable)
`
`Up to 50%
`
`Reverse Voltage
`
`10% of the operating voltage
`
`Ignition Voltage
`
`1700 V
`
`Regulation Modes
`
`Power, voltage, or current
`
`Repeatability
`
`Output Readback Accuracy
`
`Input
`Voltage Range
`
`Current
`
`Output power repeatability from run to run at a constant setpoint is
`0.1% from 10% to 100% of rated power
`
`Accuracy of actual output value (V, kW, or A) to setpoint at 25(cid:176) C is
`±1% of the actual value or ±0.2% of the full rated output (whichever
`is greater) for the full input voltage range and output impedance
`range
`
`360 Vac to 440 Vac, 3 f , 50/60 Hz, no neutral required
`
`Dual 5 kW & Single 10 kW: 17 A nominal
`Single 5 kW: 9 A nominal
`
`Communications Specifications
`Front Panel
`Active front panel or passive display front panel
`
`Remote Panel
`
`Host (Serial)
`
`User (Analog)
`
`Accessory available
`
`RS-232/422/485 or Profibus (12 Mbit)
`
`24-V isolated or 15-V non-isolated
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`

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`Physical Specifications
`Size
`
`133 mm (H) x 483 mm (W) x 639 mm (D), including connectors
`5.22† (H) x 19† (W) x 25.18† (D)
`
`Weight
`
`Dual 5 kW & Single 10 kW: 30 kg (66 lb)
`Single 5 kW: 25 kg (55.25 lb)
`
`Input Power Connector
`
`Five terminal, DIN compression terminal block
`
`Input Cable
`
`Output Connector
`
`Supports up to 8 AWG wire per terminal
`
`Shielded strain relief with a 3-terminal, multi-contact, pluggable
`connector; other options are available
`
`Output Cable
`
`Triax or twinax (shielded) cable recommended
`
`Host and User Port Cable
`
`Shielded cable recommended
`
`Compliance Specifications
`Electro-Magnetic Compatibility
`
`Tested for and complies with Directive 89/336/EEC: Standards EN
`55011 (CISPR 11 Group 2, Class A) and EN 50082-2
`
`Safety Standards
`
`Tested for and complies with Directive 73/23/EEC: Standard EN
`50178
`
`Installation Requirements
`
`Standards listed and also EN 60204 (IEC 204), VDE 0113, and
`other applicable requirements
`
`Environmental Specifications During Operation
`Air Temperature
`0°C to +40°C (+32°F to +104°F)
`
`Relative Humidity
`
`5% to 85% (+1 g/m3 to +25 g/m3), no condensing or icing
`
`Air Pressure
`
`80 kPa to 106 kPa (800 mbar to 1060 mbar)
`
`Ordering Information
`Configuration
`AE Part Number
`Description
`5 kW, dual output
`3152430-xxx
`5 kW /5 kW
`10 kW, single output
`3152432-xxx
`10 kW
`5 kW, single output
`3152434-xxx
`5 kW
`xxx Please contact your local AE sales representative for information on available options and pricing.
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`Pinnacle Plus+ Active Front Panel
`
`Pinnacle Plus+ Passive Display Front Panel (Dual)
`
`Pinnacle Plus+ Rear Panel (Dual)
`
`04/99
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`Page 4 of 4
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